@book{CTT100846136,
  author = {Tso-Fu Mark Chang and Hideaki Nakajima and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Hiroshi Toshiyoshi and Masato Sone},
  title = {Effective Young’s Modulus of Elelectrodeposited Gold for Design of MEMS Accelerometers},
  publisher = {IFSA PUBLISHING, S.L.},
  year = 2021,
}

@book{CTT100835470,
  author = {Hao-Chun Tang and Tso-Fu Mark Chang and Yaw-Wang Chai and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Nanoscale Hierarchical Structure of Twins in Nanograins Embedded with Twins and the Strengthening Effect},
  publisher = {MDPI},
  year = 2020,
}

@book{CTT100791876,
  author = {Chun-Yi Chen and Masaharu Yoshiba and Haochun Tang and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida},
  title = {Pulse-Current Electrodeposition of Gold},
  publisher = {IntechOpen},
  year = 2019,
}

@book{CTT100791875,
  author = {Haochun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida},
  title = {Electrodeposition of Gold Alloys and the Mechanical Properties},
  publisher = {IntechOpen},
  year = 2019,
}

@book{CTT100770100,
  author = {Tso-Fu Mark Chang and Chun-Yi Chen and Yota Ishizuka and Minami Teranishi and Takuma Suzuki and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Design of Au-Based Micro-Components with High Structure Stability for Applications in MEMS Inertial Sensors},
  publisher = {IFSA Publishing},
  year = 2019,
}

@book{CTT100748622,
  author = {Tso-Fu Mark Chang and Chun-Yi Chen and Hao-Chun Tang and Masaharu Yoshiba and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Fabrication and Characterization of High Strength Electrodeposited Gold toward High-Sensitive MEMS Inertial Sensors},
  publisher = {IFSA Publishing},
  year = 2017,
}

@book{CTT100645577,
  author = {益一哉 and 町田克之 and 年吉洋 and 江刺 正喜 and 藤田博之 and 石田誠 and 田中 秀治 and 高橋 一浩 and 越田信義 and 小山 英樹 and 佐々木 実 and 秦誠一 and 橋口 原 and 高尾 英邦 and 永瀬 雅夫 and 山口 浩司 and 北澤 正志 and 前中 一介 and 澤田和明 and 柴崎 一郎 and 野村聡 and 竹内 幸裕 and 柴田 英毅 and 楢崎 祥一 and 鈴木 雄二 and 西岡 泰城 and 森村 浩季 and 日暮 栄治 and 千野 満 and 内山 直己 and 足立 秀喜 and 井上 晴伸 and 橋本 秀樹},
  title = {異種機能デバイス集積化技術の基礎と応用?MEMS, NEMS, センサ, CMOSLSIの融合?},
  publisher = {株式会社 シーエムシー出版},
  year = 2012,
}

@article{CTT100923313,
  author = {Kazuya Fujita and Kosuke Suzuki and Keisuke Asano and Chun-Yi Chen and Tomoyuki  Kurioka and Katsuyuki. Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone and Tso-Fu Mark Chang},
  title = {Simultaneous Necking and Barreling Deformation Behaviors in Bending of  Single Crystal Gold Micro-Cantilever},
  journal = {Materials},
  year = 2024,
}

@article{CTT100911989,
  author = {Ryohei Hori and Kazuya Fujita and Chun Yi Chen and Tomoyuki Kurioka and Tso-Fu Mark Chang and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Cross-Sectional Geometry Effect on Bending Strength of Gold Micro-Cantilever with Trapezoidal Cross-Section},
  journal = {Micro and Nano Engineering},
  year = 2024,
}

@article{CTT100911525,
  author = {Syota Kanno and Taro Omura and Tomoyuki Kurioka and Chun-Yi Chen and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone and Tso-Fu Mark Chang},
  title = {Effect of Strain Rate in Compression Electrodeposited Gold Micro-Pillar toward Design of MEMS Component},
  journal = {Micro and Nano Engineering},
  year = 2024,
}

@article{CTT100909951,
  author = {Ryosuke Miyai and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Akira Onishi and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Clarification of Geometric Effects on Long-Term Structural Stability of Ti/Au Multi- Layered Micro-Cantilevers},
  journal = {Micro and Nano Engineering},
  year = 2024,
}

@article{CTT100910937,
  author = {Syunkai Watanabe and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Akira Onishi and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Dependence of Structural Design on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers  },
  journal = {Micro and Nano Engineering},
  year = 2024,
}

@article{CTT100909052,
  author = {Taro Omura and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Akira Onishi and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki ;  Ito and Yoshihiro Miyake and Masato Sone},
  title = {Warpage Study of the Electrodeposited-Au Micro-Components Having the Ti/Au Multi-layered Structures toward MEMS Applications},
  journal = {Journal of The Electrochemical Society},
  year = 2024,
}

@article{CTT100908961,
  author = {Kisuke Miyado and Devi Srujana  Tenneti and Akira Onishi and Katsuyuki Machida and Tomoyuki Kurioka and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Serpentine Spring Design Technique for High Sensitivity MEMS Capacitive Accelerometer Fabricated by Gold Multi-layer Metal Technology},
  journal = {Japanese Journal of Applied Physics},
  year = 2024,
}

@article{CTT100902767,
  author = {Takumi Akiyama and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Impurity Analysis of Electroplated Gold Components with Multi-Layered Structures by Thermal Desorption Spectrometry toward Application in Gold Micro Electro Mechanical System Capacitive Accelerometers  },
  journal = {Micro and Nano Engineering},
  year = 2023,
}

@article{CTT100888636,
  author = {Kosuke Suzuki and Yiming Jiang and Ryohei Hori and Ken Hashigata and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Correlation of Sample Geometry and Grain Size in Micro-Bending of Electrodeposited Polycrystalline Gold},
  journal = {Materials Today Communications},
  year = 2023,
}

@article{CTT100887972,
  author = {Akira Onishi and Kisuke Miyado and Devi Srujana Tenneti and Katsuyuki Machida and Parthojit Chakraborty and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Gold Single-Axis Differential Capacitive MEMS Accelerometer With Proof-Mass Position Control Electrode Fabricated by Post-CMOS Technology},
  journal = {2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)},
  year = 2023,
}

@article{CTT100875654,
  author = {Kohei Shibata and Akihiro Uchiyama and Akira Onishi and Katsuyuki Machida and Parthojit Chakraborty and Shin-ichi Iida and Toshifumi Konishi and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Simplified Analytical Damping Constant Model for Design of MEMS Capacitive Accelerometer with Gold Perforated Proof-mass Structure},
  journal = {IEEE Sensors Journal},
  year = 2022,
}

@article{CTT100866853,
  author = {Akira Onishi and Kohei Shibata and Akihiro Uchiyama and Katsuyuki  Machida and Taiki  Ogata and Noboru  Ishihara and Hirotaka Uchitomi and Tso-Fu Mark  Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki  Ito},
  title = {Suppressed Drift and Low-Noise Sensor Module  with a Single-Axis Gold Proof-Mass MEMS Accelerometer for Micro Muscle Sound Measurement},
  journal = {Japanese Journal of Applied Physics},
  year = 2022,
}

@article{CTT100866394,
  author = {Taro Omura and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Effect of Current Density on Micro-Mechanical Property of Electrodeposited Gold Film Evaluated by Micro-Compression},
  journal = {Surface & Coatings Technology},
  year = 2022,
}

@article{CTT100874042,
  author = {Hiroyuki Ito and Katsuyuki Machida and Noboru Ishihara and Yoshihiro Miyake and Kazuya Masu},
  title = {A Highly Sensitive MEMS Accelerometer Module for Measuring Micro Muscular Sounds},
  journal = {ECS Transactions},
  year = 2021,
}

@article{CTT100846484,
  author = {Hitomi Watanabe and Tso-Fu Mark Chang and Michael  Schneider and Ulrich  Schmid and Chun-Yi Chen and Shinichi Iida and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electro-deposition and the Temperature Dependency},
  journal = {Electrochem},
  year = 2021,
}

@article{CTT100834843,
  author = {Yu-An Chien and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Co-Electrodeposition of Au-TiO2 Nanocomposite and the Micro-Mechanical Properties},
  journal = {Electrochem},
  year = 2020,
}

@article{CTT100823024,
  author = {Kazuya Masu and Katsuyuki Machida and Daisuke Yamane and Hiroyuki Ito and Noboru Ishihara and Tso-Fu Mark Chang and Masato Sone and Ryo Shigeyama and Taiki Ogata and Yoshihiro Miyake},
  title = {CMOS-MEMS Based Microgravity Sensor and Its Application},
  journal = {ECS Transactions},
  year = 2020,
}

@article{CTT100820976,
  author = {Kyotaro Nitta and Hao-Chun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Shinichi Iida and Daisuke Yamane and Katsuyuki Machida and Hiroyuki  Ito and Kazuya Masu and Masato Sone},
  title = {Alloy Electroplating and Young’s Modulus Characterization of AuCu Alloy Microcantilevers},
  journal = {Journal of The Electrochemical Society},
  year = 2020,
}

@article{CTT100806473,
  author = {Kyotaro Nitta and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Shinichi Iida and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Fabrication of Au-Cu Alloy/Ti Layered Micro-Cantilevers and the Long-Term Structure Stability},
  journal = {IEEE Conference Paper},
  year = 2020,
}

@article{CTT100807192,
  author = {Tatsuya Koga and Takashi Ichikawa and Naoto Tanaka and Taiki Ogata and Hiroki Ora and Daisuke Yamane and Noboru Ishihara and Hiroyuki Ito and Masato Sone and Katsuyuki Machida and Yoshihiro Miyake and Kazuya Masu},
  title = {High-Sensitivity Inertial Sensor Module to Measure Hidden Micro Muscular Sounds},
  journal = {IEEE Conference Paper},
  year = 2019,
}

@article{CTT100803948,
  author = {Hao-Chun Tang and Tso-Fu Mark Chang and Yaw-Wang Chai and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Nanoscale Hierarchical Structure of Twins in Nanograins Embedded with Twins and the Strengthening Effect},
  journal = {Metals},
  year = 2019,
}

@article{CTT100807019,
  author = {Katsuyuki Machida and Daisuke Yamane and Toshifumi Konishi and Shin-ichi Iida and Noboru Ishihara and Tso-Fu Mark Chang and Masato Sone and Hiroyuki Ito and Kazuya Masu},
  title = {MEMS Accelerometer Fabricated by Gold Multi-Layer Metal Technology},
  journal = {ECS Transactions},
  year = 2019,
}

@article{CTT100796028,
  author = {Kyotaro Nitta and Tso-Fu Mark Chang and Koichiro Tachibana and Hao-chun Tang and Chun-Yi Chen and Shinichi Iida and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Cu-Alloying Effect on Structure Stability of Electrodeposited Gold-Based Micro-Cantilever Evaluated by Long-Term Vibration Test},
  journal = {Microelectronic Engineering},
  year = 2019,
}

@article{CTT100795920,
  author = {Ken Atsumi and Shota Otobe and Tatsuya Koga and Takashi Ichikawa and Daisuke Yamane and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {Pillar-Shaped Electrodes for 3-axis Gold-Proof-Mass MEMS Capacitive Accelerometers},
  journal = {IEEE Conference Paper},
  year = 2019,
}

@article{CTT100793648,
  author = {Ken Hashigata and Hao-Chun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Strengthening of Micro-Cantilever by Au/Ti Bi-Layered Structure Evaluated by Micro-Bending Test toward MEMS Devices},
  journal = {Microelectronic Engineering},
  year = 2019,
}

@article{CTT100786193,
  author = {Koichiro Tachibana and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Long-Term Structure Stability of Ti/Au Layered Micro-Cantilever Evaluated by Vibration Test},
  journal = {Microelectronic Engineering},
  year = 2019,
}

@article{CTT100785326,
  author = {Motohiro Takayasu and Ippei Tsuji and Hiroyuki Ito and Daisuke Yamane and Shiro Dosho and Toshifumi Konishi and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {Microgravity Generation Using Tilting Board for Resolution Evaluation of MEMS Accelerometer},
  journal = {Sensors and Materials},
  year = 2018,
}

@article{CTT100766193,
  author = {Keisuke Asano and Hao-Chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Promoted bending strength in micro-cantilevers composed of nanograined gold toward MEMS applications},
  journal = {Microelectronic Engineering},
  year = 2018,
}

@article{CTT100766253,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Shin-ichi Iida and Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {Temperature Characteristics of MEMS Inertial Sensor Fabricated by Gold Multi-Layer Metal Technology},
  journal = {},
  year = 2018,
}

@article{CTT100756750,
  author = {Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Toshifumi Konishi and Katsuyuki Machida and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Enhancement in Structure Stability of Gold Micro-Cantilever by Constrainted Fixed-End in MEMS devices},
  journal = {Microelectronic Engineering},
  year = 2018,
}

@article{CTT100759221,
  author = {Hao-Chun Tang and Ken Hashigata and Tso-Fu Mark Chang and Chun-Yi Chen and Takashi Nagoshi and Toshifumi Konishi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Sample size effect on micro-mechanical properties of gold electroplated with dense carbon dioxide},
  journal = {Surface and Coatings Technology},
  year = 2018,
}

@article{CTT100758009,
  author = {Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Au-Cu Alloys Prepared by Pulse Electrodeposition toward Applications as Movable Micro-Components in Electronic Devices},
  journal = {Journal of The Electrochemical Society},
  year = 2018,
}

@article{CTT100759250,
  author = {Motohiro Takayasu and Shiro Dosho and Hiroyuki Ito and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu},
  title = {A 0.18-?m CMOS time-domain capacitive-sensor interface for sub-1mG MEMS accelerometers},
  journal = {IEICE Electronics Express},
  year = 2018,
}

@article{CTT100751410,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Koichiro Tachibana and Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {LONG-TERM VIBRATION CHARACTERISTICS OF MEMS INERTIAL SENSORS BY MULTI-LAYER METAL TECHNOLOGY},
  journal = {Proceedings of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)},
  year = 2017,
}

@article{CTT100751408,
  author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices},
  journal = {Proceedings of the 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems},
  year = 2017,
}

@article{CTT100742124,
  author = {Keisuke Asano and Hao-Chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Micro-Bending Testing of Electrodeposited Gold for Applications as Movable Components in MEMS Devices},
  journal = {Microelectronic Engineering},
  year = 2017,
}

@article{CTT100742125,
  author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Deformation Behavior of Electroplated Gold Composed of Nano-Columnar Grains Embedded in Micro-Columnar Textures},
  journal = {Materials Letters},
  year = 2017,
}

