@book{CTT100846136,
  author = {Tso-Fu Mark Chang and Hideaki Nakajima and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Hiroshi Toshiyoshi and Masato Sone},
  title = {Effective Young’s Modulus of Elelectrodeposited Gold for Design of MEMS Accelerometers},
  publisher = {IFSA PUBLISHING, S.L.},
  year = 2021,
}

@book{CTT100835470,
  author = {Hao-Chun Tang and Tso-Fu Mark Chang and Yaw-Wang Chai and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Nanoscale Hierarchical Structure of Twins in Nanograins Embedded with Twins and the Strengthening Effect},
  publisher = {MDPI},
  year = 2020,
}

@book{CTT100791876,
  author = {Chun-Yi Chen and Masaharu Yoshiba and Haochun Tang and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida},
  title = {Pulse-Current Electrodeposition of Gold},
  publisher = {IntechOpen},
  year = 2019,
}

@book{CTT100791875,
  author = {Haochun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida},
  title = {Electrodeposition of Gold Alloys and the Mechanical Properties},
  publisher = {IntechOpen},
  year = 2019,
}

@book{CTT100770100,
  author = {Tso-Fu Mark Chang and Chun-Yi Chen and Yota Ishizuka and Minami Teranishi and Takuma Suzuki and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Design of Au-Based Micro-Components with High Structure Stability for Applications in MEMS Inertial Sensors},
  publisher = {IFSA Publishing},
  year = 2019,
}

@book{CTT100748622,
  author = {Tso-Fu Mark Chang and Chun-Yi Chen and Hao-Chun Tang and Masaharu Yoshiba and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Fabrication and Characterization of High Strength Electrodeposited Gold toward High-Sensitive MEMS Inertial Sensors},
  publisher = {IFSA Publishing},
  year = 2017,
}

@article{CTT100917457,
  author = {Zeyu Gu and Jhen-Yang Wu and Yiming Jiang and Tomoyuki Kurioka and Chun-Yi Chen and Hwai-En Lin and Xun Luo and Daisuke Yamane and Masato Sone and Tso-Fu Mark Chang},
  title = {Influence of Pulsed Reverse Electrodeposition on Mechanical Properties of Ni-W Alloys},
  journal = {Electrochem},
  year = 2024,
}

@article{CTT100908636,
  author = {Takuto Nakanishi and Akihito Kato and Yuji Wada and Ryo Nakashima and Chenxu Zhao and Cheng-Yao Lo and Kentaro Nakamura and Heeyoung Lee and Yosuke Mizuno and Daisuke Yamane},
  title = {Multimode interference-based strain sensing using micro dry-etched perfluorinated polymer optical fibers},
  journal = {Japanese Journal of Applied Physics},
  year = 2024,
}

@article{CTT100894408,
  author = {Yiming Jiang and Chun-Yi Chen and Tomoyuki Kurioka and Xun Luo and Daisuke Yamane and Masato Sone and Tso-Fu Mark Chang},
  title = {Effects of Bromide Ions in Anomalous Codeposition of Ni-Co Alloys with a Sulfamate Based Electrolyte},
  journal = {Journal of The Electrochemical Society},
  year = 2023,
}

@article{CTT100892348,
  author = {Yiming Jiang and Chun-Yi Chen and Tomoyuki Kurioka and Xun Luo and Daisuke Yamane and Masanori Mizoguchi and Osamu Kudo and Ryu Maeda and Masato Sone and Tso-Fu Mark Chang},
  title = {Specimen Size Effect on the Strength of Nickel-Boron Alloys},
  journal = {Materials Letters},
  year = 2023,
}

@article{CTT100882965,
  author = {Yiming Jiang and Chun-Yi Chen and Tomoyuki Kurioka and Xun Luo and Daisuke Yamane and Masanori  Mizoguchi and Osamu Kudo and Ryu Maeda and Masato Sone and Tso-Fu Mark Chang},
  title = {Electrodeposition of Ni-B Alloy Film: Effect of Current Density and Heat Treatment on Micro-Mechanical Property},
  journal = {Journal of The Electrochemical Society},
  year = 2022,
}

