@article{CTT100600446, author = {Kuniyuki KAKUSHIMA and Kiichi Tachi and Jaeyeol Song and Soshi Sato and Hiroshi Nohira and E. Ikenaga and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Comprehensive x-ray photoelectron spectroscopy study on compositional gradient lanthanum silicate film}, journal = {JOURNAL OF APPLIED PHYSICS}, year = 2009, }