@article{CTT100736023,
  author = {Hao-Chun Tang and Chun-Yi Chen and Masaharu Yoshiba and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {High-Strength Electroplated Au-Cu Alloys as Micro-components in MEMS Devices},
  journal = {Journal of The Electrochemical Society},
  year = 2017,
}

@article{CTT100734738,
  author = {Sari Yanagida and Tso-Fu Mark Chang and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Tensile Tests of Micro-Specimens Made of Electroplated Gold},
  journal = {Microelectronics Engineering},
  year = 2017,
}

@article{CTT100721712,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida},
  title = {Evaluation and Modeling of Adhesion Layer in Shock-Protection Structure for MEMS Accelerometer},
  journal = {Microelectronics Reliability},
  year = 2016,
}

@article{CTT100733964,
  author = {Toshifumi Konishi and Daisuke Yamane and Teruaki Safu and Masato Sone and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Damping Constant Model for Proof-Mass Structure Design of MEMS Inertial Sensor by Multi-Layer Metal Technology},
  journal = {IEEE Proceeding},
  year = 2016,
}

@article{CTT100722024,
  author = {Kazuya Masu and Daisuke Yamane and Katsuyuki Machida and Masato Sone and Yoshihiro Miyake},
  title = {Development of High Sensitivity CMOS-MEMS Inertia Sensor and its Application to Early-Stage Diagnosis of Parkinson's Disease},
  journal = {the 46th European Solid-State Device Research Conference (ESSDERC)},
  year = 2016,
}

@article{CTT100716349,
  author = {Hao-chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Enhancement of Mechanical Strength in Au Films Electroplated with Supercritical Carbon Dioxide},
  journal = {Electrochemistry Communications},
  year = 2016,
}

@article{CTT100704360,
  author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Brittle Fracture of Electrodeposited Gold Observed by Micro-Compression},
  journal = {Materials Transactions},
  year = 2016,
}

@article{CTT100708352,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A 1-mG MEMS Sensor},
  journal = {ECS Transactions},
  year = 2016,
}

@article{CTT100702128,
  author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Structure Stability of High Aspect Ratio Ti/Au Two-Layer Cantilevers for Applications in MEMS Accelerometers},
  journal = {Microelectronics Engineering},
  year = 2016,
}

@article{CTT100703226,
  author = {Chun-Yi Chen and Masaharu Yoshiba and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Pulse Electroplating of Ultra-Fine Grained Au Films with High Compressive Strength},
  journal = {Electrochemistry Communications},
  year = 2016,
}

@article{CTT100748054,
  author = {Y. Nishimura and M. Ishida and K. Sawada and H. Ishii and K. Machida and K. Masu and C. Wang and K. Iida and M. Saito and S. Yoshida},
  title = {Observation of Stress Responses of Bacteria Confined in a MEMS Microfluidic Chip},
  journal = {ECS Trans.},
  year = 2015,
}

@article{CTT100692402,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A 0.1G-to-20G Integrated MEMS Inertial Sensor},
  journal = {Japanese Journal of Applied Physics},
  year = 2015,
}

@article{CTT100690964,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Sub-1G MEMS Sensor},
  journal = {ECS Transactions},
  year = 2015,
}

@article{CTT100686951,
  author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Dual-Axis MEMS Capacitive Inertial Sensor with High-Density Proof Mass},
  journal = {Microsystem Technologies},
  year = 2015,
}

@article{CTT100685143,
  author = {山根 大輔 and 小西 敏文 and 松島 隆明 and 亀井 将太 and 益 一哉 and 町田 克之},
  title = {高感度静電容量型センサにおけるBrownian Noise評価手法},
  journal = {電気学会論文誌E（センサ・マイクロマシン部門誌）},
  year = 2015,
}

@article{CTT100674611,
  author = {Katsuyuki Machida and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Kazuya Masu},
  title = {Integrated CMOS-MEMS Technology and Its Applications},
  journal = {ECS Transactions},
  year = 2014,
}

@article{CTT100669022,
  author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Kazuya Masu and Katsuyuki Machida and Hiroshi Toshiyoshi},
  title = {A capacitive CMOS-MEMS sensor designed by multi-physics simulation for integrated CMOS-MEMS technology},
  journal = {Japanese Journal of Applied Physics},
  year = 2014,
}

@article{CTT100666863,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Katsuyuki Machida and Hiroshi Toshiyoshi and Kazuya Masu},
  title = {Design of sub-1g microelectromechanical systems accelerometers},
  journal = {Applied Physics Letters},
  year = 2014,
}

@article{CTT100666864,
  author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Kazuya Masu and Katsuyuki Machida and Hiroshi Toshiyoshi},
  title = {An arrayed accelerometer device of a wide range of detection for integrated CMOS-MEMS technology},
  journal = {Japanese Journal of Applied Physics},
  year = 2014,
}

@article{CTT100658034,
  author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Gou Motohashi and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Novel Sensor Structure and its Evaluation for Integratd Complementary Metal Oxide Semiconductor Microelectromechanical Systems Accelerometer},
  journal = {Japanese Journal of Applied Physics},
  year = 2013,
}

@article{CTT100657729,
  author = {Toshifumi Konishi and Katsuyuki Machida and Satoshi Maruyama and Makoto Mita and Kazuya Masu and Hiroshi Toshiyoshi},
  title = {A Single-platform Simulation and Design Technique for CMOS-MEMS Based on a Circuit Simulator with Hardware Description Language},
  journal = {IEEE/ASME Journal of Microelectromechanical Systems},
  year = 2013,
}

@article{CTT100674612,
  author = {Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Hiroshi Toshiyoshi},
  title = {Multi-Physics Equivalent Circuit Model for MEMS Sensors and Actuators},
  journal = {ECS Transactions},
  year = 2012,
}

@inproceedings{CTT100922774,
  author = {Tatsuhiko Mori and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Evaluation of Warpage Behavior of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-Layered Structures  caused by Thermal Treatment},
  booktitle = {CPIT2024, New Method of Damage and Failure Analysis of Structural Part},
  year = 2024,
}

@inproceedings{CTT100922775,
  author = {Shunkai Watanabe and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Tenneti Devi Srujana and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Investigation of Effects of Applied Voltage on Effective Young’s modulus of Ti/Au Multi-Layered Micro-Cantilevers” New Method of Damage and Failure Analysis of Structural Part},
  booktitle = {New Method of Damage and Failure Analysis of Structural Part},
  year = 2024,
}

@inproceedings{CTT100923314,
  author = {Masato Sone and Ryohei Hori and Kazuya Fujita and Kosuke Suzuki and Ken Hashigata and Keisuke Asano and Tomoyuki Kurioka and Tso-Fu Mark Chang and Chun-Yi Chen and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake},
  title = {Effects of Sample Geometry and Grain Size on Mechanical Property of Electrodeposited Dold and Gold-Copper Alloys by Micro-\bending Test Toward MEMS Applications},
  booktitle = {CPIT2024, New Method of Damage and Failure Analysis of Structural Part},
  year = 2024,
}

@inproceedings{CTT100922773,
  author = {Tomoyuki Kurioka and Takumi Akiyama and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Thermal Treatment Effects on Warpage of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-layered Structure Toward High-sensitive Accelerometers},
  booktitle = {CPIT2024, New Method of Damage and Failure Analysis of Structural Part},
  year = 2024,
}

@inproceedings{CTT100917496,
  author = {Tatsuhiko Mori and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Thermal Treatment Effects on Warpage of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-layered Structure  Toward High-sensitive Accelerometers},
  booktitle = {50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)},
  year = 2024,
}

@inproceedings{CTT100917604,
  author = {Devi Srujana Tenneti and Kisuke Miyado and Chihaya Mukaide and Torauto Yamada and Katsuyuki Machida and Tomoyuki Kurioka and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Suppression of Warpage in Perforated Proof-Mass of Gold Single-Axis MEMS Accelerometers for Micro-g Level Sensing},
  booktitle = {50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)},
  year = 2024,
}

@inproceedings{CTT100917601,
  author = {Kisuke Miyado and Torauto Yamada and Devi Srujana Tenneti and Chihaya Mukaide and Katsuyuki Machida and Tomoyuki Kurioka and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Effect of Perforated Proof-Mass Hole Size on Device Characteristics of Gold Single-Axis MEMS Accelerometer for Micro-g Level Sensing},
  booktitle = {50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)},
  year = 2024,
}

@inproceedings{CTT100917501,
  author = {Syota Kanno and Taro Omura and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Strain Rate Sensitivity in Gold Micro-Pillars: Designing MEMS Components with Grain Boundary and Sample Size Effects},
  booktitle = {50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)},
  year = 2024,
}

@inproceedings{CTT100917499,
  author = {Ryosuke Miyai and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Evaluation of the Effect of Heat Treatment on the Structural Stability of  Au Micro-Cantilevers with Ti/Au Multi-layered Structures},
  booktitle = {50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)},
  year = 2024,
}

@inproceedings{CTT100917498,
  author = {Syunkai Watanabe and Shunkai Watanabe and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Tenneti Devi Srujana and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Dependence of Applied Voltage on Effective Young’s Modulus of  Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers},
  booktitle = {50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)},
  year = 2024,
}

@inproceedings{CTT100908972,
  author = {森 達彦 and 栗岡 智行 and Chen Chun-Yi and Chang Tso-Fu Mark and 町田 克之 and 伊藤 浩之 and 三宅 美博 and 曽根 正人},
  title = {Ti/Au 積層電気金めっき錘の反り変形の熱処理温度依存性評価},
  booktitle = {Proc. The 71st JSAP Spring MeetinProc.},
  year = 2024,
}

@inproceedings{CTT100908973,
  author = {菅野 翔太 and 大村 太郎 and 栗岡 智行 and Chun-Yi Chen and 町田 克之 and 伊藤 浩之 and 三宅 美博 and Tso-Fu Mark Chang and 曽根 正人},
  title = {MEMS加速度センサへの応用に向けためっき金の微小圧縮試験によるひずみ速度依存性調査},
  booktitle = {Proc. The 71st JSAP Spring MeetinProc.},
  year = 2024,
}

@inproceedings{CTT100908971,
  author = {宮井 良介 and 栗岡 智行 and Chun-Yi Chen and Tso-Fu Mark Chang and 町田 克之 and 伊藤 浩之 and 三宅 美博 and 曽根 正人},
  title = {Ti/Au 積層構造有するマイクロカンチレバーの 構造安定性に対する熱処理の影響評価},
  booktitle = {Proc. The 71st JSAP Spring MeetinProc.},
  year = 2024,
}

@inproceedings{CTT100903112,
  author = {Ryohei Hori and Kazuya Fujita and Chun-Yi Chen and Tomoyuki Kurioka and Tso-Fu Mark Chang and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Evaluation of Cross-Sectional Geometry Effect of Au Polycrystalline Micro-cantilever on Bending Strength},
  booktitle = {Taiwan Association for Coating and Thin Film Technology (TACT2023)},
  year = 2023,
}

@inproceedings{CTT100906278,
  author = {御宿 希祐 and 大西 哲 Tenneti Devi Srujana 町田克之 and TENNETI DEVI and 町田 克之 and 栗岡 智行 and Tso-Fu Mark Chang and 曽根正人 and 三宅美博 and 伊藤浩之},
  title = {Au錘１軸差動型CMOS-MEMS加速度センサのための錘位置制御電極の検討},
  booktitle = {第15回集積化MEMSシンポジウム論文集},
  year = 2023,
}

@inproceedings{CTT100892415,
  author = {Masato Sone and Tso-Fu Mark Chang and Tomoyuki Kurioka and Chun-yi Chen and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake},
  title = {Mechanical Property Design of Multilayered Ti/Au Microcomponents by Electrodeposition Toward High-Sensitive MEMS Accelerometers},
  booktitle = {244th ECS Meeting},
  year = 2023,
}

@inproceedings{CTT100895779,
  author = {Syota Kanno and Taro Omura and Tomoyuki Kurioka and Chun-Yi Chen and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone and Tso-Fu Mark Chang},
  title = {Strain Rate Dependency of Mechanical Property in Micro-Compression of Electrodeposited Gold toward Design of MEMS Components},
  booktitle = {49th international conference on Micro and Nano Engineering (MNE2023)},
  year = 2023,
}

@inproceedings{CTT100895772,
  author = {Ryosuke Miyai and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Akira Onishi and Parthojit Chakraborty and Katsuyuki  Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Comprehensive Evaluation of Geometric Effects on Long-Term Structure Stability of Ti/Au Multi-Layered Micro-Cantilevers toward Gold-MEMS Capacitive Accelerometer},
  booktitle = {49th international conference on Micro and Nano Engineering (MNE2023)},
  year = 2023,
}

@inproceedings{CTT100903469,
  author = {御宿 希祐 and 大西 哲 and Devi Srujana Tenneti and 町田 克之 and 栗岡智行 and CHAKRABORTYP and Tso-Fu Mark Chang and 曽根正人 and 三宅美博 and 伊藤浩之},
  title = {Au積層メタル技術によるMEMSデバイスの九十九折ばね定数ばらつき抑制の検討},
  booktitle = {第84回応用物理学会秋季学術講演会 講演予稿集},
  year = 2023,
}

@inproceedings{CTT100903468,
  author = {御宿 希祐Kisuke Miyado and Devi.Srujana Tenneti and Akira Onishi and Katsuyuki Machida and Tomoyuki Kurioka and Parthojit CHAKRABORTY and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Design Technique of Serpentine Spring with Half Edge Span Beam Length for High Sensitivity Gold Proof-mass MEMS Capacitive Accelerometer},
  booktitle = {Extended Abstracts of the 2023 International Conference on Solid State Devices and Materials, Nagoya, 2023, pp325-326 G-2-02},
  year = 2023,
}

@inproceedings{CTT100895776,
  author = {Syunkai Watanabe and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Akira Onishi and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Dependence of Structural Design on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers},
  booktitle = {49th international conference on Micro and Nano Engineering (MNE2023)},
  year = 2023,
}

@inproceedings{CTT100903103,
  author = {御宿 希祐 and Tenneti Devi Srujana and 町田 克之 and 栗岡 智行 and Tso-Fu Mark Chang and 曽根 正人 and 三宅 美博 and 伊藤 浩之},
  title = {1 軸差動型CMOS-MEMS加速度センサのFB電圧による錘変位特性の検討},
  booktitle = {},
  year = 2023,
}