@article{CTT100868830,
  author = {Yiming Jiang and Chun-Yi Chen and Xun Luo and Daisuke Yamane and Masanori  Mizoguchi and Osamu Kudo and Ryu Maeda and Masato Sone and Tso-Fu Mark Chang},
  title = {Electrodeposition and Micro-Mechanical Property Characterization of  Nickel-Cobalt Alloys toward Design of MEMS Components},
  journal = {Electrochem},
  year = 2022,
}

@article{CTT100866394,
  author = {Taro Omura and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Effect of Current Density on Micro-Mechanical Property of Electrodeposited Gold Film Evaluated by Micro-Compression},
  journal = {Surface & Coatings Technology},
  year = 2022,
}

@article{CTT100846484,
  author = {Hitomi Watanabe and Tso-Fu Mark Chang and Michael  Schneider and Ulrich  Schmid and Chun-Yi Chen and Shinichi Iida and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electro-deposition and the Temperature Dependency},
  journal = {Electrochem},
  year = 2021,
}

@article{CTT100836034,
  author = {Yu-Hao Jen and Chia-Tso Mo and Yu-Wen Chen and Emile Martincic and Daisuke Yamane and Tso-Fu Chang and Masato Sone and Cheng-Yao Lo},
  title = {Development and Characterization of Vertically Stacked Tactile Sensor with Hollow Structure},
  journal = {IEEE Sensors Journal},
  year = 2021,
}

@article{CTT100841528,
  author = {Yiming Jiang and Chun-Yi Chen and Tso-Fu Mark Chang and Xun Luo and Daisuke Yamane and Masato Sone},
  title = {Electrodeposition of Ni-Co Alloys and the Mechanical Properties by Micro-Vickers Hardness Test},
  journal = {Electrochem},
  year = 2021,
}

@article{CTT100834843,
  author = {Yu-An Chien and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Co-Electrodeposition of Au-TiO2 Nanocomposite and the Micro-Mechanical Properties},
  journal = {Electrochem},
  year = 2020,
}

@article{CTT100823691,
  author = {Kosuke Suzuki and Tso-Fu Mark Chang and Ken Hashigata and Keisuke Asano and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Hiroyuki Ito and Katsuyuki  Machida and Kazuya Masu and Masato Sone},
  title = {Sample Geometry Effect on Mechanical Property of Gold Micro-Cantilevers by Micro-Bending Test},
  journal = {MRS Communications},
  year = 2020,
}

@article{CTT100823024,
  author = {Kazuya Masu and Katsuyuki Machida and Daisuke Yamane and Hiroyuki Ito and Noboru Ishihara and Tso-Fu Mark Chang and Masato Sone and Ryo Shigeyama and Taiki Ogata and Yoshihiro Miyake},
  title = {CMOS-MEMS Based Microgravity Sensor and Its Application},
  journal = {ECS Transactions},
  year = 2020,
}

@article{CTT100820976,
  author = {Kyotaro Nitta and Hao-Chun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Shinichi Iida and Daisuke Yamane and Katsuyuki Machida and Hiroyuki  Ito and Kazuya Masu and Masato Sone},
  title = {Alloy Electroplating and Young’s Modulus Characterization of AuCu Alloy Microcantilevers},
  journal = {Journal of The Electrochemical Society},
  year = 2020,
}

@article{CTT100806473,
  author = {Kyotaro Nitta and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Shinichi Iida and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Fabrication of Au-Cu Alloy/Ti Layered Micro-Cantilevers and the Long-Term Structure Stability},
  journal = {IEEE Conference Paper},
  year = 2020,
}

@article{CTT100807192,
  author = {Tatsuya Koga and Takashi Ichikawa and Naoto Tanaka and Taiki Ogata and Hiroki Ora and Daisuke Yamane and Noboru Ishihara and Hiroyuki Ito and Masato Sone and Katsuyuki Machida and Yoshihiro Miyake and Kazuya Masu},
  title = {High-Sensitivity Inertial Sensor Module to Measure Hidden Micro Muscular Sounds},
  journal = {IEEE Conference Paper},
  year = 2019,
}

