@inproceedings{CTT100660876, author = {Hiroyuki Yamada and Shiro Hino and Naruhisa Miura and Masayuki Imaizumi and Satoshi Yamakawa and EISUKE TOKUMITSU}, title = {Fabrication of 4H-SiC MOSFETs Using Stacked Al2O3 Gate Insulator with Pre-Annealed Al2O3 Buffer Layer}, booktitle = {}, year = 2013, } @inproceedings{CTT100658533, author = {Eisuke Tokumitsu and Isahaya Yamamura and Shiro Hino and Naruhisa Miura and Masayuki Imaizumi and Hiroaki Sumitani and Tatsuo Oomori}, title = {Comparative Study of Metalorganic Chemical Vapour Deposition of HfO2 and Al2O3 Gate Insulators on SiC for Power MOSFET Applications}, booktitle = {}, year = 2012, } @inproceedings{CTT100631923, author = {Eisuke Tokumitsu and Akio Ishiguro and Hiroyuki Yamada and Shiro Hino and Naruhisa Miura and Masayuki Imaizumi and Hiroaki Sumitani and Tatsuo Oomori}, title = {Al2O3/4H-SiC MOSFETs Fabricated with High-Temperature Nitridation Process}, booktitle = {}, year = 2011, } @inproceedings{CTT100632302, author = {木田憲之助 and 日野史郎 and 三浦 成久 and 今泉昌之 and 岸谷博昭 and 徳光永輔}, title = {H(CH3)2Alを用いたMOCVD法SiC基板上へのAl2O3膜の形成とAl2O3/SiC MOSFETの電気的特性評価}, booktitle = {}, year = 2011, } @inproceedings{CTT100632115, author = {山田泰之 and 石黒暁夫 and 日野史郎 and 三浦 成久 and 今泉昌之 and 岸谷博昭 and 徳光永輔}, title = {Al2O3堆積膜をゲート絶縁膜に用いたSiC-MOSFETの作製と評価}, booktitle = {信学技報}, year = 2011, }