@inproceedings{CTT100903096,
  author = {御宿 希祐 and 大西哲 and TENNETIDEVI and 町田克之 and CHAKRABORTYP and 曽根正人 and 三宅美博 and 伊藤浩之},
  title = {Au積層メタル技術によるMEMSデバイスのための九十九折ばね設計手法の検討},
  booktitle = {第70回応用物理学会春季学術講演会},
  year = 2023,
}

@inproceedings{CTT100885246,
  author = {保里 亮平 and 藤田 一矢 and Chun-Yi Chen and 栗岡 智行 and Tso-Fu Mark Chang and Parthojit Chakraborty and 町田 克之 and 伊藤 浩之 and 三宅 美博 and 曽根 正人},
  title = {単結晶金微小カンチレバーの曲げ強度に対する断面積の影響},
  booktitle = {第70回応用物理学会春季学術講演会},
  year = 2023,
}

@inproceedings{CTT100885244,
  author = {渡邉 春海 and Chen Chun-Yi and 栗岡 智行 and Chang Tso-Fu Mark and 大西 哲 and Parthojit Chakraborty and 町田 克之 and 伊藤 浩之 and 三宅 美博 and 曽根 正人},
  title = {Ti/Au 多層カンチレバーの実効ヤング率における構造因子の研究},
  booktitle = {第70回応用物理学会春季学術講演会},
  year = 2023,
}

@inproceedings{CTT100885243,
  author = {菅野 翔太 and 大村 太郎 and 栗岡 智行 and Chun-Yi Chen and Parthojit Chakraborty and 町田 克之 and 伊藤 浩之 and 三宅 美博 and 曽根 正人 and Tso-Fu Mark Chang},
  title = {金めっき微小ピラー構造体の微小圧縮試験におけるひずみ速度依存性とサンプルサイズ効果の解明},
  booktitle = {第70回応用物理学会春季学術講演会},
  year = 2023,
}

@inproceedings{CTT100885240,
  author = {宮井 良介 and 栗岡 智行 and Chun-Yi Chen and Tso-Fu Mark Chang and 大西 哲 and Parthojit Chakraborty and 町田 克之 and 伊藤 浩之 and 三宅 美博 and 曽根 正人},
  title = {Ti/Au 積層構造有するマイクロカンチレバーの長期構造安定性に対する幾何学構造の影響},
  booktitle = {第70回応用物理学会春季学術講演会},
  year = 2023,
}

@inproceedings{CTT100873968,
  author = {Taro Omura and Chun-Yi Chen and Tomoyuki Kurioka and Tso-Fu Mark Chang and Akira Onishi and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Warpage Characteristics of Gold Proof Mass  in MEMS Capacitive Accelerometer},
  booktitle = {},
  year = 2022,
}

@inproceedings{CTT100873964,
  author = {Ryohei Hori and Kazuya Fujita and Chun Yi Chen and Tomoyuki Kurioka and Tso-Fu Mark Chang and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Effects of Cross-Sectional Geometry in Bending Test of Gold Micro-Cantilever toward Design of Movable MEMS Components},
  booktitle = {},
  year = 2022,
}

@inproceedings{CTT100903097,
  author = {御宿 希祐 and 大西哲 and TENNETIDEVI and CHAKRABORTYP and 町田克之 and 飯田慎一 and 小西敏文 and 曽根正人 and 三宅美博 and 伊藤浩之},
  title = {エッチホールを有するAu錘構造のMEMS加速度センサの減衰定数簡易解析モデルの検討},
  booktitle = {第83回応用物理学会秋季学術講演会},
  year = 2022,
}

@inproceedings{CTT100873967,
  author = {Takumi Akiyama and Chun-Yi Chen and Tomoyuki Kurioka and Tso-Fu Mark Chang and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Impurities Analysis of the Gold Components in MEMS Accelerometer by TDS},
  booktitle = {},
  year = 2022,
}

@inproceedings{CTT100881483,
  author = {Masato Sone and Hitomi Watanabe and Kyotaro Nitta and Hideaki Nakajima and Tomoyuki Kurioka and Chun-Yi Chen and Parthojit Chakraborty and Daisuke Yamane and Hiroyuki Ito and Katsuyuki. Machida and Yoshihiro Miyake and Tso-Fu Mark Chang},
  title = {A Non-Distructive Resoneance Frequency Method to determine Effective young's Modulus of 3-Dimentional Multilayered Ti/Au Micro-cantilevers Toward Highly Sensitive MEMS Accerelometer},
  booktitle = {},
  year = 2022,
}

@inproceedings{CTT100881436,
  author = {Tomoyuki Kurioka and Koichiro Tachibana and Kyotaro Nitta and Chun-Yi Chen and Tso-Fu Mark Chang and Parthojit Chakraborty and Daisuke Yamane and Hiroyuki Ito and Katsuyuki. Machida and Yoshihiro Miyake and Masato Sone},
  title = {Evaluation of Streucture Stability of  Au-Based Micro Cantilevers Evidenced by Long-Term Vibration Tests},
  booktitle = {},
  year = 2022,
}

@inproceedings{CTT100903102,
  author = {御宿 希祐 and 大西哲 and TENNETIDEVI and CHAKRABORTYP and 町田克之 and 飯田慎一 and 小西敏文 and 曽根正人 and 三宅美博 and 伊藤浩之},
  title = {Au錘MEMS容量型加速度センサにおける減衰定数簡易解析モデルの検討},
  booktitle = {},
  year = 2022,
}

@inproceedings{CTT100865532,
  author = {保⾥ 亮平 and 藤⽥ ⼀⽮ and Chun-Yi Chen and Tso-Fu Chang and 伊藤浩之 and 町⽥克之 and 三宅美博 and 曽根正⼈},
  title = {Au単結晶の微⼩カンチレバーの機械的特性における断⾯形状依存性},
  booktitle = {},
  year = 2022,
}

@inproceedings{CTT100865533,
  author = {秋⼭ 拓海 and CHIENYu-An and Chun-Yi Chen and Tso-Fu Chang and 伊藤浩之 and 町⽥克之 and 三宅美博 and 曽根正⼈},
  title = {MEMSデバイスへの応⽤に向けた⾦ニッケル合⾦の微⼩機械的特性 の評価},
  booktitle = {},
  year = 2022,
}

@inproceedings{CTT100865530,
  author = {⼤村 太郎 and Chun-Yi Chen and Tso-Fu Chang and ⼭根 ⼤輔 and 伊藤浩之 and 町⽥克之 and 三宅美博 and 曽根正⼈},
  title = {⾦めっき材料における機械的特性の電流密度依存性},
  booktitle = {},
  year = 2022,
}

@inproceedings{CTT100862629,
  author = {Yu-An Chien and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Electro-co-deposition of Au-TiO2 Composites with Improved Mechanical Property toward Miniaturized Electronics},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100862643,
  author = {Takumi Akiyama and Chun-Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Alloy Electrodeposition of Gold-Nickel Alloys and the Mechanical Property in Micro-Scale},
  booktitle = {TACT2021 International Thin Films Conference},
  year = 2021,
}

@inproceedings{CTT100862621,
  author = {Kazuya Fujita and Kosuke Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Micro-Mechanical Property of Single Crystal Gold for Applications in Microelectronics},
  booktitle = {TACT2021 International Thin Films Conference},
  year = 2021,
}

@inproceedings{CTT100873385,
  author = {内山晃宏 and 柴田滉平 and 大西哲 and 市川崇志 and 飯田慎一 and 李尚曄 and 石原昇 and 町田克之 and 益一哉 and 伊藤浩之},
  title = {ワイドレンジAu錘1軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873383,
  author = {柴田滉平 and 内山晃宏 and 大西哲 and 李尚曄 and 町田克之 and 石原昇 and 益一哉 and 伊藤浩之},
  title = {Au錘1軸差動型CMOS-MEMS加速度センサの統合設計シミュレーションの検討},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873384,
  author = {大西哲 and 内山晃宏 and 柴田滉平 and 市川崇志 and 李尚曄 and 飯田慎一 and 石原昇 and 町田克之 and 益一哉 and 伊藤浩之},
  title = {3次元容量検出電極による単一Au錘3軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100862622,
  author = {Taro Omura and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Effect of Current Density on Micro-Mechanical Characteristic of Electrodeposited Gold Evaluated from Cyanide Bath},
  booktitle = {TACT2021 International Thin Films Conference},
  year = 2021,
}

@inproceedings{CTT100860788,
  author = {Takumi Akiyama and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Micro-Mechanical Property Evaluation of Gold-Nickel Alloys toward Design of MEMS Components},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100861440,
  author = {藤田 一矢 and 鈴木 康介 and 陳 君怡 and Chang Tso-Fu Mark and 山根 大輔 and 伊藤 浩之 and 町田 克之 and 益 一哉 and 曽根 正人},
  title = {金単結晶微小カンチレバーの機械的特性とサンプル形状効果},
  booktitle = {第82回応用物理学会秋季学術講演会},
  year = 2021,
}

@inproceedings{CTT100860787,
  author = {Taro Omura and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Effect of Current Density on Mechanical Properties of Electrodeposited Gold Evaluated by Micro-Compression Test},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100860772,
  author = {Kazuya Fujita and Kosuke Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Mechanical Property of Gold Micro-Cantilevers for Application in Microelectronics and the Sample Geometry Effect},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873379,
  author = {大西哲 and 内山晃宏 and 柴田滉平 and 市川崇志 and 李尚曄 and 飯田慎一 and 石原昇 and 町田克之 and 益一哉 and 伊藤浩之},
  title = {3D容量検出電極による単一Au錘3軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100842072,
  author = {市川 崇志 and 古賀 達也 and 飯田 慎一 and 石原 昇 and 町田 克之 and 益 一哉 and 伊藤 浩之},
  title = {単一 Au 錘 3 軸加速度センサのための分割容量検出 2 重電極に関する検討},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873378,
  author = {柴田滉平 and 内山晃宏 and 大西哲 and 李尚曄 and 石原昇 and 町田克之 and 益一哉 and 伊藤浩之},
  title = {1軸差動型CMOS-MEMS加速度センサの統合設計シミュレーションの検討},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873362,
  author = {Akihiro Uchiyama and Takasi Ichikawa and Kohei Shibata and Shinichi Iida and Sangyeop Lee and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu and Hiroyuki Ito},
  title = {A MEMS accelerometer with a single axis two proof masses for a wide detection range},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873376,
  author = {Takasi Ichikawa and Akihiro Uchiyama and Kohei Shibata and Shinichi Iida and Sangyeop Lee and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu and Hiroyuki Ito},
  title = {A 3-D capacitive-detection electrode for a single gold proof-mass three-axis MEMS accelerometer},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873377,
  author = {内山晃宏 and 市川崇志 and 柴田滉平 and 飯田慎一 and 李尚曄 and 石原昇 and 町田克之 and 益一哉 and 伊藤浩之},
  title = {ワイドレンジ検出可能なAu錘1軸MEMS加速度センサ の検討},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100845540,
  author = {曽根 正人 and Tso-Fu Mark Chang and 名越貴志 and 町田 克之 and 山根 大輔 and 伊藤浩之 and 益 一哉},
  title = {医用MEMSデバイス応用に向けた 微小貴金属めっき材料の機械的特性評価},
  booktitle = {日本金属学会 2021年春季講演大会},
  year = 2021,
}

@inproceedings{CTT100842067,
  author = {市川 崇志 and 内山晃宏 and 古賀 達也 and 町田 克之 and 石原昇 and 益 一哉 and 飯田 慎一 and 伊藤 浩之},
  title = {100 nG/√Hz レベルを目指した分割 2 重電極を有する単一Au錘 3 軸 MEMS 加速度センサの検討},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100842066,
  author = {内山晃宏 and 市川 崇志 and 古賀 達也 and 町田 克之 and 益 一哉 and 石原昇 and 飯田 慎一 and 伊藤 浩之},
  title = {Au錘一軸MEMS加速度センサの差動容量型電極構造の検討},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100842065,
  author = {柴田滉平 and 市川 崇志 and 古賀 達也 and 町田 克之 and 益 一哉 and 石原昇 and 飯田 慎一 and 伊藤 浩之},
  title = {高分解能単一Au 錘CMOS-MEMS 加速度センサの検討},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100842069,
  author = {内山晃宏 and 市川 崇志 and 古賀達也 and 飯田慎一 and 石原昇 and 町田克之 and 益一哉 and 伊藤浩之},
  title = {マイクロGレベルセンシングのための金錘1軸差動容量型MEMS加速度センサ},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100842068,
  author = {市川崇志 and 渥美賢 and 古賀達也 and 飯田慎一 and 石原昇 and 町田克之 and 益一哉 and 伊藤浩之},
  title = {100 nG/√Hzレベルを目指したピラー型電極を有する単一Au錘3軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100842063,
  author = {Takashi Ichikawa and Kohei Shibata and Tatsuya Koga and Katsuyuki Machida and Shinichi Iida and Noboru Ishihara and Kazuya Masu and Hiroyuki Ito},
  title = {A High Resolution Single Gold Proof-Mass CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100842071,
  author = {本田優斗 and 田中佐和子 and 崔容俊 and 野田俊彦 and 高橋一浩 and 澤田和明 and 石井仁 and 町田克之 and 伊藤浩之 and 二階堂靖彦 and 齋藤光正 and 吉田眞一},
  title = {フォトゲート型蛍光センサによるレジオネラ属菌の識別方法の検討},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100842064,
  author = {Takashi Ichikawa and Ken Atsumi and Tatsuya Koga and Daisuke Yamane and Shin-ichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A 100-nG/√Hz-Level Single Au Proof-Mass 3-Axis MEMS Accelerometer with Pillar-Shaped electrodes},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100816077,
  author = {市川 崇志 and 渥美 賢 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {ピラー型電極による単一Au錘3軸MEMS加速度センサの感度均一化の検討},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100816075,
  author = {Tatsuya Koga and Takashi Ichikawa and Daisuke Yamane and Shinichi Iida and Noboru Ishihara and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu},
  title = {A Gold Proof-Mass Differential MEMS Accelerometer for Micro-G Level Sensing},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100816076,
  author = {渥美 賢 and 古賀 達也 and 市川 崇志 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {ピラー型電極を用いた単一錘3軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100806470,
  author = {Yu-An Chien and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Micro-Mechanical Properties of Electrodeposited Au-TiO2 Composite Film},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100806469,
  author = {Kyotaro Nitta and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Shinichi Iida and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Electrodepostion of Au-Cu Alloy  Micro-Cantilevers and the Young’s modulus by Resonance Frequency Method},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100806472,
  author = {Tomoki Iriya and Kyotaro Nitta and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Electroplating of Au-Pd Alloy Films and the Mechanical Properties},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100811731,
  author = {伊藤浩之 and 古賀達也 and 市川崇志 and 山根大輔 and 石原昇 and 三宅美博 and 町田克之 and 益一哉},
  title = {兆し計測のための高感度MEMS加速度センサ技術},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100809253,
  author = {市川 崇志 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 石原 昇 and 伊藤 浩之 and Chang Tso-Fu Mark and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {積層メタル技術で作製したMEMS加速度センサの衝撃特性評価},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100809252,
  author = {古賀 達也 and 市川 崇志 and 田中 直登 and 緒方 大樹 and 大良 宏樹 and 山根 大輔 and 石原 昇 and 伊藤 浩之 and 曽根 正人 and 町田 克之 and 三宅 美博 and 益 一哉},
  title = {微弱筋音計測に向けた高分解能MEMS慣性センサモジュールの検討},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100809254,
  author = {市川 崇志 and 乙部 翔太 and 渥美 賢 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {3Dピラー型Au錘MEMS加速度センサ},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100804032,
  author = {Tso-Fu Mark Chang and Yu-An Chien and Hao-Chun Tang and Chun-Yi Chen and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Strengthening of Gold-Based Micro-Structures by Alloying and Incorporation of Oxide Nanoparticles},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100807194,
  author = {市川 崇志 and 乙部 翔太 and 渥美 賢 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 曽根 正人 and 益 一哉},
  title = {Au錘3軸MEMS加速度センサのためのSCD電極の検討 (2)},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100802558,
  author = {曽根正人 and タン ハオチュン and Tso-Fu Mark Chang and 陳君怡 and 山根大輔 and 町田克之 and 益一哉},
  title = {超高感度加速度センサ実現のための高強度金合金材料の創製とその機械的特性評価},
  booktitle = {電気鍍金研究会},
  year = 2019,
}

