@book{CTT100645577, author = {益一哉 and 町田克之 and 年吉洋 and 江刺 正喜 and 藤田博之 and 石田誠 and 田中 秀治 and 高橋 一浩 and 越田信義 and 小山 英樹 and 佐々木 実 and 秦誠一 and 橋口 原 and 高尾 英邦 and 永瀬 雅夫 and 山口 浩司 and 北澤 正志 and 前中 一介 and 澤田和明 and 柴崎 一郎 and 野村聡 and 竹内 幸裕 and 柴田 英毅 and 楢崎 祥一 and 鈴木 雄二 and 西岡 泰城 and 森村 浩季 and 日暮 栄治 and 千野 満 and 内山 直己 and 足立 秀喜 and 井上 晴伸 and 橋本 秀樹}, title = {異種機能デバイス集積化技術の基礎と応用?MEMS, NEMS, センサ, CMOSLSIの融合?}, publisher = {株式会社 シーエムシー出版}, year = 2012, } @article{CTT100768545, author = {T. Sato and S. Nabeya and M. Vivek and T. Ishida and R. Kometani and H. Fujita}, title = {Real time observation of slipping and rolling events in DLC wear nanoparticles}, journal = {Nanotechnology}, year = 2018, } @article{CTT100709224, author = {Minoru Egawa and Tadashi Ishida and Laurent Jalabert and Hiroyuki Fujita}, title = {In-situ realtime monitoring of nanoscale gold electroplating using micro-electro-mechanical systems liquid cell operating in transmission electron microscopy}, journal = {Applied Physics Letters}, year = 2016, } @article{CTT100709242, author = {T. Ishida and Takaaki Sato and Masatsugu Oguma and Takahiro Ishikawa and Noriaki Itamura and Keisuke Goda and Naruo Sasaki and H. Fujita}, title = {Time-lapse Nanoscopy of Friction in the non-Amonton and non-Coulomb Regime}, journal = {Nano Letters}, year = 2014, } @article{CTT100709249, author = {Yang-Che Chen and Tadashi Ishida and Hiroshi Toshiyoshi and Rongshun Chen and Hiroyuki Fujita}, title = {Spontaneous oscillation due to electrical charging effect in MEMS electrostatic switches}, journal = {IEEJ Transactions on Sensors and Micromachines}, year = 2014, } @article{CTT100684017, author = {山根 大輔 and サン ウィンストン and 川崎 繁男 and 藤田 博之 and 年吉 洋}, title = {水平駆動型MEMS導波路の静電駆動時における高周波特性の評価手法}, journal = {電子情報通信学会論文誌C(エレクトロニクスソサエティ)}, year = 2014, } @article{CTT100709250, author = {Tadashi Ishida and Kuniyuki Kakushima and Hiroyuki Fujita}, title = {Degradation Mechanisms of Contact Point during Switching Operation of MEMS Switch}, journal = {JOURNAL OF MICROELECTROMECHANICAL SYSTEMS}, year = 2013, } @article{CTT100709486, author = {Takaaki Sato and Tadashi Ishida and Laurent Jalabert and Hiroyuki Fujita}, title = {Real-time transmission electron microscope observation of nanofriction at a single Ag asperity}, journal = {Nanotechnology}, year = 2012, } @article{CTT100684018, author = {山根 大輔 and サン ウィンストン and 川崎 繁男 and 藤田 博之 and 年吉 洋}, title = {エア分離CPWによるシリコン導波路の基礎検討とKu帯RF-MEMSスイッチへの応用}, journal = {電子情報通信学会論文誌C(エレクトロニクスソサエティ)}, year = 2012, } @article{CTT100645028, author = {山根大輔 and サン ウィンストン and 川崎 繁男 and 藤田 博之 and 年吉 洋}, title = {エア分離CPWによるシリコン導波路の基礎検討とKu帯RF-MEMSスイッチへの応用}, journal = {電子情報通信学会論文誌C(エレクトロニクスソサエティ)}, year = 2012, } @article{CTT100709492, author = {Tadashi Ishida and Takaaki Sato and Hiroyuki Fujita}, title = {In-situ Observation of Shear Deformation of Gold Single Real Contact Point at the Nanoscale}, journal = {Tribology Online}, year = 2012, } @article{CTT100709491, author = {Tadashi Ishida