@article{CTT100607582, author = {M.K. Bera and Jaeyeol Song and Ahmet Parhat and Kuniyuki KAKUSHIMA and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Yttrium-scandium oxide as high-k gate dielectric for germanium metal-oxide-semiconductor devices}, journal = {SEMICONDUCTOR SCIENCE AND TECHNOLOGY}, year = 2010, }