@inproceedings{CTT100614744, author = {Tomonori Kato and Tatsuya Funaki and Yuichiro Shinozaki and Kenji Kawashima}, title = {Performance Evaluation of a New High-precision, Quick Response Pneumatic Pressure Regulator and Its Application to an Actively Controlled Pneumatic Vibration Isolator}, booktitle = {25th ASPE Annual Meeting}, year = 2010, }