@inproceedings{CTT100615517,
  author = {Koji Hara and Yuichiro Tanushi and Shin-Ichiro Kuroki and Koji Kotani and Takashi Ito},
  title = {Ion-Implanted Boron Activation in a Preamorphized Si Layer by Microwave Annealing},
  booktitle = {Extended Abstracts of the 2009 International Conference on Solid  State Devices and Materials (SSDM2009)},
  year = 2009,
}