@article{CTT100809043, author = {Yuki Hirata and Kanju Kitamura and Takumi Ishikawa and Junho Choi}, title = {Effect of precursor gas on the structure and mechanical properties of hydrogenated amorphous carbon films deposited on a trench sidewall}, journal = {Journal of Applied Physics}, year = 2019, } @article{CTT100765679, author = {Yuki Hirata and Takumi Ishikawa and Junho Choi and Shinya Sasaki}, title = {Analysis of microstructure and surface morphology of a-C:H films deposited on a trench target}, journal = {Diamond & Related Materials}, year = 2018, } @article{CTT100765678, author = {Yuki Hirata and Koeki Onishi and Junho Choi}, title = {Effect of Ar+ ion assist on the properties of a-C:H films deposited on a trench}, journal = {Thin Solid Films}, year = 2017, } @article{CTT100765677, author = {Y Hirata and J Choi}, title = {Structure and mechanical properties of a-C:H films deposited on a three-dimensional target: Comparative study on target scale and aspect ratio}, journal = {Journal of Physics D: Applied Physics}, year = 2017, } @article{CTT100765673, author = {Yuki Hirata and Junho Choi}, title = {Deposition of a-C:H films on inner surface of high-aspect-ratio microchannel}, journal = {Journal of Applied Physics}, year = 2016, } @article{CTT100765672, author = {Yuki Hirata and Yuya Nakahara and Keisuke Nagato and Junho Choi}, title = {Deposition of a-C:H Films on a Nanotrench Pattern by Bipolar PBII&D}, journal = {Journal of Physics D: Applied Physics}, year = 2016, } @article{CTT100765671, author = {Yuki Hirata and Junho Choi}, title = {Microstructure of a-C:H film prepared on micro trench and analysis of ions and radicals behavior}, journal = {Journal of Applied Physics}, year = 2015, } @article{CTT100765670, author = {Yuki Hirata and Junho Choi and Takahisa Kato}, title = {DLC coating on a trench-shaped target by bipolar PBII}, journal = {International Journal of Refractory Metal and Hard Materials}, year = 2015, } @article{CTT100765669, author = {平田祐樹 and 朴 元淳 and 崔 埈豪 and 加藤 孝久}, title = {バイポーラPBII 法によるトレンチ形状物へのDLC成膜}, journal = {トライボロジスト}, year = 2013, } @inproceedings{CTT100787747, author = {Yuki Hirata and Takumi Ishikawa and Junho Choi}, title = {EVALUATION OF STRUCTURAL AND MECHANICAL PROPERTIES OF 3-DIMENSIONALY COATED a-C:H FILMS}, booktitle = {Program of The 5th Asian Symposium on Materials and Processing(ASMP2018)}, year = 2018, } @inproceedings{CTT100767985, author = {崔埈豪 and 北村観樹 and 大場雅史 and 平田祐樹 and 佐々木信也}, title = {マイクロホール内面へのa-C:H膜の作成}, booktitle = {トライボロジー会議2018春 東京 講演論文集}, year = 2018, } @inproceedings{CTT100766107, author = {Yuki Hirata and Junho Choi and Shinya Sasaki}, title = {Analysis of microstructure and surface morphology of a-C:H films deposited on a trench target}, booktitle = {Abstracts of 28th International Conference on Diamond and Carbon Materials}, year = 2017, } @inproceedings{CTT100766110, author = {Yuki Hirata and Kanju Kitamura and Shinya Sasaki and Junho Choi}, title = {DEPENDENCE ON PRECURSOR GAS ON THE a-C:H FILM PROPERTIES DEPOSITED ON A TRENCH TARGET}, booktitle = {Abstracts of XXVI International Materials Research Congress}, year = 2017, } @inproceedings{CTT100766045, author = {北村観樹 and 平田祐樹 and 崔埈豪}, title = {マイクロチャネル内面に作成したシリコン添加DLC膜の膜構造と機械的特性}, booktitle = {トライボロジー会議2017春 東京 講演論文集}, year = 2017, } @inproceedings{CTT100766064, author = {北村観樹 and 平田祐樹 and 崔埈豪}, title = {マイクロチャネル内面に成膜した非晶質炭素膜の膜構造と機械的特性}, booktitle = {日本機械学会関東支部第23期総会講演会 講演論文集}, year = 2017, } @inproceedings{CTT100766120, author = {Yuki Hirata and Koeki Onishi and Shinya Sasaki and Junho Choi}, title = {Effect of Ar+ Ion Assist on the Properties of a-C:H Films Deposited on a Trench}, booktitle = {Abstracts of Pacific Rim Symposium on Surfaces, Coatings and Interfaces 2016}, year = 2016, } @inproceedings{CTT100766074, author = {平田祐樹 and 崔埈豪}, title = {マイクロチャネル内面への非晶質炭素膜の成膜}, booktitle = {トライボロジー会議2016春 東京 講演論文集}, year = 2016, } @inproceedings{CTT100766129, author = {Junho Choi and Hayato Shimozono and Yuki Hirata and Setsuo Nakao and Haruyuki Yasui}, title = {UV Raman Study of a-C:H Films Deposited on Trench Sidewall}, booktitle = {第25 回日本MRS 年次大会 予稿集}, year = 2015, } @inproceedings{CTT100766130, author = {Yuki Hirata and Junho Choi}, title = {Deposition of a-C:H film on inner surface of High-Aspect-Ratio Microchannel}, booktitle = {Abstracts of 4th Nano Today Conference}, year = 2015, } @inproceedings{CTT100766128, author = {Yuki Hirata and Junho Choi}, title = {Deposition of a-C:H film on inner surface of microchannel}, booktitle = {第25 回日本MRS 年次大会 予稿集}, year = 2015, } @inproceedings{CTT100766075, author = {Yuki Hirata and Junho Choi}, title = {Structural and Mechanical Properties of Amorphous Carbon Films Deposited on the Micro-trench Patterns by Bipolar PBII and Plasma Analysis}, booktitle = {Proceedings of International Tribology Conference, Tokyo 2015}, year = 2015, } @inproceedings{CTT100766076, author = {Yuki Hirata and Yuya Nakahara and Keisuke Nagato and Takahisa Kato and Junho Choi}, title = {Amorphous Carbon Film as a Mold Release Layer for Nanoimprint Lithography}, booktitle = {Proceedings of International Tribology Conference, Tokyo 2015}, year = 2015, } @inproceedings{CTT100766131, author = {Yuki Hirata and Junho Choi}, title = {The effects of negative bias voltage on the structural and mechanical properties of amorphous carbon film deposited on the micro-trench patterns}, booktitle = {Abstracts of Materials Today Asia 2014}, year = 2014, } @inproceedings{CTT100766135, author = {Yuki Hirata and Takahisa Kato and Junho Choi}, title = {DLC coating on a trench-shaped target by bipolar PBII}, booktitle = {第10 回学際領域における分子イメージングフォーラム 予稿集}, year = 2014, } @inproceedings{CTT100766132, author = {平田祐樹 and 下園隼人 and 崔埈豪}, title = {バイポーラPBII 法によるマイクロトレンチへのDLC コーティングおよびプラズマ挙動解析}, booktitle = {第55 回真空に関する連合講演会 予稿集}, year = 2014, } @inproceedings{CTT100766077, author = {Yuki Hirata and Takahisa Kato and Junho Choi}, title = {DLC coating on a trench-shaped target by bipolar PBII}, booktitle = {Proceedings of 10th International Conference on the Science of Hard Materials}, year = 2014, } @inproceedings{CTT100766141, author = {平田祐樹 and 朴元淳 and 加藤孝久 and 崔埈豪}, title = {バイポーラPBII 法によるトレンチ形状物へのDLCコーティング―プラズマ挙動解析}, booktitle = {第54 回真空に関する連合講演会 予稿集}, year = 2013, } @inproceedings{CTT100766078, author = {平田祐樹 and 朴元淳 and 下園隼人 and 崔埈豪 and 加藤孝久}, title = {バイポーラPBII 法によるマイクロトレンチへのDLC コーティング}, booktitle = {第5 回マイクロ・ナノ工学シンポジウム 講演論文集}, year = 2013, } @inproceedings{CTT100766138, author = {平田祐樹 and 大西弘益 and 加藤孝久 and 崔埈豪}, title = {バイポーラPBII 法によるトレンチ形状物へのDLCコーティング―膜の構造および機械的特性評価}, booktitle = {第54 回真空に関する連合講演会 予稿集}, year = 2013, } @inproceedings{CTT100766142, author = {Junho Choi and Hideyuki Tokioka and Wonsoon Park and Yuki Hirata and Takahisa Kato}, title = {DLC coating on a micro-trench using bipolar PBII}, booktitle = {Abstracts of Collaborative Conference on Materials Research 2013}, year = 2013, } @inproceedings{CTT100766080, author = {平田祐樹 and 朴元淳 and 崔埈豪 and 加藤孝久}, title = {トレンチ形状物への三次元DLC コーティングおよびプラズマ挙動解析}, booktitle = {トライボロジー会議2013春 東京 講演論文集}, year = 2013, } @inproceedings{CTT100766079, author = {崔埈豪 and 時岡秀行 and 朴元淳 and 平田祐樹 and 加藤孝久}, title = {バイポーラPBII 法によるマイクロ・ナノスケールトレンチパターンへの三次元DLC コーティング}, booktitle = {トライボロジー会議2013春 東京 講演論文集}, year = 2013, } @inproceedings{CTT100766081, author = {朴元淳 and 平田祐樹 and 崔埈豪 and 加藤孝久}, title = {プラズマシミュレーションによるマイクロトレンチ形状物への三次元DLC コーティング解析}, booktitle = {トライボロジー会議2013春 東京 講演論文集}, year = 2013, } @inproceedings{CTT100593835, author = {Masahiro Kawaguchi and Saiko Aoki and Atsushi Mitsuo and Kazuo Morikawa and Satoshi Uchida and Junho Choi and Takahisa Kato}, title = {Effect of Flash Temperature on Change in DLC Film Structure during Sliding}, booktitle = {NETSU SHORI Journal of The Japan Society for Heat Treatment}, year = 2009, }