@article{CTT100692402,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A 0.1G-to-20G Integrated MEMS Inertial Sensor},
  journal = {Japanese Journal of Applied Physics},
  year = 2015,
}

@article{CTT100685143,
  author = {山根 大輔 and 小西 敏文 and 松島 隆明 and 亀井 将太 and 益 一哉 and 町田 克之},
  title = {高感度静電容量型センサにおけるBrownian Noise評価手法},
  journal = {電気学会論文誌E（センサ・マイクロマシン部門誌）},
  year = 2015,
}

@article{CTT100686951,
  author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Dual-Axis MEMS Capacitive Inertial Sensor with High-Density Proof Mass},
  journal = {Microsystem Technologies},
  year = 2015,
}

@article{CTT100669022,
  author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Kazuya Masu and Katsuyuki Machida and Hiroshi Toshiyoshi},
  title = {A capacitive CMOS-MEMS sensor designed by multi-physics simulation for integrated CMOS-MEMS technology},
  journal = {Japanese Journal of Applied Physics},
  year = 2014,
}

@article{CTT100666863,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Katsuyuki Machida and Hiroshi Toshiyoshi and Kazuya Masu},
  title = {Design of sub-1g microelectromechanical systems accelerometers},
  journal = {Applied Physics Letters},
  year = 2014,
}

@article{CTT100666864,
  author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Kazuya Masu and Katsuyuki Machida and Hiroshi Toshiyoshi},
  title = {An arrayed accelerometer device of a wide range of detection for integrated CMOS-MEMS technology},
  journal = {Japanese Journal of Applied Physics},
  year = 2014,
}

@article{CTT100658034,
  author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Gou Motohashi and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Novel Sensor Structure and its Evaluation for Integratd Complementary Metal Oxide Semiconductor Microelectromechanical Systems Accelerometer},
  journal = {Japanese Journal of Applied Physics},
  year = 2013,
}