and Kuniyuki KAKUSHIMA and Teruyasu Mizoguchi and Hiroyuki Fujita}, title = {Role of dislocation movement in the electrical conductance of nanocontacts}, journal = {Scientific Reports}, year = 2012, } @article{CTT100702999, author = {朴鍾淏 and 高間信行 and 藤田博之 and 金範埈}, title = {面基板上の三次元マイクロパターニング及び,円柱形ポリマースタンプ製作への応用}, journal = {電気学会論文誌E(センサ・マイクロマシン部門誌)}, year = 2012, } @article{CTT100709487, author = {Laurent Jalabert and Takaaki Sato and Tadashi Ishida and Hiroyuki Fujita}, title = {Ballistic Thermal Conductance of a Lab-in-a-TEM Made Si Nanojunction}, journal = {Nano Letters}, year = 2012, } @article{CTT100709254, author = {Masataka Usami and Tadashi Ishida and Momoko Kumemura and Laurent Jalabert and Collard Dominique and Hiroyuki Fujita}, title = {Four-Terminal Electrical Measurement of a DNA Molecular Bundle Captured by MEMS Tweezers}, journal = {IEEJ Transactions on Sensors and Micromachines}, year = 2012, } @article{CTT100670066, author = {Jongho Park and Jacques Fattaccioli and Hiroyuki Fujita and Beomjoon Kim}, title = {Fabrication of Aluminum/Alumina Patterns using Localized Anodization of Aluminum}, journal = {International Journal of Precision Engineering and Manufacturing}, year = 2012, } @article{CTT100684019, author = {Daisuke Yamane and Winston Sun and Harunobu Seita and Shigeo Kawasaki and Hiroyuki Fujita and Hiroshi Toshiyoshi}, title = {A Ku-band Dual-SPDT RF-MEMS Switch by Double-Side SOI Bulk Micromachining}, journal = {IEEE Journal of Microelectromechanical Systems}, year = 2011, } @article{CTT100670067, author = {Jongho Park and Hiroyuki Fujita and Beomjoon Kim}, title = {Fabrication of metallic microstructure on curved substrate by optical soft lithography and copper electroplating}, journal = {Sensors and Actuators A-Physical}, year = 2011, } @article{CTT100684020, author = {山根 大輔 and 李 宥憲 and 藤田 博之 and 年吉 洋}, title = {メッキ金の厚膜マスクによるRF-MEMSコプレーナ導波路の製作}, journal = {電気学会論文誌E(センサ・マイクロマシン部門誌)}, year = 2011, } @article{CTT100684021, author = {Daisuke Yamane and Winston Sun and Shigeo Kawasaki and Hiroyuki Fujita and Hiroshi Toshiyoshi}, title = {A 12GHz bulk-micromachined RF-MEMS phase shifter by SOI layer-separation design}, journal = {IEICE Electronics Express}, year = 2010, } @article{CTT100684022, author = {Daisuke Yamane and Winston Sun and Harunobu Seita and Shigeo Kawasaki and Hiroyuki Fujita and Hiroshi Toshiyoshi}, title = {An SOI bulk-micromachined dual SPDT RF-MEMS switch by layer-wise separation design of waveguide and switching mechanism}, journal = {IEICE Electronics Express}, year = 2010, } @inproceedings{CTT100695319, author = {Kazuhiro Takahashi and Makoto Mita and Muneki Nakada and Daisuke Yamane and Akio Higo and Hiroyuki Fujita and Hiroshi Toshiyoshi}, title = {Development of Multi-user Multi-chip SOI CMOS-MEMS Process}, booktitle = {}, year = 2015, } @inproceedings{CTT100695320, author = {Daisuke Yamane and Harunobu Seita and Winston Sun and Shigeo Kawasaki and Hiroyuki Fujita and Hiroshi