@inproceedings{CTT100634676,
  author = {Rinshi Sugino and Ryuji Takizawa and Yasuhisa Sato and Takashi Ito},
  title = {Characterization  of Si-SiO2 Interfaces Formed After Photo-Excited Cleaning},
  booktitle = {Ext. Abs. of 2lst Conf. on SSDM},
  year = 1989,
}