@inproceedings{CTT100794652,
  author = {Masato Sone and Hao-Chun Tang and Masaharu Yoshiba and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu},
  title = {Mechanical properties of electrodeposited gold-copper alloy by micro-compression test},
  booktitle = {The 2nd International Conference on Material Strength and Applied Mechanics},
  year = 2019,
}

@inproceedings{CTT100791879,
  author = {Kosuke Suzuki and Ken Hashigata and Keisuke Asano and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Mechanical properties of gold micro-cantilevers with different thickness evaluated by micro-bending test},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100791878,
  author = {Hitomi Watanabe and Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {High Structure Stability Ti/Au Multiple Layer Micro-Cantilever and the Temperature Dependence},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100790675,
  author = {渡邊 瞳 and 鈴木 拓真 and Chen Chun-Yi and Chang Tso-Fu Mark and 山根 大輔 and 小西 敏文 and 町田 克之 and 伊藤 浩之 and 益 一哉 and 曽根 正人},
  title = {Ti/Au微小カンチレバーの温度依存性への積層構造の影響},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100790674,
  author = {市川 崇志 and 新島 宏文 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {3軸Au錘MEMS加速度センサにおける平行平板型電極の検討},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100790673,
  author = {渥美 賢 and 乙部 翔太 and 古賀 達也 and 市川 崇志 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {積層メタル技術によるピラー型容量検出電極の検討},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100790679,
  author = {新田 京太朗 and Tang Haochun and Chen Chun-Yi and Chang Tso-Fu Mark and 山根 大輔 and 小西 敏文 and 町田 克之 and 伊藤 浩之 and 益 一哉 and 曽根 正人},
  title = {電気めっき法によるAu-Cu合金微小カンチレバーの作製},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100790678,
  author = {鈴木 康介 and Ken Hashigata and 浅野 啓介 and Chun-Yi Chen and 名越 貴志 and Tso-Fu Mark Chang and 山根 大輔 and 小西 敏文 and 町田 克之 and 伊藤 浩之 and 益 一哉 and 曽根 正人},
  title = {微小曲げ試験による金材料の機械的強度のサンプル形状効果},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100790677,
  author = {乙部 翔太 and 渥美 賢 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {Au錘3軸MEMS加速度センサのためのSCD電極の検討},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100782446,
  author = {Daisuke Yamane and Shota Otobe and Ken Atsumi and Tatsuya Koga and Toshifumi Konishi and Teruaki Safu and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A 3-D PARALLEL-PLATE MEMS ACCELEROMETER WITH A GOLD PROOF MASS},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100779594,
  author = {Daisuke Yamane and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu},
  title = {Sub-1mG MEMS Inertial Sensor for Biomedical Applications},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100777398,
  author = {Shota Otobe and Tatsuya Koga and Ken Atsumi and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Shin-ichi Iida and Hiroyuki. Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Sub-1mG Tri-Axis MEMS Accelerometer with Multiple Segmented Capacitance Detection Electrodes},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100775377,
  author = {古賀 達也 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {1軸MEMS加速度センサのAu錘厚膜化による高性能化の検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100772110,
  author = {Keisuke Asano and Hao-Chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone.},
  title = {Mechanical Characterization of Constant Current Electroplated Au-Cu Alloy Micro-Cantilever},
  booktitle = {IUMRS-ICA 2018},
  year = 2018,
}

@inproceedings{CTT100786703,
  author = {Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Solid Solution Strengthening of Gold Based Materials  for MEMS Applications},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100772111,
  author = {Ken Hashigata and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone.},
  title = {Electrodeposition of Gold on Titanium and Bending Test of Au-Ti Bi-Layered Micro-Cantilever},
  booktitle = {IUMRS-ICA 2018},
  year = 2018,
}

@inproceedings{CTT100775380,
  author = {乙部 翔太 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {シングルAu錘と分割電極容量検出(SCD)方式を用いた3軸全差動MEMS加速度センサ},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100775374,
  author = {市川 崇志 and 新島 宏文 and 古賀 達也 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {Au単一錘平行平板型3軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100772124,
  author = {Masato Sone and Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Hiroyuki Ito and Kazuya Masu},
  title = {EFFECTIVE YOUNG’S MODULUS EVALUATION OF TI/AU MICRO STRUCTURES FOR MEMS ACCELEROMETER},
  booktitle = {8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS"},
  year = 2018,
}

@inproceedings{CTT100772182,
  author = {Tso-Fu Mark Chang and Hao-chun Tang and Kyotaro Nitta and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Electrodeposition of High Strength Au-Cu Alloys for MEMS Device},
  booktitle = {2018 International Conference on Solid State Devices and Materials (SSDM2018)},
  year = 2018,
}

@inproceedings{CTT100771791,
  author = {中島 英亮 and Tso-Fu Mark Chang and Chun-Yi Chen and 山根 大輔 and 小西 敏文 and 町田 克之 and 年吉 洋 and 益 一哉 and 曽根 正人},
  title = {MEMS加速度センサに向けた金めっき微小カンチレバーのヤング率 に関する検討},
  booktitle = {第79回応用物理学会秋季学術講演会},
  year = 2018,
}

@inproceedings{CTT100771219,
  author = {Daisuke Yamane and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu},
  title = {High-Resolution MEMS Accelerometer by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100769742,
  author = {Hitomi Watanabe and Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Effects of Ti/Au Layered Structure on Temperature Dependence of Micro-Cantilever Structure Stability},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769741,
  author = {Takahiro Yamamoto and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Mechanical Property and Thermal Stability of Electrodeposited Au-Cu Alloys  for Reliability of MEMS Devices},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769740,
  author = {Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshib and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {High Strength Electrodeposited Gold-Copper Alloys for MEMS Devices},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769739,
  author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Young’s Modulus of Ti/Au Micro-Cantilever by Resonance Frequency Method toward Au-Based MEMS Device},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769738,
  author = {Ken Hashigata and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Mechanical Strength Enhancement of Ti/Au Layered Structure Evaluated by Micro-Bending Test},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769737,
  author = {Keisuke Asano and Hao-chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Electrodeposited Au-Cu Alloy with High Yield Stress Evaluated by Micro-Bending Test},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769736,
  author = {Kyotaro Nitta and Koichiro Tachibana and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Cu-Alloying Effect on Structure Stability of Au Micro-Cantilever},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769735,
  author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Kyotaro Nitta and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Reliability Characteristics of Ti/Au Micro-Cantilever by Long-Term Vibration Test},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100771220,
  author = {Kazuya Masu and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake},
  title = {CMOS-MEMS accelerometer with gold proof-mass and its application in diagnosis of Parkinsons Disease},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100768308,
  author = {HIdeaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and HIroshi Toshiyoshi and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {A Study on Effective Young’s Modulus of Micro-Cantilevers Fabricated by Au Electroplating},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100768307,
  author = {Kyotaro Nitta and Koichiro Tachibana and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Reliability Evaluation of Au-Cu Microcantilever by Long-Term Vibration Test toward MEMS Components},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100760940,
  author = {Ken Hashigata and Haochun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {The effect of acid pre-treatment on electroplating of gold on titanium substrate},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100769399,
  author = {Shota Otobe and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {Tri-Axis Fully-Differential MEMS Accelerometer with Segmented Capacitance Detection},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100768649,
  author = {Masato Sone and Hao-Chun Tang and Chun-yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu},
  title = {Characteristics of Electroplated Gold Material with Multilayer Metal Technology for CMOS-MEMS Accelerometer},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100768387,
  author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Kyoutarou Nitta and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Structure stability of Ti/Au micro-cantolever evaluated by long-term vibration test},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100768386,
  author = {Chun-Yi Chen and Hao-Chun Tang and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Ultra-high Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests for MEMS Devices},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100758671,
  author = {Kyoutarou Nitta and Koichiro Tachibana and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Structure Stability of Electrodeposited Au-Cu Alloy Micro-Cantilever Evaluated By Long-Term Vibration Test for Applications As Movable Components in MEMS Devices},
  booktitle = {233rd ECS Meeting},
  year = 2018,
}

@inproceedings{CTT100772038,
  author = {伊藤浩之 and 山根大輔 and 小西敏文 and 道正志郎 and 石原昇 and 町田克之 and 曽根正人 and 三宅美博 and 益一哉},
  title = {MEMS加速度センサと生体計測への応用},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100758521,
  author = {Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Pulse Current Electrodeposition of Ultrahigh Strength of Nanocrystalline Au-Cu Alloys},
  booktitle = {22nd Topical Meeting of the International Society of Electrochemistry},
  year = 2018,
}

@inproceedings{CTT100758271,
  author = {Ken Hashigata and Hao-Chun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Electroplating of Gold on Titanium Substrate: Method to Deposit Defect-Free Film},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760801,
  author = {新島 宏文 and 乙部 翔太 and 高安 基大 and 山根 大輔 and 伊藤 浩之 and 佐布 晃昭 and 小西 敏文 and 道正 志郎 and 飯田 慎一 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {単一Au錘3軸差動MEMS加速度センサの検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100766637,
  author = {Ken Hashigata and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Enhanced Mechanical Strength of Ti-Au Bi-Layered Micro-Cantilever for MEMS Accelerometers},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760808,
  author = {古賀 達也 and 高安 基大 and 山根 大輔 and 伊藤 浩之 and 小西 敏文 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術で作製したMEMS慣性センサのモジュール化の検討(2)},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760807,
  author = {町田 克之 and 益一哉},
  title = {集積化CMOS-MEMS技術の課題と展望},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760805,
  author = {新島 宏文 and 乙部 翔太 and 高安 基大 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 年吉 洋 and 町田 克之 and 益 一哉},
  title = {高感度MEMS加速度センサのBrownian Noise評価に関する検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760803,
  author = {小西 敏文 and 山根 大輔 and 佐布 晃昭 and 陳 君怡 and Chang Tso-Fu Mark and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉 and 飯田 慎一},
  title = {積層メタル技術を用いたMEMS慣性センサの封止環境における温度依存性},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760802,
  author = {伊藤 浩之 and 山根 大輔 and 小西 敏文 and 道正 志郎 and 石原 昇 and 町田 克之 and 曽根 正人 and 三宅 美博 and 益 一哉},
  title = {集積化CMOS-MEMS技術による高感度慣性センサと応用システム},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760797,
  author = {高安 基大 and 古賀 達也 and 辻 一平 and 伊藤 浩之 and 山根 大輔 and 道正 志郎 and 小西 敏文 and 飯田 慎一 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {傾斜を用いた1mG MEMS加速度センサの分解能評価の検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760620,
  author = {伊藤 浩之 and ?根 ?輔 and 小西敏文 and 道正 志郎 and ?原 昇 and 町? 克之 and 曽根 正? and 三宅 美博 and 益 ?哉},
  title = {集積化CMOS-MEMS技術による?感度慣性センサと応?システム},
  booktitle = {応用物理学会第65回春季講演会},
  year = 2018,
}

@inproceedings{CTT100758969,
  author = {TangHao-Chun and Chun-Yi Chen and Tso-Fu Mark Chang and ⼭根⼤輔 and 小西敏文 and 町⽥ 克之 and 益 ⼀哉 and 曽根 正⼈},
  title = {電解めっき法によるMEMS⽤⾦銅合⾦の作製及び機械的特性評価},
  booktitle = {応用物理学会第65回春季講演会},
  year = 2018,
}

@inproceedings{CTT100758968,
  author = {中島英亮 and Chun-Yi Chen and Tso-Fu Mark Chang and ⼭根⼤輔 and 小西敏文 and 町⽥ 克之 and 年吉洋 and 益 ⼀哉 and 曽根 正⼈},
  title = {電解めっき法によるTi/Au微⼩カンチレバーのヤング率評価},
  booktitle = {応用物理学会第65回春季講演会},
  year = 2018,
}

@inproceedings{CTT100758967,
  author = {新⽥ 京太朗 and 橘 航⼀朗 and TangHao-Chun and Chun-Yi Chen and Tso-Fu Mark Chang and ⼭根 ⼤輔 and 小西敏文 and 町⽥ 克之 and 益 ⼀哉 and 曽根 正⼈},
  title = {⻑期振動試験によるAu-Cu合⾦微⼩カンチレバーの構造安定性},
  booktitle = {応用物理学会第65回春季講演会},
  year = 2018,
}

@inproceedings{CTT100758966,
  author = {浅野 啓介 and TangHao-Chun and Chun-Yi Chen and 名越 貴志 and Tso-Fu Mark Chang and ⼭根⼤輔 and 小西敏文 and 町⽥ 克之 and 益 ⼀哉 and 曽根 正⼈},
  title = {電析制御による微⼩⾦カンチレバーの曲げ特性の改善},
  booktitle = {応用物理学会第65回春季講演会},
  year = 2018,
}

