@article{CTT100694092, author = {A. Matsutani and K. Nishioka and M. Sato and D. Shoji and D. Kobayashi and T. Isobe and A. Nakajima and T. Tatsuma and S. Matsushita}, title = {Angled Etching of (001) Rutile Nb-TiO2 Substrate by SF6 Based Capacitive Coupled Plasma}, journal = {}, year = 2014, } @inproceedings{CTT100624047, author = {Kenji Ohmori and W. Feng and Soshi Sato and R. Hettiarachchi and M. Sato and T. Matsuki and Kuniyuki KAKUSHIMA and HIROSHI IWAI and Keisaku Yamada}, title = {Direct Real-Time Observation of Channel Potential Fluctuation, Correlated to Random Telegraph Noise of Drain Current Using Nanowire MOSFETs with Four-Probe Terminals}, booktitle = {}, year = 2011, }