@inproceedings{CTT100612617,
  author = {Toshifumi Konishi and Satoshi Maruyama and Takaaki Matsushima and Makoto Mita and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Hiroyuki Fujita and Hiroshi Toshiyoshi},
  title = {A SPICE-based Multi-physics Seamless Simulation Platform for CMOS-MEMS},
  booktitle = {Extended Abstracts of the 2010 International Conference on Solid State Devices and Materials},
  year = 2010,
}