@inproceedings{CTT100751442,
  author = {Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755527,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Sub-1mG Inertial Sensors by Multi-layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751721,
  author = {Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Strategies of Mechanical Strengthening in Electroplated  Au Materials},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751720,
  author = {Masato Sone and Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu},
  title = {Material Design of High Strength Electroplated Gold Alloy toward High-Sensitive MEMS Accelerometers},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751440,
  author = {Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Ultrahigh Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751726,
  author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Young’s Modulus Evaluation of Ti/Au Micro-Cantilevers by Au Electrodeposition},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100780789,
  author = {Toshifumi Konishi and Daisuke Yamane and Teruaki Safu and Chun Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu and Shinichi Iida},
  title = {Temperature Dependence on Package Sealing Ambient of MEMS Sensor Fabricated by Gold Electroplating},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100780791,
  author = {Hirofumi Niijima and Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Novel Tri-Axis MEMS Accelerometer with a Single Au Proof Mass and Fully Differential Sensing Electrodes},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751439,
  author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Long-Term Vibration Testing of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751725,
  author = {Keisuke Asano and Haochun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Mechanical Strengthening of Gold Micro-Cantilever by Control of Electroplating Conditions},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751718,
  author = {Tso-Fu Mark Chang and Haochun Tang and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Micro-Mechanical Property Enhancement of Metals Electroplated in Electrolyte Containing Supercritical CO2},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751724,
  author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Long-Term Vibration Test and Structure Stability of Ti/Au Micro-Cantilever as MEMS Components},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751723,
  author = {Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Temperature Structure Stability of Multi-Ti/Au-Layered Micro-Cantilever},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755522,
  author = {山根 大輔 and 小西 敏文 and 佐布 晃昭 and 橘 航一朗 and 寺西 美波 and 陳 君怡 and Tso-Fu Mark Chang and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {積層メタルMEMS慣性センサの長期振動特性評価},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751717,
  author = {Ken Hashigata and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Defect-Free and Uniform Electroplating of Gold on Titanium Surface for Design of MEMS Components},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755526,
  author = {大西  脩平 and 崔  容俊 and 石田 誠 and 澤田 和明 and 石井 仁 and 町田克之 and 益 一哉 and 二階堂 靖彦 and 齋藤 光正 and 吉田 眞一},
  title = {フォトゲート型蛍光センサを用いたレジオネラの蛍光観測},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755521,
  author = {小西 敏文 and 山根 大輔 and 佐布 晃昭 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {積層メタル技術を用いたMEMS慣性センサの構造設計のための粘性定数モデルの検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755520,
  author = {辻 一平 and 高安 基大 and 伊藤 浩之 and 山根 大輔 and 道正 志郎 and 小西 敏文 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術を用いたMEMS加速度センサの傾斜計応用の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755519,
  author = {新島 宏文 and 高安 基大 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 年吉 洋 and 町田 克之 and 益 一哉},
  title = {静電容量型MEMSセンサにおけるブラウニアン・ノイズ評価手法の検討(2)},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755518,
  author = {折原 恒祐 and 高安 基大 and 道正 志郎 and 伊藤 浩之 and 山根 大輔 and 小西 敏文 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {発振型容量検出回路を用いたAu錘CMOS-MEMS加速度センサの検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755389,
  author = {古賀 達也 and 辻 一平 and 高安 基大 and 伊藤 浩之 and 山根 大輔 and 道正 志郎 and 小西 敏文 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術によるMEMS加速度センサの傾斜時感度特性の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755388,
  author = {乙部 翔太 and 高安 基大 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {3軸MEMS加速度センサにおける単一Au錘および電極分割方式の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755334,
  author = {高安 基大 and 道正 志郎 and 伊藤 浩之 and 山根 大輔 and 小西 敏文 and 町田 克之 and 石原 昇 and 益 一哉},
  title = {MEMS慣性センサ用弛張発振型容量検出回路},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100754658,
  author = {Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Utilization of supercritical carbon dioxide in the electrodeposition of Au films for MEMS application},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100745654,
  author = {Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Toshifumi Konishi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Structure Stability Enhancement of Gold Micro-Cantilever with a Constrained at Top and Bottom of the Fixed-End},
  booktitle = {MNE2017},
  year = 2017,
}

@inproceedings{CTT100745653,
  author = {Ken Hashigata and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Effects of Bi-Layered Au/Ti Structure on Mechanical Properties of Micro-Cantilever Evaluated by Micro-Bending Test Toward Applications in MEMS Devices},
  booktitle = {MNE2017},
  year = 2017,
}

@inproceedings{CTT100745655,
  author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Mechanical Property Anisotropy of Pure Gold Evaluated by Micro-compression Test},
  booktitle = {MNE2017},
  year = 2017,
}

@inproceedings{CTT100751941,
  author = {高安 基大 and 道正 志郎 and 伊藤 浩之 and 山根 大輔 and 小西 敏文 and 町田 克之 and 石原 昇 and 益 一哉},
  title = {MEMS加速度センサ用高分解能容量検出回路},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100752531,
  author = {辻 一平 and 高安 基大 and 伊藤 浩之 and 山根 大輔 and 道正 志郎 and 小西 敏文 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術を用いた高感度MEMS慣性センサの傾斜計応用の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100752532,
  author = {古賀 達也 and 辻 一平 and 高安 基大 and 伊藤 浩之 and 山根 大輔 and 道正 志郎 and 小西 敏文 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術によるMEMS慣性センサの傾斜時感度特性の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100752534,
  author = {山根 大輔 and 小西 敏文 and 佐布 晃昭 and 橘 航一朗 and 寺西 美波 and 陳 君怡 and Tso-Fu Mark Chang and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {金めっきで形成したMEMS加速度センサの長期振動特性に関する検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100753335,
  author = {Motohiro Takayasu and Shiro Dosho and Hiroyuki Ito and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu},
  title = {A capacitive sensor circuit based on relaxation oscillator for sub-1mG MEMS inertial sensors},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100753404,
  author = {Ippei Tsuji and Motohiro Takayasu and Hiroyuki Ito and Daisuke Yamane and Shiro Dosho and Toshifumi Konishi and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {Tilt Characteristics of a MEMS Accelerometer fabricated by Multi-layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100753438,
  author = {Shouta Otobe and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Tri-axis MEMS Accelerometer With a Gold Electroplated Single-proof-mass and Segmented Electrodes},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100742158,
  author = {Chun-Yi Chen and Hao-Chun Tang and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Electrochemical Plating of Au-Cu Alloy Films for MEMS Sensor Applications},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100748741,
  author = {辻 一平 and 高安 基大 and 伊藤 浩之 and 山根 大輔 and 小西 敏文 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術を用いた高感度MEMS傾斜計の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100748739,
  author = {高安 基大 and 道正 志郎 and 伊藤 浩之 and 山根 大輔 and 小西 敏文 and 町田 克之 and 石原 昇 and 益 一哉},
  title = {MEMS加速度センサ用高分解能容量検出回路の評価},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100743817,
  author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {FEM Simulation on Structure Stability of Ti/Au Multi-Layered Cantilevers with Various Dimensions for Applications as Movable Structures in MEMS Devices},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100744945,
  author = {曽根 正人 and Tso-Fu Mark Chang and Chun-yi Chen and 山根 大輔 and 小西 敏文 and 町田 克之 and 益 一哉},
  title = {非侵襲性高感度医用デバイスのための貴金属材料の作製とその材料評価},
  booktitle = {第63回 国立大学共同利用・共同研究拠点 知の拠点セミナー},
  year = 2017,
}

@inproceedings{CTT100742055,
  author = {Hao-chun Tang and Chun-yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Micro-Mechanical Property Evaluation of Electroplated Au-Cu Alloys toward Applications in MEMS Accelerometers},
  booktitle = {SSI-21},
  year = 2017,
}

@inproceedings{CTT100745680,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Koichiro Tachibana and Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {Long-Term Vibration Characteristics of MEMS Inertial Sensors by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100742056,
  author = {Chun-Yi Chen and Hao-chun Tang and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Electroplated Au-based Materials with High Micro-mecchanical Properties as MEMS accelerometer Components},
  booktitle = {SSI-21},
  year = 2017,
}

@inproceedings{CTT100745676,
  author = {高安 基大 and 權田 惇晟 and 小西 敏文 and 山根 大輔 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {人体振動測定のためのMEMS慣性センサを用いたモジュールの検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100735592,
  author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices},
  booktitle = {IEEE-NEMS 2017},
  year = 2017,
}

@inproceedings{CTT100735375,
  author = {Chun-Yi Chen and Hao-Chun Tang and Masaharu Yoshiba and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Preparation and Characterization of Au-Cu Alloy Films for MEMS Accelerometer},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100738774,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Masato Sone and Katsuyuki Machida and Yoshihiro Miyake and Kazuya Masu},
  title = {MEMS inertial sensors for biomedical applications},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100735889,
  author = {山根 大輔 and 小西 敏文 and 佐布 晃昭 and 中島 英亮 and 寺西 美波 and 陳 君怡 and Chang Tso-Fu Mark and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {積層メタル技術によるTi/Auめっき構造体のヤング率評価（１）},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100737043,
  author = {高安 基大 and 權田 惇晟 and 山根 大輔 and 伊藤 浩之 and 小西 敏文 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術で作製したMEMS慣性センサのモジュール化の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100735888,
  author = {橘 航一朗 and Chang Tso-Fu Mark and Chen Chun-Yi and 小西 敏文 and 町田 克之 and 年吉 洋 and 山根 大輔 and 益 一哉 and 曽根 正人},
  title = {積層メタル技術によるTi/Auマイクロカンチレバーの疲労特性の検討},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100737042,
  author = {飯塚知希 and 山根 大輔 and 小西 敏文 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {振動型エネルギーハーベスティングデバイスのためのSPICE系統合設計の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100737044,
  author = {權田 惇晟 and 高安 基大 and 山根 大輔 and 伊藤 浩之 and 小西 敏文 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {移動体制御による慣性センサ評価系の構築},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100735890,
  author = {中島 英亮 and Chang Tso-Fu Mark and 陳 君怡 and 小西 敏文 and 町田 克之 and 年吉 洋 and 山根 大輔 and 益 一哉 and 曽根 正人},
  title = {積層メタル技術によるTi/Auめっき構造体のヤング率評価（2）},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735897,
  author = {小西敏文 and 山根 大輔 and 佐布 晃昭 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {積層メタル技術を用いたMEMS慣性センサにおける粘性定数の検討},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735898,
  author = {佐布 晃昭 and 小西 敏文 and 山根 大輔 and 年吉 洋 and 曽根 正人 and 益 一哉 and 町田 克之},
  title = {積層メタル技術による3軸MEMS加速度センサのばね定数設計方法},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735887,
  author = {鈴木 拓真 and Chang Tso-Fu Mark and Chen Chun-Yi and 小西 敏文 and 町田 克之 and 年吉 洋 and 山根 大輔 and 益 一哉 and 曽根 正人},
  title = {積層メタル技術によるTi/Auマイクロカンチレバーの温度依存性のシミュレーションの検討},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100806087,
  author = {Onishi, S. and Joon, C. Y. and Ishida, M. and Sawada, K. and Ishii, H. and Katsuyuki Machida and Kazuya Masu and Nikaido, Y. and Saito, M. and Yoshida, S.},
  title = {Detection of Bacterial Fluorescence by the Combination of MEMS Microfluidic Chip and Si Photodetector toward On-chip Biological Sensing},
  booktitle = {SEMICONDUCTOR PROCESS INTEGRATION 10},
  year = 2017,
}

@inproceedings{CTT100711207,
  author = {曽根正人 and Tso-Fu Mark Chang and Chun-yi Chen and 山根大輔 and 益一哉 and 町田克之},
  title = {微小電気機械システムのための超臨界流体を用いた金属皮膜形成技術 （招待講演）},
  booktitle = {第6回CSJ化学フェスタ},
  year = 2016,
}

@inproceedings{CTT100733961,
  author = {佐布 晃昭 and 小西 敏文 and 山根大輔 and 年吉 洋 and 曽根 正人 and 益 一哉 and 町田 克之},
  title = {積層メタル技術によるMEMS加速度センサのばね定数設計方法},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100733967,
  author = {大西 脩平 and 西村 祐典 and 石田 誠 and 澤田 和明 and 石井 仁 and 町田 克之 and 益 一哉 and 王 常楽 and 飯田 健一郎 and 齋藤 光正 and 吉田 眞一},
  title = {マイクロ流路チップを用いたレジオネラ・ニューモフィラとレジオネラ・デュモフィのストレス応答の観測},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100733962,
  author = {小西 敏文 and 山根大輔 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {マルチフィジクスシミュレーションを用いたCMOS-MEMS慣性センサのノイズ解析手法},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100733960,
  author = {山根大輔 and 小西 敏文 and 佐布 晃昭 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {Sub-1mG検出へ向けた積層メタルMEMS慣性センサ},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100733959,
  author = {山根大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {差動型積層メタルMEMS加速度センサの検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100733958,
  author = {權田 惇晟 and 高安 基大 and 山根 大輔 and 小西 敏文 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術によるMEMS加速度センサを用いた慣性センサモジュールの検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100733957,
  author = {高安 基大 and 道正 志郎 and 伊藤 浩之 and 石原 昇 and 山根 大輔 and 小西 敏文 and 町田 克之 and 益 一哉},
  title = {RC発振器型高感度容量検出回路},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100723391,
  author = {浅野 啓介 and TangHao-Chun and Chang Tso-Fu Mark and Chen Chun-Yi and 山根大輔 and 町田克之 and 益一哉 and 曽根正人 and 名越貴志},
  title = {微小曲げ試験による金めっきで作製した微小カンチレバーの機械的特性評価},
  booktitle = {第３３回「センサ・マイクロマシンと応用システム」シンポジウム},
  year = 2016,
}

@inproceedings{CTT100723362,
  author = {柳田佐理 and Chang Tso-Fu Mark and Chen Chun-Yi and 山根大輔 and 町田克之 and 益一哉 and 曽根正人 and 名越貴志},
  title = {微小引張試験片を用いたMEMS用金めっき材料の機械的特性の評価},
  booktitle = {第３３回「センサ・マイクロマシンと応用システム」シンポジウム},
  year = 2016,
}

