@inproceedings{CTT100654576, author = {K.Tuokedaerhan and 金田翼 and Kuniyuki KAKUSHIMA and Ahmet Parhat and Akira Nishiyama and 杉井信之 and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Impact of annealing ambient for La2O3/Si capacitor}, booktitle = {}, year = 2013, } @inproceedings{CTT100622703, author = {金田翼 and Miyuki Kouda and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Effect of rare earth oxide capping for La-based gate oxides}, booktitle = {}, year = 2011, } @inproceedings{CTT100623969, author = {Ahmet Parhat and 来山大祐 and 金田翼 and 鈴木 拓也 and Tomotsune Koyanagi and Miyuki Kouda and マイマイティ マイマイティレャアティ and Takamasa Kawanago and Kuniyuki KAKUSHIMA and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {TiN/W/La2O3 /Si High-k Gate Stack for EOT below o.5nm}, booktitle = {}, year = 2011, } @inproceedings{CTT100623983, author = {Ahmet Parhat and 来山大祐 and 金田翼 and 鈴木 拓也 and Tomotsune Koyanagi and Miyuki Kouda and マイマイティ マイマイティレャアティ and Takamasa Kawanago and Kuniyuki KAKUSHIMA and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Effects of Metal Layer Insertion on EOT scaling in TiN/Metal/ La2O3 Si High –k Gate Stacks}, booktitle = {}, year = 2011, } @inproceedings{CTT100615536, author = {Ahmet Parhat and 来山大祐 and 金田 翼 and 鈴木 拓也 and Tomotsune Koyanagi and Miyuki Kouda and M. Mamatrishat and Takamasa Kawanago and Kuniyuki KAKUSHIMA and HIROSHI IWAI}, title = {Scaling of EOT Beyond 0.5nm}, booktitle = {}, year = 2010, } @inproceedings{CTT100616050, author = {金田翼 and 幸田みゆき and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {Tm-oxide/La2O3構造ゲート絶縁膜の界面特性評価}, booktitle = {}, year = 2010, } @inproceedings{CTT100630992, author = {金田翼 and 幸田みゆき and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {Effect of Rare Earth Oxide Capping for La-based Gate Oxides}, booktitle = {}, year = 2010, }