@article{CTT100803948,
  author = {Hao-Chun Tang and Tso-Fu Mark Chang and Yaw-Wang Chai and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Nanoscale Hierarchical Structure of Twins in Nanograins Embedded with Twins and the Strengthening Effect},
  journal = {Metals},
  year = 2019,
}

@article{CTT100800956,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroshi Toshiyoshi and Masato Sone and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu},
  title = {A MEMS Accelerometer for Sub-mG Sensing},
  journal = {Sensors and Materials},
  year = 2019,
}

@article{CTT100807019,
  author = {Katsuyuki Machida and Daisuke Yamane and Toshifumi Konishi and Shin-ichi Iida and Noboru Ishihara and Tso-Fu Mark Chang and Masato Sone and Hiroyuki Ito and Kazuya Masu},
  title = {MEMS Accelerometer Fabricated by Gold Multi-Layer Metal Technology},
  journal = {ECS Transactions},
  year = 2019,
}

@article{CTT100800512,
  author = {Keisuke Asano and Tso-Fu Mark Chang and Hao-Chun Tang and Takashi Nagoshi and Chun-Yi Chen and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {High Strength Electrodeposited Au-Cu Alloys Evaluated by Bending Test toward Movable Micro-Components},
  journal = {ECS Journal of Solid State Science and Technology},
  year = 2019,
}

@article{CTT100794834,
  author = {Yu-Hong  Gao and Yu-Hao  Jen and Rongshun Chen and Daisuke Yamane and Cheng-Yao Lo},
  title = {Five-fold sensitivity enhancement in a capacitive tactile sensor by reducing material and structural rigidity},
  journal = {Sensors & Actuators: A. Physical},
  year = 2019,
}

@article{CTT100796028,
  author = {Kyotaro Nitta and Tso-Fu Mark Chang and Koichiro Tachibana and Hao-chun Tang and Chun-Yi Chen and Shinichi Iida and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Cu-Alloying Effect on Structure Stability of Electrodeposited Gold-Based Micro-Cantilever Evaluated by Long-Term Vibration Test},
  journal = {Microelectronic Engineering},
  year = 2019,
}

@article{CTT100795920,
  author = {Ken Atsumi and Shota Otobe and Tatsuya Koga and Takashi Ichikawa and Daisuke Yamane and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {Pillar-Shaped Electrodes for 3-axis Gold-Proof-Mass MEMS Capacitive Accelerometers},
  journal = {IEEE Conference Paper},
  year = 2019,
}

@article{CTT100793648,
  author = {Ken Hashigata and Hao-Chun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Strengthening of Micro-Cantilever by Au/Ti Bi-Layered Structure Evaluated by Micro-Bending Test toward MEMS Devices},
  journal = {Microelectronic Engineering},
  year = 2019,
}

@article{CTT100786193,
  author = {Koichiro Tachibana and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Long-Term Structure Stability of Ti/Au Layered Micro-Cantilever Evaluated by Vibration Test},
  journal = {Microelectronic Engineering},
  year = 2019,
}

@article{CTT100785326,
  author = {Motohiro Takayasu and Ippei Tsuji and Hiroyuki Ito and Daisuke Yamane and Shiro Dosho and Toshifumi Konishi and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {Microgravity Generation Using Tilting Board for Resolution Evaluation of MEMS Accelerometer},
  journal = {Sensors and Materials},
  year = 2018,
}

@article{CTT100766193,
  author = {Keisuke Asano and Hao-Chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Promoted bending strength in micro-cantilevers composed of nanograined gold toward MEMS applications},
  journal = {Microelectronic Engineering},
  year = 2018,
}

@article{CTT100756750,
  author = {Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Toshifumi Konishi and Katsuyuki Machida and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Enhancement in Structure Stability of Gold Micro-Cantilever by Constrainted Fixed-End in MEMS devices},
  journal = {Microelectronic Engineering},
  year = 2018,
}

@article{CTT100766253,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Shin-ichi Iida and Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {Temperature Characteristics of MEMS Inertial Sensor Fabricated by Gold Multi-Layer Metal Technology},
  journal = {},
  year = 2018,
}