@inproceedings{CTT100723360,
  author = {葭葉将治 and Chang Tso-Fu Mark and Chen Chun-Yi and 山根大輔 and 町田克之 and 益一哉 and 曽根正人 and 名越貴志},
  title = {高感度MEMS加速度センサー用金電気めっきの変形挙動および強度の結晶方位依存性評価},
  booktitle = {第３３回「センサ・マイクロマシンと応用システム」シンポジウム},
  year = 2016,
}

@inproceedings{CTT100723356,
  author = {寺西美波 and Chang Tso-Fu Mark and Chen Chun-Yi and 山根大輔 and 益一哉 and 曽根正人 and 小西敏文 and 町田克之 and 年吉洋},
  title = {電解金めっき法により作製した金/チタン積層構造を有する微小カンチレバーの構造安定性の評価},
  booktitle = {第３３回「センサ・マイクロマシンと応用システム」シンポジウム},
  year = 2016,
}

@inproceedings{CTT100714942,
  author = {Chun-Yi Chen and Masaharu Yoshiba and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Fine Grained Au Films with Controllable Mechanical Strength by Pulse Plating},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100714886,
  author = {曽根 正人 and Chang Tso-Fu Mark and 陳 君怡 and 山根 大輔 and 益 一哉 and 町田 克之},
  title = {高感度MEMS加速度センサーのための金めっき材料の合成とその機械的特性評価 （招待講演）},
  booktitle = {日本学術振興会・第172委員会},
  year = 2016,
}

@inproceedings{CTT100702798,
  author = {Chun-Yi Chen and Masaharu Yoshiba and Haochun Tang and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {High Strength Au film Fabricated by Advanced Electrochemical Technique in Supercritical CO2 Emulsified Electrolyte for MEMS Accelerometers},
  booktitle = {Separation Techniques 2016},
  year = 2016,
}

@inproceedings{CTT100716614,
  author = {山根大輔 and 小西 敏文 and 佐布 晃昭 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {Sub-1mG検出へ向けた積層メタルMEMS慣性センサ},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100716613,
  author = {山根大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {積層メタル差動型MEMS加速度センサの基礎検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100716612,
  author = {小西 敏文 and 山根大輔 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {CMOS-MEMS慣性センサにおける機械的ノイズの解析手法},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100714940,
  author = {Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Enhanced mechanical property of metallic films with supercritical carbon dioxide for micro-electrical-mechanical system accelerometer},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100710916,
  author = {Keisuke Asano and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Micro-Bending Tests of Pure Gold Cantilevers for Applications as Movable Components in MEMS Devices},
  booktitle = {MNE2016, 42nd Micro& Nano Engineering},
  year = 2016,
}

@inproceedings{CTT100710915,
  author = {Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Enhancement of Mechanical Properties in Au Films Electroplated with Supercritical Carbon Dioxide},
  booktitle = {MNE2016, 42nd Micro& Nano Engineering},
  year = 2016,
}

@inproceedings{CTT100710914,
  author = {Sari Yanagida and Tso-Fu Mark Chang and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Mechanical Behaviour of Electroplated Gold Evaluated by Micro-Tensile Test for Application in MEMS Accelerometer},
  booktitle = {MNE2016, 42nd Micro& Nano Engineering},
  year = 2016,
}

@inproceedings{CTT100710913,
  author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Controllable Mechanical Properties of Au Films by Pulse Electroplating for MEMS Accelerometer},
  booktitle = {MNE2016, 42nd Micro& Nano Engineering},
  year = 2016,
}

@inproceedings{CTT100721709,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida},
  title = {A Spring Design for Tri-axis MEMS Accelerometer by Multi-layer Metal Technology},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100716618,
  author = {Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {High Mechanical Strength in Gold Films Electroplated with Supercritical Carbon Dioxide for MEMS Applications},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100716615,
  author = {佐布 晃昭 and 小西 敏文 and 山根大輔 and 年吉 洋 and 曽根 正人 and 益 一哉 and 町田 克之},
  title = {積層メタル技術によるMEMS加速度センサのばね定数設計方法（I）},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100702490,
  author = {Masato Sone and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu},
  title = {Electrodeposited Gold for Next Generation MEMS Accelerometer Toward Medical Applications (Invited Lecture)},
  booktitle = {Integrative Biology-2016},
  year = 2016,
}

@inproceedings{CTT100710654,
  author = {Yusuke Nishimura and Onishi Shuhei and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Kazuya Masu and Changle Wang and Mitsumasa Saito and Shinichi Yoshida},
  title = {COMPARISON OF BACTERIAL STRESS RESPONSES BETWEEN LEGIONELLA PNEUMOPHILA AND LEGIONELLA DUMOFFII TRAPPED IN A MEMS MICROFLUIDIC CHIP},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100710653,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Novel MEMS Inertial Sensor With Out-of-plane Differential Sensing Structure By Multi-layer Metal Technology},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100708852,
  author = {高安 基大 and 權田 惇晟 and 山根 大輔 and 小西 敏文 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {小型高感度MEMS慣性センサモジュールの試作評価},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100702072,
  author = {Chun-Yi Chen and Masaharu Yoshiba and Hao-Chun Tang and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Pulse Electroplating of Au Films with Ultra High Strength},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100708851,
  author = {Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Masakazu Sonobe and Takumi Kobayashi and Yamato Fukuta and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Kazuya Masu and Katsuyuki Machida},
  title = {A study of railroad vehicle control by inertial sensors},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100708351,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A 1-mG MEMS Sensor},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100700919,
  author = {Chun-Yi Chen and Masaharu Yoshiba and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Pulse Electroplating of Ultra-Fine Grained Au Films with High Strength for Micro-Electrical-Mechanical System Devices},
  booktitle = {ISE - Topical Meeting},
  year = 2016,
}

@inproceedings{CTT100700920,
  author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Study of Gold Electroplating by Constant and Pulse Current Method with Non-Cyanide Gold Sulfite Electrolyte},
  booktitle = {ISE - Topical Meeting},
  year = 2016,
}

@inproceedings{CTT100700918,
  author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Mechanical Characteristics of Structure Stability with Ti/Au Micro-Cantilevers Formed by Au Electroplating},
  booktitle = {ISE - Topical Meeting},
  year = 2016,
}

@inproceedings{CTT100700917,
  author = {Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Preparation and Characterization of Gold Films by Electroplating with Supercritical Carbon Dioxide},
  booktitle = {ISE - Topical Meeting},
  year = 2016,
}

@inproceedings{CTT100700921,
  author = {Yota Ishizuka and Sari Yanagida and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Electroplated Gold Materials with Enhanced Mechanical Strength by Multi-Layered Structure},
  booktitle = {ISE - Topical Meeting},
  year = 2016,
}

@inproceedings{CTT100700965,
  author = {浅野 啓介 and Tang Hao-Chun and 陳 君怡 and TSO-FU MARK CHANG and 山根 大輔 and 町田 克之 and 益 一哉 and 曽根 正人},
  title = {マイクロ曲げ試験による電析金薄膜の機械的特性評価},
  booktitle = {第63回応用物理学会春季学術講演会},
  year = 2016,
}

@inproceedings{CTT100702922,
  author = {リュウ アンキ and 小西 敏文 and 山根 大輔 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {CMOS低雑音オペアンプ設計法の検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100702919,
  author = {山根大輔 and 小西敏文 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {Sub-1G検出へ向けた積層メタル3軸加速度センサの基礎検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100702918,
  author = {小西敏文 and 山根大輔 and 佐布晃昭 and 年吉 洋 and 曽根正人 and 益 一哉 and 町田克之},
  title = {積層メタル構造を用いた MEMS 加速度センサのストッパーのロバスト性検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100702917,
  author = {山根大輔 and 小西敏文 and 伊藤浩之 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {Sub-1G 検出へ向けた CMOS-MEMS 加速度センサの検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100700964,
  author = {寺西 美波 and TSO-FU MARK CHANG and 陳 君怡 and 小西 敏文 and 町田 克之 and 年吉 洋 and 山根 大輔 and 益 一哉 and 曽根 正人},
  title = {電解金めっきで作製したTi/Au微小カンチレバーの構造安定性},
  booktitle = {第63回応用物理学会春季学術講演会},
  year = 2016,
}

@inproceedings{CTT100700962,
  author = {Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Application of Supercritical Carbon Dioxide in Electroplating of Gold Materials Used in MEMS Devices},
  booktitle = {第63回応用物理学会春季学術講演会},
  year = 2016,
}

@inproceedings{CTT100700961,
  author = {石塚 陽大 and 柳田 佐理 and TSO-FU MARK CHANG and 陳 君怡 and 町田 克之 and 山根 大輔 and 益 一哉 and 曽根 正人 and 益 一哉 and 曽根 正人},
  title = {マイクロ圧縮試験による金/チタン積層構造の機械的特性評価},
  booktitle = {第63回応用物理学会春季学術講演会},
  year = 2016,
}

@inproceedings{CTT100700959,
  author = {葭葉 将治 and 陳 君怡 and TSO-FU MARK CHANG and 山根 大輔 and 町田 克之 and 益 一哉 and 曽根 正人},
  title = {マイクロ圧縮試験によるMEMS用金電気めっきの機械的特性の評価},
  booktitle = {第63回応用物理学会春季学術講演会},
  year = 2016,
}

@inproceedings{CTT100702467,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A MEMS Inertia Sensor with Brownian Noise of Below 50 nG/Hz^1/2 by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100804415,
  author = {Daisuke Yamane and Konishi, T. and Safu, T. and Toshiyoshi, H. and Masato Sone and Kazuya Masu and Katsuyuki Machida},
  title = {A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology},
  booktitle = {2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016},
  year = 2016,
}

@inproceedings{CTT100748046,
  author = {Y. Nishimura and M. Ishida and K. Sawada and H. Ishii and K. Machida and K. Masu and C. Wang and K. Iida and M. Saito and S. Yoshida},
  title = {Stress Responses of Bacteria, Legionella, Confined in MEMS Microfluidic Chip},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100697691,
  author = {Masaharu Yoshiba and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Micro-Mechanical Properties of Electrodeposited Gold Thin Films},
  booktitle = {TACT 2015 International Thin Films Conference},
  year = 2015,
}

@inproceedings{CTT100695299,
  author = {Daisuke Yamane and Toshifumi Konishi and Motohiro Takayasu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Sub-1G CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695304,
  author = {山根大輔 and 小西敏文 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {Sub-1G?20G集積化MEMS慣性センサ},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100698704,
  author = {西村 祐典 and 石田 誠 and 澤田 和明 and 石井 仁 and 町田 克之 and 益 一哉 and 王 常楽 and 飯 田 健一郎 and 齋藤 光正 and 吉田 眞一},
  title = {マイクロ流路内でのレジオネラ属菌のストレス応答},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695308,
  author = {佐布 晃昭 and 小西敏文 and 松島隆明 and 山根大輔 and 年吉 洋 and 曽根正人 and 益 一哉 and 町田克之},
  title = {MEMS加速度センサのための金属構造体の密着力評価},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695306,
  author = {小西敏文 and 山根大輔 and 高安基大 and 伊藤浩之 and 道正志郎 and 石原昇 and 益 一哉 and 年吉 洋 and 町田克之},
  title = {マルチフィジクスシミュレーションを用いたCMOS-MEMS 加速度センサのためのゲイン制御センサ回路の検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695305,
  author = {高安 基大 and 山根 大輔 and 小西 敏文 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {移動体制御における慣性センサ適用性の検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100748045,
  author = {Y. Nishimura and M. Ishida and K. Sawada and H. Ishii and K. Machida and K. Masu and C. Wang and K. Iida and M. Saito and S. Yoshida},
  title = {Observation of Stress Responses of Bacteria Confined in a MEMS Microfluidic Chip},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695309,
  author = {山根大輔 and 小西敏文 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {Sub-1G?20G集積化MEMS加速度センサの基本評価},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100693804,
  author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Structure Stability of High Aspect Ratio Ti/Au Two-Layered Cantilevers for Applications in MEMS Accelerometers},
  booktitle = {MNE2015, The 41th International Conference on Micro and Nano Engineering},
  year = 2015,
}

@inproceedings{CTT100692510,
  author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Mechanical Properties of Electrodeposited Gold for Application in MEMS},
  booktitle = {SSDM2015, 2015 International Conference on Solid State Devises and Materials},
  year = 2015,
}

@inproceedings{CTT100692512,
  author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Study on Ti/Au Two-Layered Cantilevers with different Aspect Ratio for MEMS Devices},
  booktitle = {SSDM2015, 2015 International Conference on Solid State Devises and Materials},
  year = 2015,
}

@inproceedings{CTT100695311,
  author = {佐布晃昭 and 小西敏文 and 松島隆明 and 山根大輔 and 年吉 洋 and 曽根正人 and 益 一哉 and 町田克之},
  title = {MEMS加速度センサのための金属構造体の密着力評価},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695310,
  author = {小西敏文 and 山根大輔 and 高安基大 and 伊藤浩之 and 道正志郎 and 石原昇 and 益 一哉 and 年吉 洋 and 町田克之},
  title = {ゲイン制御型CMOS-MEMS加速度センサ回路の検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100694933,
  author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Sample Size Effect on Mechanical Properties of Electrodeposited Gold Evaluated by Micro-Compression Test},
  booktitle = {MNE2015},
  year = 2015,
}

@inproceedings{CTT100695302,
  author = {Daisuke Yamane and Toshifumi Konishi and Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Hiroshi Toshiyoshi and Kazuya Masu and Masato Sone and Katsuyuki Machida},
  title = {A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695301,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Low Mechanical Noise Tri-axis MEMS Ineretial Sensor Fabricated by Multi-layered Metal Technology},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695300,
  author = {Toshifumi Konishi and Daisuke Yamane and Motohiro Takayasu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Kazuya Masu and Hiroshi Toshiyoshi and Katsuyuki Machida},
  title = {Novel Gain-Controlled Sensor Circuits Designed by Multi-physics Simulation for CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100697111,
  author = {西村 祐典 and 石田 誠 and 澤田 和明 and 石井 仁 and 町田 克之 and 益 一哉 and 王 常楽 and 飯田 健一郎 and 齋藤 光正 and 吉田 眞一},
  title = {ビーズを用いたPDMS製細菌捕獲チップの検討? -紫外光照射によるレジオネラの光応答の観測-},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100691819,
  author = {Daisuke Yamane and Toshifumi Konishi and Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Hiroshi Toshiyoshi and Kazuya Masu and Masato Sone and Katsuyuki Machida},
  title = {A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology},
  booktitle = {AMC2015},
  year = 2015,
}

@inproceedings{CTT100694936,
  author = {Chun-Yi Chen and Masaharu Yoshiba and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {High Mechanical Strength Gold Micro-Components Fabricated by Pulse Electroplating},
  booktitle = {MNE2015},
  year = 2015,
}

