@article{CTT100588880, author = {KAZUO TSUTSUI and Ruifei Xiang and K. Nagahiro and T. Shiozawa and Ahmet Parhat and Y. Okuno and M. Matsumoto and M. Kubota and Kuniyuki KAKUSHIMA and HIROSHI IWAI}, title = {Analysis of irregular increase in sheet resistance of Ni silicides on transition from NiSi to NiSi2}, journal = {Microelectronic Engineering}, year = 2008, }