Toshiyoshi}, title = {A 12-GHz DPDT RF MEMS Switch with Layer-wise Waveguide/Actuator Design Technique}, booktitle = {}, year = 2015, } @inproceedings{CTT100709649, author = {Yuki Takayama and Tadashi Ishida and Takaaki Sato and Laurent Jalabert and Hiroyuki Fujita}, title = {Study of Viscous Deformation of SiO2 by Nanoscale Tensile Test under In-situ Observation}, booktitle = {}, year = 2014, } @inproceedings{CTT100709636, author = {Tadashi Ishida and Hiroyuki Fujita}, title = {MEMS-in-TEM for Characterization of Material at the Nanoscale}, booktitle = {}, year = 2013, } @inproceedings{CTT100709653, author = {Masatsugu Oguma and Takahiro Ishikawa and Noriaki Itamura and Tadashi Ishida and Hiroyuki Fujita and Naruo Sasaki}, title = {Shear and Fracture of Single Real Contact Region of Si Under High Pressure}, booktitle = {}, year = 2013, } @inproceedings{CTT100709661, author = {Takaaki Sato and Tadashi Ishida and Shinsuke Nabeya and Laurent Jalabert and Hiroyuki Fujita}, title = {MEMS combined with TEM Setup for Nanotribology}, booktitle = {}, year = 2013, } @inproceedings{CTT100709683, author = {鍋屋信介 and 石田忠 and 佐藤隆昭 and 藤田博之}, title = {MEMSを用いたマイクロスケールPTFE摩擦界面のSTEMその場観測及び摩擦力計測}, booktitle = {}, year = 2013, } @inproceedings{CTT100709687, author = {藤田博之 and 石田忠 and 佐藤隆昭 and 佐々木成朗}, title = {MEMS-in-TEMによるナノ接合の破壊、熱伝導、固相拡散の「その場」観察}, booktitle = {}, year = 2013, } @inproceedings{CTT100709686, author = {小熊将嗣 and 石川貴大 and 板村賢明 and 石田忠 and 藤田博之 and 佐々木成朗}, title = {Si対向探針で形成された単一真実接触部のせん断破壊過程}, booktitle = {}, year = 2013, } @inproceedings{CTT100709685, author = {嘉山 由佑子 and 石田忠 and 板村賢明 and 藤田博之 and 佐々木成朗}, title = {シリコンナノ接合の繰り返しせん断破壊過程}, booktitle = {}, year = 2013, } @inproceedings{CTT100709670, author = {石田忠 and 藤田博之}, title = {MEMS対向針を用いたナノスケール接触・分離試験のTEMその場観察}, booktitle = {}, year = 2012, } @inproceedings{CTT100709689, author = {Yuki Takayama and Hiroyuki Fujita and Tadashi Ishida}, title = {Electrical Measurement of ITO Nanowire with In-Situ TEM Observation}, booktitle = {}, year = 2012, } @inproceedings{CTT100645034, author = {小西敏文 and 丸山智史 and 三田信 and 山根大輔 and 伊藤浩之 and 町田克之 and 石原 昇 and 益一哉 and 藤田博之 and 年吉 洋}, title = {ハードウェア記述言語を用いた集積化CMOS-MEMS統合設計技術}, booktitle = {}, year = 2012, } @inproceedings{CTT100709688, author = {Minoru Egawa and Tadashi Ishida and Hiroyuki Fujita}, title = {MEMS Liquid TEM Cell for Real-Time Observation of Gold Electroplating}, booktitle = {}, year = 2012, } @inproceedings{CTT100644391, author = {Toshifumi Konishi and Satoshi Maruyama and Makoto Mita and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Hiroyuki Fujita and Hiroshi Toshiyoshi}, title = {A CMOS-MEMS Design Technique based on an Electrical Circuit Simulator with Hardware Description Language}, booktitle = {}, year = 2012, } @inproceedings{CTT100709667, author = {Laurent Jalabert and Takaaki Sato and Tadashi Ishida and Guillou Herve and Minoru Egawa and Shinsuke Nabeya and Yuki Takayama and Sebastian Volz and Hiroyuki Fujita}, title = {Toward a