@inproceedings{CTT100695406,
  author = {Daisuke Yamane and Toshifumi Konishi and Motohiro Takayasu and Teruaki Safu and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida},
  title = {Robustness of Integrated Stoppers for MEMS Accelerometer Fabricated by Multi-layered Metal Technology},
  booktitle = {SSDM2015, 2015 International Conference on Solod State Devices and Materials},
  year = 2015,
}

@inproceedings{CTT100695303,
  author = {Daisuke Yamane and Kazuya Masu and Katsuyuki Machida},
  title = {A Sub-1G MEMS Inertial Sensor},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100692702,
  author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Compression deformation of micro-components fabricated by FIB from gold electrodeposited films},
  booktitle = {ISAMR2015},
  year = 2015,
}

@inproceedings{CTT100695295,
  author = {Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu},
  title = {Nano-G metrology system and its biomedical applications by CMOS-MEMS technology},
  booktitle = {Biological Systems: Open Access},
  year = 2015,
}

@inproceedings{CTT100692272,
  author = {寺西美波 and Chang Tso-Fu Mark and 山根大輔 and 小西敏文 and 松島隆明 and 伊藤浩之 and 年吉 洋 and 町田克之 and 益 一哉 and 曽根正人},
  title = {電解金めっきで作製した微小カンチレバーの形状安定性評価},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695298,
  author = {寺西美波 and Tso-Fu Mark Chang and 小西敏文 and 松島隆明 and 町田克之 and 年吉 洋 and 山根大輔 and 伊藤浩之 and 益 一哉 and 曽根正人},
  title = {電解金めっきで作製したMEMSデバイスにおける動作構造安定性},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695297,
  author = {高安 基大 and 山根 大輔 and 小西 敏文 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {MEMS慣性センサを用いた移動体制御の検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100692321,
  author = {西村祐典 and 石田誠 and 澤田和明 and 石井仁 and 町田克之 and 益一哉 and 王常楽 and 飯田健一 郎 and 齋藤光正 and 吉田眞一},
  title = {マイクロ流路内でのレジオネラ属菌のストレス応答},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100692273,
  author = {高安 基大 and 山根 大輔 and 小西 敏文 and 亀井 将太 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {慣性センサを用いた移動体制御の基礎検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100682962,
  author = {Minami Teranishi and Tso-Fu Mark Chang and Toshifumi Konishi and Masaki Yano and Katsuyuki Machida and Daisuke Yamane and Hiroyuki Ito and Kazuya Masu and Tatsuo Sato and Masato Sone},
  title = {Stability of Movable Structure Formed by Au Electroplating for MEMS Devices},
  booktitle = {ICMAT2015 & IUMRS-ICA2015,},
  year = 2015,
}

@inproceedings{CTT100690965,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Sub-1G MEMS Sensor},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100686947,
  author = {Katsuyuki Machida and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Kazuya Masu},
  title = {CMOS -MEMS -New Frontier of Multilevel Interconnect Technology-},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100683809,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {Sub-1Gから20Gまで検知可能な集積化MEMS加速度センサの検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100684706,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {Sub-1G検出可能な3軸MEMS加速度センサの基礎検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100684014,
  author = {西村 祐典 and 林 隆平 and 中澤 寛一 and 石田 誠 and 澤田 和明 and 石井 仁 and 町田 克之 and 益 一哉 and 王 常楽 and 飯田 健一郎 and 齋藤 光正 and 吉田 眞一},
  title = {ビーズを用いたPDMS製細菌捕獲チップの検討? -各種細菌の蛍光強度特性の時間依存性-},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100683810,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 益 一哉 and 年吉 洋 and 町田克之},
  title = {エネルギーハーべスティングデバイスの検討（5）},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100678033,
  author = {Takaaki Matsushima and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A MEMS Energy Harvesting Device for Integrated CMOS-MEMS Technology},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100678032,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A 1mG-to-20G Integrated MEMS Inertial Sensor},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100684016,
  author = {Daisuke Yamane and Katsuyuki Machida and Kazuya Masu},
  title = {MEMS for sensing sub-1G},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100677572,
  author = {松島隆明 and 山根大輔 and 小西敏文 and 年吉洋 and 益 一哉 and 町田克之},
  title = {Ａｕ積層形成技術による３軸ＭＥＭＳ加速度センサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100677573,
  author = {小西敏文 and 松島隆明 and 山根大輔 and 益 一哉 and 年吉洋 and 町田克之},
  title = {回路シミュレータを用いたＭＥＭＳエネルギーハーベスティングデバイスの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100684013,
  author = {西村 祐典 and 林 隆平 and 中澤 寛一 and 石田 誠 and 澤田 和明 and 石井 仁 and 町田 克之 and 益 一哉 and 王 常楽 and 飯田 健一郎 and 齋藤 光正 and 吉田 眞一},
  title = {マイクロビーズを用いたPDMS製マイクロ流路チップへのレジオネラ菌捕獲の検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100677570,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {集積化ＣＭＯＳ?ＭＥＭＳ技術によるＳｕｂ-１Ｇ加速度センサの基礎検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100677571,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 亀井将太 and 益 一哉 and 町田克之},
  title = {高感度静電容量型センサにおけるブラウニアン・ノイズ評価の検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676376,
  author = {亀井将太 and 山根大輔 and 小西敏文 and 松島隆明 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {集積化CMOS?MEMS加速度センサへ向けたsub-1G静電容量型センサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676375,
  author = {Toshifumi Konishi and Takaaki Matsushima and Daisuke Yamane and Kazuya Masu and Hiroshi Toshiyoshi and Katsuyuki Machida},
  title = {A Novel Electromechanical Model of a MEMS Energy Harvesting Device for a Multi-physics Simulation Platform on a Circuit Simulator},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100684012,
  author = {西村 祐典 and 林 隆平 and 中澤 寛一 and 石田 誠 and 澤田 和明 and 石井 仁 and 町田 克之 and 益 一哉 and 飯田 健一郎 and 齋藤 光正 and 吉田 眞一},
  title = {ビーズを用いたPDMS製細菌捕獲チップの検討? -蛍光強度の時間依存性 蛍光強度の時間依存性-},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676374,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Sub-1G Tri-axis MEMS Capacitive Sensor for Integrated CMOS-MEMS Accelerometers},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676378,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 益 一哉 and 年吉 洋 and 町田克之},
  title = {エネルギーハーべスティングデバイスの検討（４）},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676377,
  author = {松島隆明 and 小西敏文 and 山根大輔 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {積層メタル構造による３軸加速度センサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100674568,
  author = {松島隆明 and 小西敏文 and 山根大輔 and 亀井将太 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {積層メタルによる静電容量型3軸加速度センサの基礎検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100674567,
  author = {山根大輔 and 亀井将太 and 小西敏文 and 松島隆明 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {集積化CMOS-MEMS加速度センサへ向けたsub-1Gセンサ},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100684011,
  author = {西村 祐典 and 林 隆平 and 中澤 寛一 and 石田 誠 and 澤田 和明 and 石井 仁 and 町田 克之 and 益 一哉 and 王 常楽 and 飯田 健一郎 and 齋藤 光正 and 吉田 眞一},
  title = {マイクロビーズとPDMS製マイクロ流路を用いたレジオネラ菌捕獲チップの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100674569,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 益 一哉 and 年吉 洋 and 町田克之},
  title = {マルチフィジックスシミュレータを用いたCMOS-MEMS加速度センサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100684704,
  author = {Yusuke Shiino and Hiroyuki Ito and Taku Fujiwara and Noboru Ishihara and Hisashi Yamanouchi and Hiroki Tanabe and Satoshi Nomura and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu},
  title = {An Ultra Low Power pH-Monitoring IC with a Duty-Cycling Wireless FM-Transmitter},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100748044,
  author = {R. Hayashi and Y. Nishimura and H. Nakazawa and M. Ishida and K. Sawada and H. Ishii and K. Machida and N. Ishihara and K. Masu and C. Wang and K. Iida and M. Saito and S. Yoshida},
  title = {PDMA-Based Microfluidic Chip for Detection of Legionella pneumophila by Mixing with Microbeads},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100674565,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {A Sub-1G Capacitive Sensor for Integrated CMOS-MEMS Accelerometers},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100673061,
  author = {山根大輔 and 松島隆明 and 小西敏文 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {集積化CMOS-MEMSへ向けた2軸加速度センサの基礎検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100673063,
  author = {Katsuyuki Machida and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Kazuya Masu},
  title = {Integrated CMOS-MEMS Technology and its Application},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100673062,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {A Tri-Axis MEMS Capacitive Sensor Using Multi-Layered High-density Metal for an Integrated CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100669023,
  author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {A Dual-Axis MEMS Inertial Sensor Using Multi-Layered High-density Metal for an Arrayed CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668511,
  author = {小西敏文 and 加賀谷 賢 and 山根大輔 and 松島隆明 and 伊藤浩之 and 石原 昇 and 益 一哉 and 町田克之 and 年吉 洋},
  title = {エネルギーハーベスティングデバイスの検討（３）},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668509,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {Sub-1G MEMS加速度センサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668508,
  author = {伊藤浩之 and 小西敏文 and 松島隆明 and 山根大輔 and 石原 昇 and 町田克之 and 益 一哉},
  title = {RF受信機のためのアレイ型MEMS共振器ミキサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668512,
  author = {加賀谷 賢 and 小西敏文 and 山根大輔 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {エネルギーハーベスティングデバイスの検討（２）},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668510,
  author = {松島隆明 and 小西敏文 and 山根大輔 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {アレイ型ＭＥＭＳ加速度センサ-２軸ＭＥＭＳ加速度センサの検討-},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668513,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {MEMS加速度センサによるSub-1G検出の基礎検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100663423,
  author = {伊藤浩之 and 小西敏文 and 山根大輔 and 石原 昇 and 町田克之 and 益 一哉},
  title = {ミキサファーストRF 受信機のためのMEMS 共振器ミキサの検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100663420,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Gou Motohashi and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Sub-1G MEMS Accelerometer},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100663429,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 丸山智史 and 加賀谷 賢 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {マルチフィジクスシミュレーションを用いた集積化CMOS-MEMS技術のためのセンサ回路の検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100663432,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 加賀谷 賢 and 佃 真文 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {アレイ型ＭＥＭＳ加速度センサの特性評価},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100663428,
  author = {加賀谷 賢 and 小西敏文 and 山根大輔 and 松島隆明 and 佃 真文 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {エネルギーハーベストデバイスの小型化の検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100661182,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 町田克之 and 益 一哉 and 年吉 洋},
  title = {CMOSとMEMS集積のためのシミュレーション解析-集積化CMOS-MEMSデバイス実現に向けて-},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100660522,
  author = {椎野雄介 and 藤原琢 and 伊藤浩之 and 石原昇 and 山内悠 and 田邉裕貴 and 野村聡 and 小西敏文 and 町田克之 and 益一哉},
  title = {ISFETを用いたワイヤレスpHモニタリング用低電力FM送信IC},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100660521,
  author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Satoshi Maruyama and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Novel Sensor Circuits Design Using Multi-physics Simulation for CMOS-MEMS Technology},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100660520,
  author = {加賀谷 賢 and 小西敏文 and 山根大輔 and 松島隆明 and 佃 真文 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {エネルギーハーベストデバイスの検討(1)},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100660291,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 丸山智史 and 加賀谷 賢 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {集積化CMOS-MEMS加速度センサ回路の検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100660290,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 加賀谷 賢 and 佃 真文 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {アレイ型ＭＥＭＳ加速度センサの基本特性評価},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100659144,
  author = {佃 真文 and 山根大輔 and 小西敏文 and 松島隆明 and 加賀谷 賢 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {アレイ型ＭＥＭＳ加速度センサの基礎検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100658941,
  author = {小西敏文 and 丸山智史 and 山根大輔 and 松島隆明 and 町田克之 and 益 一哉 and 年吉 洋},
  title = {回路シミュレータを用いた集積化CMOS-MEMSのための統合設計環境の構築},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100658940,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 加賀谷 賢 and 佃 真文 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {金メッキ集積化CMOS-MEMSによるアレイ型加速度センサの小型化},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100658938,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Gou Motohashi and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {AN ARRAYED MEMS ACCELEROMETER WITH A WIDE RANGE OF DETECTION},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100653238,
  author = {椎野雄介 and 藤原琢 and 伊藤浩之 and 石原昇 and 山内 悠 and 田邉裕貴 and 野村聡 and 小西敏文 and 町田克之 and 益一哉},
  title = {ISFETを用いたpHモニタリング用低電力FM送信ICの検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100654652,
  author = {町田克之 and 小西敏文 and 山根大輔 and 年吉洋 and 益一哉},
  title = {集積化CMOS-MEMS技術の検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100654655,
  author = {小西敏文 and 山根大輔 and 本橋 剛 and 加賀谷 賢 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型ＭＥＭＳ加速度センサの設計},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100654654,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 本橋 剛 and 加賀谷 賢 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型ＭＥＭＳ加速度センサの検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100654653,
  author = {加賀谷 賢 and 小西敏文 and 山根大輔 and 本橋 剛 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型ＣＭＯＳ-ＭＥＭＳ加速度センサのためのデバイスの評価},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100658939,
  author = {Hiroshi Toshiyoshi and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu},
  title = {A Mixed-Design Technique for Integrated MEMS using a Circuit Simulator with HDL},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100804442,
  author = {Kazuya Masu and Ishihara, N. and Konishi, T. and Katsuyuki Machida and Toshiyoshi, H.},
  title = {Challenges in integration of diverse functionalities on CMOS},
  booktitle = {Proceedings of the Asia and South Pacific Design Automation Conference, ASP-DAC},
  year = 2013,
}

@inproceedings{CTT100804623,
  author = {Maruyama, S. and Konishi, T. and Katsuyuki Machida and Ishihara, N. and Kazuya Masu and Fujita, H. and Toshiyoshi, H.},
  title = {A time-multiplexed electrostatic drive and sample interface circuit for MEMS optical scanners},
  booktitle = {International Conference on Optical MEMS and Nanophotonics},
  year = 2013,
}

@inproceedings{CTT100804521,
  author = {Ishii, H. and Sawada, K. and Ishida, M. and Katsuyuki Machida and Iida, K. and Saito, M. and Yoshida, S.},
  title = {Bio-MEMS chip for bacteria detection-a challenge of si technology to biomedical field},
  booktitle = {ECS Transactions},
  year = 2013,
}