@article{CTT100759221,
  author = {Hao-Chun Tang and Ken Hashigata and Tso-Fu Mark Chang and Chun-Yi Chen and Takashi Nagoshi and Toshifumi Konishi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Sample size effect on micro-mechanical properties of gold electroplated with dense carbon dioxide},
  journal = {Surface and Coatings Technology},
  year = 2018,
}

@article{CTT100758009,
  author = {Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Au-Cu Alloys Prepared by Pulse Electrodeposition toward Applications as Movable Micro-Components in Electronic Devices},
  journal = {Journal of The Electrochemical Society},
  year = 2018,
}

@article{CTT100759250,
  author = {Motohiro Takayasu and Shiro Dosho and Hiroyuki Ito and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu},
  title = {A 0.18-?m CMOS time-domain capacitive-sensor interface for sub-1mG MEMS accelerometers},
  journal = {IEICE Electronics Express},
  year = 2018,
}

@article{CTT100751410,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Koichiro Tachibana and Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {LONG-TERM VIBRATION CHARACTERISTICS OF MEMS INERTIAL SENSORS BY MULTI-LAYER METAL TECHNOLOGY},
  journal = {Proceedings of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)},
  year = 2017,
}

@article{CTT100751408,
  author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices},
  journal = {Proceedings of the 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems},
  year = 2017,
}

@article{CTT100742124,
  author = {Keisuke Asano and Hao-Chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Micro-Bending Testing of Electrodeposited Gold for Applications as Movable Components in MEMS Devices},
  journal = {Microelectronic Engineering},
  year = 2017,
}

@article{CTT100742125,
  author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Deformation Behavior of Electroplated Gold Composed of Nano-Columnar Grains Embedded in Micro-Columnar Textures},
  journal = {Materials Letters},
  year = 2017,
}

@article{CTT100736023,
  author = {Hao-Chun Tang and Chun-Yi Chen and Masaharu Yoshiba and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {High-Strength Electroplated Au-Cu Alloys as Micro-components in MEMS Devices},
  journal = {Journal of The Electrochemical Society},
  year = 2017,
}

@article{CTT100734738,
  author = {Sari Yanagida and Tso-Fu Mark Chang and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Tensile Tests of Micro-Specimens Made of Electroplated Gold},
  journal = {Microelectronics Engineering},
  year = 2017,
}

@article{CTT100721712,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida},
  title = {Evaluation and Modeling of Adhesion Layer in Shock-Protection Structure for MEMS Accelerometer},
  journal = {Microelectronics Reliability},
  year = 2016,
}

@article{CTT100733964,
  author = {Toshifumi Konishi and Daisuke Yamane and Teruaki Safu and Masato Sone and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Damping Constant Model for Proof-Mass Structure Design of MEMS Inertial Sensor by Multi-Layer Metal Technology},
  journal = {IEEE Proceeding},
  year = 2016,
}

@article{CTT100716349,
  author = {Hao-chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Enhancement of Mechanical Strength in Au Films Electroplated with Supercritical Carbon Dioxide},
  journal = {Electrochemistry Communications},
  year = 2016,
}

@article{CTT100722024,
  author = {Kazuya Masu and Daisuke Yamane and Katsuyuki Machida and Masato Sone and Yoshihiro Miyake},
  title = {Development of High Sensitivity CMOS-MEMS Inertia Sensor and its Application to Early-Stage Diagnosis of Parkinson's Disease},
  journal = {the 46th European Solid-State Device Research Conference (ESSDERC)},
  year = 2016,
}

@article{CTT100704360,
  author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Brittle Fracture of Electrodeposited Gold Observed by Micro-Compression},
  journal = {Materials Transactions},
  year = 2016,
}

@article{CTT100708352,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A 1-mG MEMS Sensor},
  journal = {ECS Transactions},
  year = 2016,
}

@article{CTT100703226,
  author = {Chun-Yi Chen and Masaharu Yoshiba and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Pulse Electroplating of Ultra-Fine Grained Au Films with High Compressive Strength},
  journal = {Electrochemistry Communications},
  year = 2016,
}

@article{CTT100702128,
  author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Structure Stability of High Aspect Ratio Ti/Au Two-Layer Cantilevers for Applications in MEMS Accelerometers},
  journal = {Microelectronics Engineering},
  year = 2016,
}