Lab-in-a-TEM by mounting advanced-MEMS in TEM holder}, booktitle = {}, year = 2012, } @inproceedings{CTT100709641, author = {Hiroyuki Fujita and Tadashi Ishida and Takaaki Sato and Naruo Sasaki and Fabrizio Cleri}, title = {Material Testing at Nanoscale with in-situ TEM Observation}, booktitle = {}, year = 2012, } @inproceedings{CTT100709644, author = {Hiroyuki Fujita and Hiroshi Toshiyoshi and Tadashi Ishida}, title = {From MEMS-CMOS towards Heterogeneous Integration over Scale}, booktitle = {}, year = 2012, } @inproceedings{CTT100709646, author = {Tadashi Ishida and Laurent Jalabert and Hiroyuki Fujita}, title = {In-situ observation of formation of eutectic structures between gold and silicon}, booktitle = {}, year = 2012, } @inproceedings{CTT100670172, author = {Jongho Park and Hiroyuki Fujita and Beomjoon Kim}, title = {Fabrication of 3D micro structures on nonplanar substrates and its applications for roll micro-contact printing}, booktitle = {}, year = 2012, } @inproceedings{CTT100670175, author = {Jongho Park and Hiroyuki Fujita and Beomjoon Kim}, title = {Micro patterning on nonplanar substrates using unconventional photolithographic technique with flexible photomask}, booktitle = {}, year = 2011, } @inproceedings{CTT100695324, author = {山根大輔 and Winston Sun and 川崎繁男 and 藤田博之 and 年吉 洋}, title = {SOIレイヤ分離設計によるモノリシックRF-MEMS移相器}, booktitle = {}, year = 2011, } @inproceedings{CTT100629997, author = {小西 敏文 and 丸山 智史 and 松島 隆明 and 三田 信 and 町田 克之 and 伊藤 浩之 and 石原 昇 and 益一哉 and 藤田 博之 and 年吉 洋}, title = {集積化 CMOSCMOS--MEMSMEMS のための統合設計技術統合設計技術の検討 (2)}, booktitle = {第 72 回応用物理学会学術講演会 講演予稿集(2011 秋 山形大学) 30a-E-14}, year = 2011, } @inproceedings{CTT100670174, author = {Jongho Park and Hiroyuki Fujita and Beomjoon Kim}, title = {Fabrication of metallic microstructure on curved substrate by optical soft lithography and copper electroplating}, booktitle = {}, year = 2011, } @inproceedings{CTT100695325, author = {山根大輔 and 藤田博之 and 年吉洋}, title = {機能レイヤ分離設計によるSOI RF-MEMS受動素子に関する研究}, booktitle = {}, year = 2011, } @inproceedings{CTT100703019, author = {朴鍾淏 and 高間信行 and 藤田博之 and Beomjoon Kim}, title = {凹面基板上の三次元マイクロパターニング及び,円柱形ポリマースタンプ製作への応用}, booktitle = {}, year = 2011, } @inproceedings{CTT100703002, author = {Jongho Park and Hiroyuki Fujita and Beomjoon Kim}, title = {Fabrication of metallic microstructure on curved substrate by optical soft lithography and copper electroplating}, booktitle = {}, year = 2011, } @inproceedings{CTT100695326, author = {山根大輔 and Winston Sun and 川崎繁男 and 藤田博之 and 年吉 洋}, title = {Ku帯デュアルSPDT RF-MEMSスイッチの開発}, booktitle = {}, year = 2010, } @inproceedings{CTT100695316, author = {Daisuke Yamane and Winston Sun and Shigeo Kawasaki and Hiroyuki Fujita and Hiroshi Toshiyoshi}, title = {A Ku-Band RF-MEMS Phase Shifter with SOI Double-Side Bulk-Micromachining Design}, booktitle = {}, year = 2010, } @inproceedings{CTT100670168, author = {Jongho Park and Hiroyuki Fujita and Beomjoon Kim}, title = {Fabrication of high aspect ratio