@inproceedings{CTT100661262,
  author = {Kazuya Masu and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi},
  title = {How can we bridge the gap between photonics and Si CMOS LSI?},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100646781,
  author = {Hiroshi Toshiyoshi and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu},
  title = {A Multi-Physics Simulation Technique for Integrated MEMS},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645036,
  author = {山根大輔 and 本橋 剛 and 小西敏文 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型CMOS-MEMS加速度センサのためのデバイスの検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100653224,
  author = {Youngshik  Shin and Katsube Kyohei and Kazuaki Sawada and Makoto Ishida and Hiromu Ishii and Katsuyuki Machida and Kazuya Masu and Kenichiro Iida and Mitsumasa Saito and Shinichi Yoshida},
  title = {Fabrication of Bio-MEMS Device for on-chip Testing of the Bacteria Behavior},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645452,
  author = {Youngshik  Shin and Katsube Kyohei and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Kazuya Masu and Kenichiro Iida and Mitsumasa Saito and Shinichi Yoshida},
  title = {Fabrication of Microfluidic Device for On-chip Observation of Bacterial Behavior},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645451,
  author = {林隆平 and 勝部恭平 and 辛永式 and 中澤寛一 and 石田誠 and 澤田和明 and 石井仁 and 町田克之 and 石原昇 and 益一哉 and 飯田健一郎 and 齋藤光正 and 藤井潤 and 吉田眞一},
  title = {MEMS型細菌捕獲チップの製作とレジオネラを用いた評価},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645434,
  author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Gou Motohashi and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Evaluation of a Capacitive Sensor with a Gold Proof Mass Toward Integrated CMOS-MEMS Accelerometers},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645037,
  author = {Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Hiroshi Toshiyoshi},
  title = {Multi-physics Equivalent Circuit Models for MEMS Sensors and Actuators},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645035,
  author = {伊藤浩之 and 山根大輔 and 小西敏文 and 石原 昇 and 町田克之 and 益一哉},
  title = {RFミキサ回路のため高速MEMSスイッチの検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645034,
  author = {小西敏文 and 丸山智史 and 三田信 and 山根大輔 and 伊藤浩之 and 町田克之 and 石原 昇 and 益一哉 and 藤田博之 and 年吉 洋},
  title = {ハードウェア記述言語を用いた集積化CMOS-MEMS統合設計技術},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645032,
  author = {加賀谷 賢 and 小西敏文 and 山根大輔 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {統合設計技術のためのMEMS加速度センサのモデルの検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645029,
  author = {本橋 剛 and 小西敏文 and 松島隆明 and 山根大輔 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {0.35μｍCMOS-LSIによるMEMSセンサ用VCO回路の検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100644392,
  author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Gou Motohashi and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {A Novel Sensor Structure and its Fabrication Process for Integrated CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100644389,
  author = {松島 隆明 and 小西 敏文 and 本橋 剛 and 山根 大輔 and 伊藤 浩之 and 石原 昇 and 年吉 洋 and 町田 克之 and 益 一哉},
  title = {アレイ型CMOS-MEMS加速度センサの検討（3）},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100644390,
  author = {本橋 剛 and 小西 敏文 and 松島 隆明 and 山根 大輔 and 伊藤 浩之 and 石原 昇 and 年吉 洋 and 町田 克之 and 益一哉},
  title = {アレイ型CMOS-MEMS加速度センサの検討（4）},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100644391,
  author = {Toshifumi Konishi and Satoshi Maruyama and Makoto Mita and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Hiroyuki Fujita and Hiroshi Toshiyoshi},
  title = {A CMOS-MEMS Design Technique based on an Electrical Circuit Simulator with Hardware Description Language},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645446,
  author = {勝部恭平 and 辛永式 and 石田誠 and 澤田和明 and 石井仁 and 町田克之 and 石原昇 and 益一哉 and 飯田健一郎 and 齋藤光正 and 藤井潤 and 吉田眞一},
  title = {細菌迅速検出用マイクロチップII‐蛍光強度の細菌濃度依存性‐},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645447,
  author = {Youngshik  Shin and Katsube Kyohei and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Kenichiro Iida and Mitsumasa Saito and Mitsumasa Fujii and Shinichi Yoshida},
  title = {Fabrication of microfluidic device for the bacteria observation},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645443,
  author = {Kyohei Katsube and Ryuhei Hayashi and Youngshik Shin and Hirokazu Nakazawa and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Yuta  Takekawa and Changle  Wang and Kenichiro Iida and Mitsumasa Saito and Mitsumasa Fujii and Shinichi Yoshida},
  title = {Bio-MEMES Chip for Trapping Bacteria by Si-pillar Structure and Its Application to Legionella},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645444,
  author = {勝部恭平 and 林隆平 and 辛永式 and 中澤寛一 and 石田誠 and 澤田和明 and 石井仁 and 町田克之 and 石原昇 and 益一哉 and 王常楽 and 竹川雄太 and 飯田健一郎 and 齋藤光正 and 藤井潤 and 吉田眞一},
  title = {集積化ＭＥＭＳ技術による細菌迅速診断チップの開発},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100640424,
  author = {山根大輔 and 本橋 剛 and 小西敏文 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型CMOS-MEMS加速度センサの検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100653249,
  author = {山根大輔 and 本橋剛 and 小西敏文 and 松島隆明 and 伊藤浩之 and 石原昇 and 年吉洋 and 町田克之 and 益一哉},
  title = {アレイ型CMOS-MEMS加速度センサの検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100653250,
  author = {勝部恭平 and 林隆平 and 辛永式 and 中澤寛一 and 石田誠 and 澤田和明 and 石井仁 and 町田克之 and 石原昇 and 益一哉 and 王常楽 and 竹川雄太 and 飯田健一郎 and 齋藤光正 and 藤井潤 and 吉田眞一},
  title = {集積化ＭＥＭＳ技術による細菌迅速診断チップの開発},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645440,
  author = {Youngshik  Shin and Kyohei Katsube and Kazuaki Sawada and Makoto Ishida and Hiromu Ishii and Katsuyuki Machida and Kazuya Masu and Kenichiro Iida and Mitsumasa Saito and Shinichi Yoshida},
  title = {Fabrication of Bio-MEMS Device for on-},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645448,
  author = {Youngshik  Shin and Katsube Kyohei and Makoto Ishida and Kazuaki Sawada and Hiromu Ishii and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Kenichiro Iida and Mitsumasa Saito and Mitsumasa Fujii and Shinichi Yoshida},
  title = {Fabrication of microfluidic device for the bacteria observation},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100635244,
  author = {小西敏文 and 本橋剛 and 松島隆明 and 伊藤浩之 and 石原昇 and 年吉洋 and 町田克之 and 益一哉},
  title = {アレイ型CMOS-MEMS 加速度センサの検討 (2)},
  booktitle = {第59 回応用物理学関係連合講演会 講演予稿集},
  year = 2012,
}

@inproceedings{CTT100635241,
  author = {本橋剛 and 小西敏文 and 松島隆明 and 伊藤浩之 and 石原昇 and 年吉洋 and 町田克之 and 益一哉},
  title = {アレイ型CMOS-MEMS 加速度センサの検討(1)},
  booktitle = {第59 回応用物理学関係連合講演会 講演予稿集},
  year = 2012,
}

@inproceedings{CTT100645445,
  author = {勝部恭平 and 辛永式 and 石田誠 and 澤田和明 and 石井仁 and 町田克之 and 石原昇 and 益一哉 and 飯田健一郎 and 齋藤光正 and 藤井潤 and 吉田眞一},
  title = {細菌迅速検出用マイクロチップI‐細菌捕獲構造の製作‐},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645449,
  author = {勝部恭平 and 林隆平 and 辛永式 and 中澤寛一 and 石田誠 and 澤田和明 and 石井仁 and 町田克之 and 石原昇 and 益一哉 and 飯田健一郎 and 齋藤光正 and 藤井潤 and 吉田眞一},
  title = {細菌迅速検出用マイクロチップ? ‐細菌の捕獲状態と蛍光強度‐},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100635245,
  author = {勝部 恭平 and 林隆平 and 辛 永式 and 中澤寛一 and 石田 誠 and 澤田 和明 and 石井 仁 and 町田 克之 and 石原 昇 and 益 一哉 and 飯田 健一郎 and 齋藤 光正 and 藤井 潤 and 吉田 眞一},
  title = {細菌迅速検出用マイクロチップ? ‐細菌の捕獲状態と蛍光強度‐},
  booktitle = {第59 回応用物理学関係連合講演会 講演予稿集},
  year = 2012,
}

@inproceedings{CTT100635249,
  author = {林隆平 and 勝部恭平 and 中澤寛一 and 石田誠 and 澤田和明 and 石井仁 and 町田克之 and 石原昇 and 益一哉 and 飯田健一郎 and 齋藤光正 and 藤井潤 and 吉田眞一},
  title = {細菌迅速検出用マイクロチップ? ‐蛍光色素を用いた細菌検出条件の検討‐},
  booktitle = {第59 回応用物理学関係連合講演会 講演予稿集},
  year = 2012,
}

@inproceedings{CTT100645031,
  author = {本橋 剛 and 小西敏文 and 松島隆明 and 山根大輔 and 伊藤浩之 and 益一哉 and 町田克之},
  title = {0.35μｍCMOS-LSIによるMEMSセンサ用VCO回路の検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645450,
  author = {林隆平 and 勝部恭平 and 中澤寛一 and 石田誠 and 澤田和明 and 石井仁 and 町田克之 and 石原昇 and 益一哉 and 飯田健一郎 and 齋藤光正 and 藤井潤 and 吉田眞一},
  title = {細菌迅速検出用マイクロチップ? ‐蛍光色素を用いた細菌検出条件の検討‐},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100629997,
  author = {小西 敏文 and 丸山 智史 and 松島 隆明 and 三田 信 and 町田 克之 and 伊藤 浩之 and 石原 昇 and 益一哉 and 藤田 博之 and 年吉 洋},
  title = {集積化 CMOSCMOS--MEMSMEMS のための統合設計技術統合設計技術の検討 (2)},
  booktitle = {第 72 回応用物理学会学術講演会 講演予稿集(2011 秋 山形大学) 30a-E-14},
  year = 2011,
}

@inproceedings{CTT100629998,
  author = {勝部 恭平 and 辛 永式 and 石田 誠 and 澤田 和明 and 石井 仁 and 町田 克之 and 石原 昇 and 益 一哉 and 飯田 健一郎 and 齋藤 光正 and 藤井 潤 and 吉田 眞一},
  title = {細菌迅速検出用マイクロチップII ‐蛍光強度の細菌濃度依存性‐},
  booktitle = {第72 回応用物理学会学術講演会 講演予稿集（2011 秋 山形大学）},
  year = 2011,
}

@inproceedings{CTT100613068,
  author = {藤原 琢 and 石原 昇 and 天川 修平 and 山之内 悠 and 田邉 裕貴 and 野村 聡 and 小西 敏文 and 町田 克之 and 益 一哉},
  title = {ISFET を用いた小型低電力ワイヤレス pH センサモジュール},
  booktitle = {応用物理学会集積化 MEMS 技術研究会主催 集積化 MEMS シン ポジウ ム 2010},
  year = 2010,
}

@inproceedings{CTT100612097,
  author = {藤原 琢 and 石原 昇 and 天川 修平 and 山内 悠 and 田邉 裕貴 and 野村 聡 and 小西 敏文 and 町田 克之 and 益 一哉},
  title = {ISFETを用いたワイヤレスpHセンシング用低電力FM送信IC},
  booktitle = {2010 年電子情報通信学会エレクトロニクスソサイエティ大会},
  year = 2010,
}

@inproceedings{CTT100612617,
  author = {Toshifumi Konishi and Satoshi Maruyama and Takaaki Matsushima and Makoto Mita and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Hiroyuki Fujita and Hiroshi Toshiyoshi},
  title = {A SPICE-based Multi-physics Seamless Simulation Platform for CMOS-MEMS},
  booktitle = {Extended Abstracts of the 2010 International Conference on Solid State Devices and Materials},
  year = 2010,
}

@inproceedings{CTT100608501,
  author = {Taku Fujiwara and Noboru Ishihara and Shuhei Amakawa and Hisashi Yamauchi and Hiroki Tanabe and Satoshi Nomura and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu},
  title = {A Wearably Small Low-Power Wireless pH Sensor Module Incorporating an lon-sensitive Field-Effect Transtor},
  booktitle = {The 13th International Meeting on Chemical Sensors (IMCS-13)},
  year = 2010,
}

@inproceedings{CTT100607461,
  author = {藤原 琢 and 石原 昇 and 山内 悠 and 田邉 裕貴 and 野村 聡 and 小西 敏文 and 町田 克之 and 益 一哉},
  title = {ISFETを用いた生体・環境モニタリング用ワイヤレスpHセンサモジュール},
  booktitle = {LSIとシステムのワークショップ2010},
  year = 2010,
}

@inproceedings{CTT100605007,
  author = {藤原 琢 and 石原 昇 and 天川 修平 and 山内 悠 and 田邉 裕貴 and 野村 聡 and 小西 敏文 and 町田 克之 and 益 一},
  title = {ISFET を用いたワイヤレス pH センサモジュール},
  booktitle = {2010 年 電子情報通信学会総合大会},
  year = 2010,
}

@inproceedings{CTT100589787,
  author = {藤原 琢 and 石原 昇 and 天川 修平 and 田邉 裕貴 and 野村 聡 and 小西 敏文 and 町田 克之 and 益 一哉},
  title = {pHセンサ用ISFET特性のモデリング},
  booktitle = {2009年（平成21年）秋季第70回応用物理学会学術講演会},
  year = 2009,
}

@misc{CTT100835046,
  author = {曽根正人 and Tso-Fu Mark Chang and 陳君怡 and 町田克之 and 山根大輔 and 伊藤浩之 and 益一哉},
  title = {貴金属またはその合金の微細結晶組織を有する金属材料},
  howpublished = {公開特許},
  year = 2020,
  month  = {},
  note   = {特願2018-239826(2018/12/21), 特開2020-100874(2020/07/02)}
}


@misc{CTT100820740,
  author = {益一哉 and 町田克之 and 山根大輔 and 伊藤浩之 and 佐布　晃昭　 and 小西　敏文　 and 飯田　慎一　},
  title = {微細素子},
  howpublished = {登録特許},
  year = 2022,
  month  = {},
  note   = {特願2018-102096(2018/05/29), 特開2019-207133(2019/12/05), 特許第7002732号(2022/01/05)}
}