@article{CTT100692402,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A 0.1G-to-20G Integrated MEMS Inertial Sensor},
  journal = {Japanese Journal of Applied Physics},
  year = 2015,
}

@article{CTT100690964,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Sub-1G MEMS Sensor},
  journal = {ECS Transactions},
  year = 2015,
}

@article{CTT100686951,
  author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Dual-Axis MEMS Capacitive Inertial Sensor with High-Density Proof Mass},
  journal = {Microsystem Technologies},
  year = 2015,
}

@article{CTT100685143,
  author = {山根 大輔 and 小西 敏文 and 松島 隆明 and 亀井 将太 and 益 一哉 and 町田 克之},
  title = {高感度静電容量型センサにおけるBrownian Noise評価手法},
  journal = {電気学会論文誌E（センサ・マイクロマシン部門誌）},
  year = 2015,
}

@article{CTT100674611,
  author = {Katsuyuki Machida and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Kazuya Masu},
  title = {Integrated CMOS-MEMS Technology and Its Applications},
  journal = {ECS Transactions},
  year = 2014,
}

@article{CTT100669021,
  author = {Motohiro Takayasu and Atsushi Shirane and Sangyeop Lee and Daisuke Yamane and Hiroyuki Ito and Xiaoyu Mi and Hiroaki Inoue and Fumihiko Nakazawa and Satoshi Ueda and Noboru Ishihara and Kazuya Masu},
  title = {An 8 channel, 20 V output CMOS switching driver with 3.3 V power supply using triple-well biasing techniques for integrated MEMS device control},
  journal = {Japanese Journal of Applied Physics},
  year = 2014,
}

@article{CTT100669022,
  author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Kazuya Masu and Katsuyuki Machida and Hiroshi Toshiyoshi},
  title = {A capacitive CMOS-MEMS sensor designed by multi-physics simulation for integrated CMOS-MEMS technology},
  journal = {Japanese Journal of Applied Physics},
  year = 2014,
}

@article{CTT100666863,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Katsuyuki Machida and Hiroshi Toshiyoshi and Kazuya Masu},
  title = {Design of sub-1g microelectromechanical systems accelerometers},
  journal = {Applied Physics Letters},
  year = 2014,
}

@article{CTT100721714,
  author = {Daisuke Yamane and Yi-Chien Wu and Ting-Hsiang Wu and Hiroshi Toshiyoshi and Michael Teitell and Pei-Yu Chiou},
  title = {Electrical impedance monitoring of photothermal porated mammalian cells},
  journal = {Journal of Laboratory Automation},
  year = 2014,
}

@article{CTT100684017,
  author = {山根 大輔 and サン ウィンストン and 川崎 繁男 and 藤田 博之 and 年吉 洋},
  title = {水平駆動型MEMS導波路の静電駆動時における高周波特性の評価手法},
  journal = {電子情報通信学会論文誌C(エレクトロニクスソサエティ)},
  year = 2014,
}

@article{CTT100666864,
  author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Kazuya Masu and Katsuyuki Machida and Hiroshi Toshiyoshi},
  title = {An arrayed accelerometer device of a wide range of detection for integrated CMOS-MEMS technology},
  journal = {Japanese Journal of Applied Physics},
  year = 2014,
}

@article{CTT100658034,
  author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Gou Motohashi and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Novel Sensor Structure and its Evaluation for Integratd Complementary Metal Oxide Semiconductor Microelectromechanical Systems Accelerometer},
  journal = {Japanese Journal of Applied Physics},
  year = 2013,
}

@article{CTT100684018,
  author = {山根 大輔 and サン ウィンストン and 川崎 繁男 and 藤田 博之 and 年吉 洋},
  title = {エア分離CPWによるシリコン導波路の基礎検討とKu帯RF-MEMSスイッチへの応用},
  journal = {電子情報通信学会論文誌C（エレクトロニクスソサエティ)},
  year = 2012,
}

