@inproceedings{CTT100598394,
  author = {Mitsuru Nakata and Kazushige Takechi and Shinya Yamaguchi and Eisuke Tokumitsu and Hiroshi Tanabe and Setsuo Kaneko},
  title = {Low-Temperature Fabrication of Amorphous InGaZnO4 Thin-Film Transistors Utilizing Excimer},
  booktitle = {},
  year = 2010,
}