@inproceedings{CTT100695308,
  author = {佐布 晃昭 and 小西敏文 and 松島隆明 and 山根大輔 and 年吉 洋 and 曽根正人 and 益 一哉 and 町田克之},
  title = {MEMS加速度センサのための金属構造体の密着力評価},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695311,
  author = {佐布晃昭 and 小西敏文 and 松島隆明 and 山根大輔 and 年吉 洋 and 曽根正人 and 益 一哉 and 町田克之},
  title = {MEMS加速度センサのための金属構造体の密着力評価},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695298,
  author = {寺西美波 and Tso-Fu Mark Chang and 小西敏文 and 松島隆明 and 町田克之 and 年吉 洋 and 山根大輔 and 伊藤浩之 and 益 一哉 and 曽根正人},
  title = {電解金めっきで作製したMEMSデバイスにおける動作構造安定性},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100692272,
  author = {寺西美波 and Chang Tso-Fu Mark and 山根大輔 and 小西敏文 and 松島隆明 and 伊藤浩之 and 年吉 洋 and 町田克之 and 益 一哉 and 曽根正人},
  title = {電解金めっきで作製した微小カンチレバーの形状安定性評価},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100683810,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 益 一哉 and 年吉 洋 and 町田克之},
  title = {エネルギーハーべスティングデバイスの検討（5）},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100684706,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {Sub-1G検出可能な3軸MEMS加速度センサの基礎検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100683809,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {Sub-1Gから20Gまで検知可能な集積化MEMS加速度センサの検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100678033,
  author = {Takaaki Matsushima and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A MEMS Energy Harvesting Device for Integrated CMOS-MEMS Technology},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100678032,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A 1mG-to-20G Integrated MEMS Inertial Sensor},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100677571,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 亀井将太 and 益 一哉 and 町田克之},
  title = {高感度静電容量型センサにおけるブラウニアン・ノイズ評価の検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100677573,
  author = {小西敏文 and 松島隆明 and 山根大輔 and 益 一哉 and 年吉洋 and 町田克之},
  title = {回路シミュレータを用いたＭＥＭＳエネルギーハーベスティングデバイスの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100677572,
  author = {松島隆明 and 山根大輔 and 小西敏文 and 年吉洋 and 益 一哉 and 町田克之},
  title = {Ａｕ積層形成技術による３軸ＭＥＭＳ加速度センサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100677570,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {集積化ＣＭＯＳ?ＭＥＭＳ技術によるＳｕｂ-１Ｇ加速度センサの基礎検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676375,
  author = {Toshifumi Konishi and Takaaki Matsushima and Daisuke Yamane and Kazuya Masu and Hiroshi Toshiyoshi and Katsuyuki Machida},
  title = {A Novel Electromechanical Model of a MEMS Energy Harvesting Device for a Multi-physics Simulation Platform on a Circuit Simulator},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676378,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 益 一哉 and 年吉 洋 and 町田克之},
  title = {エネルギーハーべスティングデバイスの検討（４）},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676377,
  author = {松島隆明 and 小西敏文 and 山根大輔 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {積層メタル構造による３軸加速度センサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676376,
  author = {亀井将太 and 山根大輔 and 小西敏文 and 松島隆明 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {集積化CMOS?MEMS加速度センサへ向けたsub-1G静電容量型センサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676374,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Sub-1G Tri-axis MEMS Capacitive Sensor for Integrated CMOS-MEMS Accelerometers},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100674567,
  author = {山根大輔 and 亀井将太 and 小西敏文 and 松島隆明 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {集積化CMOS-MEMS加速度センサへ向けたsub-1Gセンサ},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100674569,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 益 一哉 and 年吉 洋 and 町田克之},
  title = {マルチフィジックスシミュレータを用いたCMOS-MEMS加速度センサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100674568,
  author = {松島隆明 and 小西敏文 and 山根大輔 and 亀井将太 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {積層メタルによる静電容量型3軸加速度センサの基礎検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100674565,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {A Sub-1G Capacitive Sensor for Integrated CMOS-MEMS Accelerometers},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100673061,
  author = {山根大輔 and 松島隆明 and 小西敏文 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {集積化CMOS-MEMSへ向けた2軸加速度センサの基礎検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100673062,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {A Tri-Axis MEMS Capacitive Sensor Using Multi-Layered High-density Metal for an Integrated CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100669023,
  author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {A Dual-Axis MEMS Inertial Sensor Using Multi-Layered High-density Metal for an Arrayed CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668510,
  author = {松島隆明 and 小西敏文 and 山根大輔 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {アレイ型ＭＥＭＳ加速度センサ-２軸ＭＥＭＳ加速度センサの検討-},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668508,
  author = {伊藤浩之 and 小西敏文 and 松島隆明 and 山根大輔 and 石原 昇 and 町田克之 and 益 一哉},
  title = {RF受信機のためのアレイ型MEMS共振器ミキサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668509,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {Sub-1G MEMS加速度センサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668511,
  author = {小西敏文 and 加賀谷 賢 and 山根大輔 and 松島隆明 and 伊藤浩之 and 石原 昇 and 益 一哉 and 町田克之 and 年吉 洋},
  title = {エネルギーハーベスティングデバイスの検討（３）},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668512,