@article{CTT100645028,
  author = {山根大輔 and サン  ウィンストン and 川崎 繁男 and 藤田 博之 and 年吉 洋},
  title = {エア分離CPWによるシリコン導波路の基礎検討とKu帯RF-MEMSスイッチへの応用},
  journal = {電子情報通信学会論文誌C（エレクトロニクスソサエティ）},
  year = 2012,
}

@article{CTT100684019,
  author = {Daisuke Yamane and Winston Sun and Harunobu Seita and Shigeo Kawasaki and Hiroyuki Fujita and Hiroshi Toshiyoshi},
  title = {A Ku-band Dual-SPDT RF-MEMS Switch by Double-Side SOI Bulk Micromachining},
  journal = {IEEE Journal of Microelectromechanical Systems},
  year = 2011,
}

@article{CTT100684020,
  author = {山根 大輔 and 李 宥憲 and 藤田 博之 and 年吉 洋},
  title = {メッキ金の厚膜マスクによるRF-MEMSコプレーナ導波路の製作},
  journal = {電気学会論文誌E（センサ・マイクロマシン部門誌）},
  year = 2011,
}

@article{CTT100684021,
  author = {Daisuke Yamane and Winston Sun and Shigeo Kawasaki and Hiroyuki Fujita and Hiroshi Toshiyoshi},
  title = {A 12GHz bulk-micromachined RF-MEMS phase shifter by SOI layer-separation design},
  journal = {IEICE Electronics Express},
  year = 2010,
}

@article{CTT100684022,
  author = {Daisuke Yamane and Winston Sun and Harunobu Seita and Shigeo Kawasaki and Hiroyuki Fujita and Hiroshi Toshiyoshi},
  title = {An SOI bulk-micromachined dual SPDT RF-MEMS switch by layer-wise separation design of waveguide and switching mechanism},
  journal = {IEICE Electronics Express},
  year = 2010,
}

@inproceedings{CTT100905984,
  author = {Tso-Fu Mark Chang and Tomoyuki Kurioka and Chun-Yi Chen and Xun Luo and Daisuke Yamane and Hwai En Lin and Masato Sone},
  title = {Design of Electrodeposited Materials for MEMS Sensors},
  booktitle = {},
  year = 2023,
}

@inproceedings{CTT100903009,
  author = {Yiming Jiang and Tomoyuki Kurioka and Chun-Yi Chen and Xun Luo and Daisuke Yamane and Masato Sone and Tso-Fu Mark Chang},
  title = {Electrodeposition of Nickel-Cobalt Alloys with additives and their Mechanical Properties},
  booktitle = {},
  year = 2023,
}

@inproceedings{CTT100882167,
  author = {Yiming Jiang and Chun-Yi Chen and Xun Luo and Daisuke Yamane and Masanori Mizoguchi and Osamu Kudo and Ryu Maeda and Masato Sone and Tso-Fu Mark Chang},
  title = {Micro-compression and micro-hardness of electrodeposited Nickel-Cobalt alloys},
  booktitle = {},
  year = 2022,
}

@inproceedings{CTT100877882,
  author = {Yiming Jiang and Chun-Yi Chen and Tomoyuki Kurioka and Daisuke Yamane and Masanori Mizoguchi and Osamu Kudo and Ryu Maeda and Masato Sone and Tso-Fu Mark Chang},
  title = {Ultra-High Mechanical Strength and Thermal Stability of Electrodeposited Ni-B Alloys toward MEMS Micro-Components},
  booktitle = {},
  year = 2022,
}

@inproceedings{CTT100881483,
  author = {Masato Sone and Hitomi Watanabe and Kyotaro Nitta and Hideaki Nakajima and Tomoyuki Kurioka and Chun-Yi Chen and Parthojit Chakraborty and Daisuke Yamane and Hiroyuki Ito and Katsuyuki. Machida and Yoshihiro Miyake and Tso-Fu Mark Chang},
  title = {A Non-Distructive Resoneance Frequency Method to determine Effective young's Modulus of 3-Dimentional Multilayered Ti/Au Micro-cantilevers Toward Highly Sensitive MEMS Accerelometer},
  booktitle = {},
  year = 2022,
}