metallic structure on the curved substrate using flexible mask and copper electroplating}, booktitle = {}, year = 2010, } @inproceedings{CTT100695314, author = {Daisuke Yamane and Hiroyuki Fujita and Hiroshi Toshiyoshi and Shigeo Kawasaki}, title = {Development of a Dual-SPDT RF-MEMS Switch for Ku-band}, booktitle = {}, year = 2010, } @inproceedings{CTT100695317, author = {Daisuke Yamane and Kiyotaka Yamashita and Harunobu Seita and Hiroyuki Fujita and Hiroshi Toshiyoshi and Shigeo Kawasaki}, title = {A Dual-SPDT RF-MEMS Switch on a Small-Sized LTCC Phase Shifter for Ku-band operation}, booktitle = {}, year = 2009, } @inproceedings{CTT100670173, author = {Jongho Park and Jacques Fattaccioli and Hiroyuki Fujita and Beomjoon Kim}, title = {Localized anodization of aluminum for the formation of aluminum/alumina patterns}, booktitle = {}, year = 2009, } @inproceedings{CTT100695327, author = {Winston Sun and Daisuke Yamane and Yuheon Yi and Hiroshi. Toshiyoshi and Hiroyuki Fujita and Kiyotaka Yamashita}, title = {A Loaded-Line Phase Shifter Using MEMS Switches}, booktitle = {}, year = 2009, } @inproceedings{CTT100695328, author = {張鋭 and 山根大輔 and 藤田博之 and 年吉 洋}, title = {RF-MEMS技術による可変メタマテリアル導波路の設計と試作}, booktitle = {}, year = 2009, } @inproceedings{CTT100703001, author = {Jongho Park and Jacques Fattaccioli and Nobuyuki Takama and Hiroyuki Fujita and Beomjoon Kim}, title = {Localized anodization of aluminum for the formation of aluminum/alumina patterns}, booktitle = {}, year = 2009, } @inproceedings{CTT100695322, author = {David Dubuc and Daisuke Yamane and Zhang Rui and Yuheon Yi and Katia Grenier and Hiroyuki Fujita and Hiroshi Toshiyoshi}, title = {Modelling and Design Guidelines of Metamaterial-based Artificial Dielectric for the Miniaturization of Microwave Passive Circuit}, booktitle = {}, year = 2008, } @inproceedings{CTT100695331, author = {山根大輔 and Winston Sun and 清田 晴信 and 川崎 繁男 and 藤田 博之 and 年吉 洋}, title = {導波路/アクチュエータのレイヤ分離構造設計技術によるRF-MEMSスイッチ}, booktitle = {}, year = 2008, } @inproceedings{CTT100695333, author = {Daisuke Yamane and Kazuhiro Takahashi and Winston Sun and Harunobu Seita and Shigeo Kawasaki and Hiroyuki Fujita and Hiroshi Toshiyoshi}, title = {Microwave Switches by MEMS Technology and their Application to Phase-Shifter}, booktitle = {}, year = 2007, } @inproceedings{CTT100695334, author = {Daisuke Yamane and Kazuhiro Takahashi and Winston Sun and Harunobu Seita and Shigeo Kawasaki and Hiroyuki Fujita and Hiroshi Toshiyoshi}, title = {RF-MEMS Switches for 5.8 GHz Phase Shifter Application}, booktitle = {}, year = 2007, } @inproceedings{CTT100695335, author = {山根大輔 and 高橋 一浩 and Winston Sun and 清田 晴信 and 川崎 繁男 and 藤田 博之 and 年吉 洋}, title = {アクティブフェイズドアレイアンテナの移相器応用RF-MEMSスイッチ}, booktitle = {}, year = 2007, } @misc{CTT100709668, author = {佐藤隆昭 and 石田忠 and 藤田博之}, title = {“見る”は”知る”につながる!摩擦界面のその場観察}, year = 2014, } @misc{CTT100709669, author = {石田忠 and 佐藤隆昭 and 藤田博之}, title = {MEMSを用いたナノスケール摩擦海面観察と同時機械特性評価}, year = 2013, }