  author = {加賀谷 賢 and 小西敏文 and 山根大輔 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {エネルギーハーベスティングデバイスの検討（２）},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668513,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {MEMS加速度センサによるSub-1G検出の基礎検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100663432,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 加賀谷 賢 and 佃 真文 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {アレイ型ＭＥＭＳ加速度センサの特性評価},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100663420,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Gou Motohashi and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Sub-1G MEMS Accelerometer},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100663429,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 丸山智史 and 加賀谷 賢 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {マルチフィジクスシミュレーションを用いた集積化CMOS-MEMS技術のためのセンサ回路の検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100663428,
  author = {加賀谷 賢 and 小西敏文 and 山根大輔 and 松島隆明 and 佃 真文 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {エネルギーハーベストデバイスの小型化の検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100661182,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 町田克之 and 益 一哉 and 年吉 洋},
  title = {CMOSとMEMS集積のためのシミュレーション解析-集積化CMOS-MEMSデバイス実現に向けて-},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100660290,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 加賀谷 賢 and 佃 真文 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {アレイ型ＭＥＭＳ加速度センサの基本特性評価},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100660521,
  author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Satoshi Maruyama and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Novel Sensor Circuits Design Using Multi-physics Simulation for CMOS-MEMS Technology},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100660520,
  author = {加賀谷 賢 and 小西敏文 and 山根大輔 and 松島隆明 and 佃 真文 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {エネルギーハーベストデバイスの検討(1)},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100660291,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 丸山智史 and 加賀谷 賢 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {集積化CMOS-MEMS加速度センサ回路の検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100659144,
  author = {佃 真文 and 山根大輔 and 小西敏文 and 松島隆明 and 加賀谷 賢 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {アレイ型ＭＥＭＳ加速度センサの基礎検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100658941,
  author = {小西敏文 and 丸山智史 and 山根大輔 and 松島隆明 and 町田克之 and 益 一哉 and 年吉 洋},
  title = {回路シミュレータを用いた集積化CMOS-MEMSのための統合設計環境の構築},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100658940,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 加賀谷 賢 and 佃 真文 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {金メッキ集積化CMOS-MEMSによるアレイ型加速度センサの小型化},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100658938,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Gou Motohashi and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {AN ARRAYED MEMS ACCELEROMETER WITH A WIDE RANGE OF DETECTION},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100654654,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 本橋 剛 and 加賀谷 賢 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型ＭＥＭＳ加速度センサの検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100654655,
  author = {小西敏文 and 山根大輔 and 本橋 剛 and 加賀谷 賢 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型ＭＥＭＳ加速度センサの設計},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100654653,
  author = {加賀谷 賢 and 小西敏文 and 山根大輔 and 本橋 剛 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型ＣＭＯＳ-ＭＥＭＳ加速度センサのためのデバイスの評価},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100645434,
  author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Gou Motohashi and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Evaluation of a Capacitive Sensor with a Gold Proof Mass Toward Integrated CMOS-MEMS Accelerometers},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645029,
  author = {本橋 剛 and 小西敏文 and 松島隆明 and 山根大輔 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {0.35μｍCMOS-LSIによるMEMSセンサ用VCO回路の検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645036,
  author = {山根大輔 and 本橋 剛 and 小西敏文 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型CMOS-MEMS加速度センサのためのデバイスの検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100644389,
  author = {松島 隆明 and 小西 敏文 and 本橋 剛 and 山根 大輔 and 伊藤 浩之 and 石原 昇 and 年吉 洋 and 町田 克之 and 益 一哉},
  title = {アレイ型CMOS-MEMS加速度センサの検討（3）},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100644392,
  author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Gou Motohashi and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {A Novel Sensor Structure and its Fabrication Process for Integrated CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100644390,
  author = {本橋 剛 and 小西 敏文 and 松島 隆明 and 山根 大輔 and 伊藤 浩之 and 石原 昇 and 年吉 洋 and 町田 克之 and 益一哉},
  title = {アレイ型CMOS-MEMS加速度センサの検討（4）},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100640424,
  author = {山根大輔 and 本橋 剛 and 小西敏文 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型CMOS-MEMS加速度センサの検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100653249,
  author = {山根大輔 and 本橋剛 and 小西敏文 and 松島隆明 and 伊藤浩之 and 石原昇 and 年吉洋 and 町田克之 and 益一哉},
  title = {アレイ型CMOS-MEMS加速度センサの検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100635241,
  author = {本橋剛 and 小西敏文 and 松島隆明 and 伊藤浩之 and 石原昇 and 年吉洋 and 町田克之 and 益一哉},
  title = {アレイ型CMOS-MEMS 加速度センサの検討(1)},
  booktitle = {第59 回応用物理学関係連合講演会 講演予稿集},
  year = 2012,
}

@inproceedings{CTT100635244,
  author = {小西敏文 and 本橋剛 and 松島隆明 and 伊藤浩之 and 石原昇 and 年吉洋 and 町田克之 and 益一哉},
  title = {アレイ型CMOS-MEMS 加速度センサの検討 (2)},
  booktitle = {第59 回応用物理学関係連合講演会 講演予稿集},
  year = 2012,
}

@inproceedings{CTT100645031,
  author = {本橋 剛 and 小西敏文 and 松島隆明 and 山根大輔 and 伊藤浩之 and 益一哉 and 町田克之},
  title = {0.35μｍCMOS-LSIによるMEMSセンサ用VCO回路の検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100629997,
  author = {小西 敏文 and 丸山 智史 and 松島 隆明 and 三田 信 and 町田 克之 and 伊藤 浩之 and 石原 昇 and 益一哉 and 藤田 博之 and 年吉 洋},
  title = {集積化 CMOSCMOS--MEMSMEMS のための統合設計技術統合設計技術の検討 (2)},
  booktitle = {第 72 回応用物理学会学術講演会 講演予稿集(2011 秋 山形大学) 30a-E-14},
  year = 2011,
}