@inproceedings{CTT100605245, author = {A. Uedono and KAZUO TSUTSUI and S. Ishibashi and H. Watanabe and S. Kubota and Y. Nakagawa and Bunji Mizuno and takeo hattori and HIROSHI IWAI}, title = {Vacancy-Boron Complexes in Plasama Immersion lon-lmplanted Si Probed by a Monoenergetic Positron Beam}, booktitle = {Japanese Journal of Applied Physics 49}, year = 2010, }