@inproceedings{CTT100881437,
  author = {Yiming Jiang and Chun-Yi Chen and Tomoyuki Kurioka and Daisuke Yamane and Masanori Mizoguchi and Osamu Kudo and Ryu Maeda and Masato Sone and Tso-Fu Mark Chang},
  title = {Micro-scale Mechanical Characterustic of Electrodeposited Ni-B Alloys Components Toward Design of MEMS Devices},
  booktitle = {},
  year = 2022,
}

@inproceedings{CTT100881436,
  author = {Tomoyuki Kurioka and Koichiro Tachibana and Kyotaro Nitta and Chun-Yi Chen and Tso-Fu Mark Chang and Parthojit Chakraborty and Daisuke Yamane and Hiroyuki Ito and Katsuyuki. Machida and Yoshihiro Miyake and Masato Sone},
  title = {Evaluation of Streucture Stability of  Au-Based Micro Cantilevers Evidenced by Long-Term Vibration Tests},
  booktitle = {},
  year = 2022,
}

@inproceedings{CTT100865535,
  author = {Yiming Jiang and Chun-Yi Chen and Xun Luo and Daisuke Yamane and Masato Sone and Tso-Fu Mark Chang},
  title = {High Strength Electrodeposited Ni-B alloys and Their Thermal Stability},
  booktitle = {},
  year = 2022,
}

@inproceedings{CTT100865530,
  author = {⼤村 太郎 and Chun-Yi Chen and Tso-Fu Chang and ⼭根 ⼤輔 and 伊藤浩之 and 町⽥克之 and 三宅美博 and 曽根正⼈},
  title = {⾦めっき材料における機械的特性の電流密度依存性},
  booktitle = {},
  year = 2022,
}

@inproceedings{CTT100862644,
  author = {Yiming Jiang and Chun-Yi Chen and Tso-Fu Mark Chang and Xun Luo and Daisuke Yamane and Masanori Mizoguchi and Osamu Kudo and Ryu Maeda and Masato Sone},
  title = {Electrodeposition of Ni-Co Alloys from Sulfamate Bath and the Micro-Mechanical Property},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100862629,
  author = {Yu-An Chien and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Electro-co-deposition of Au-TiO2 Composites with Improved Mechanical Property toward Miniaturized Electronics},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100862626,
  author = {Yiming Jiang and Chun-Yi Chen and Xun Luo and Daisuke Yamane and Masanori Mizoguchi and Osamu Kudo and Ryu Maeda and Masato Sone and Tso-Fu Mark Chang},
  title = {Electrodeposition of Nickel-Cobalt Alloy Films and their Micro-Mechanical Property},
  booktitle = {TACT2021 International Thin Films Conference},
  year = 2021,
}

@inproceedings{CTT100862622,
  author = {Taro Omura and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Effect of Current Density on Micro-Mechanical Characteristic of Electrodeposited Gold Evaluated from Cyanide Bath},
  booktitle = {TACT2021 International Thin Films Conference},
  year = 2021,
}

@inproceedings{CTT100860772,
  author = {Kazuya Fujita and Kosuke Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Mechanical Property of Gold Micro-Cantilevers for Application in Microelectronics and the Sample Geometry Effect},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100861440,
  author = {藤田 一矢 and 鈴木 康介 and 陳 君怡 and Chang Tso-Fu Mark and 山根 大輔 and 伊藤 浩之 and 町田 克之 and 益 一哉 and 曽根 正人},
  title = {金単結晶微小カンチレバーの機械的特性とサンプル形状効果},
  booktitle = {第82回応用物理学会秋季学術講演会},
  year = 2021,
}

@inproceedings{CTT100860788,
  author = {Takumi Akiyama and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Micro-Mechanical Property Evaluation of Gold-Nickel Alloys toward Design of MEMS Components},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100860787,
  author = {Taro Omura and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Effect of Current Density on Mechanical Properties of Electrodeposited Gold Evaluated by Micro-Compression Test},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100860771,
  author = {Yiming Jiang and Chun-Yi Chen and Tso-Fu Mark Chang and Xun Luo and Daisuke Yamane and Masanori Mizoguchi and Osamu Kudo and Ryu Maeda and Masato Sone},
  title = {Micro-Mechanical Characterization of Electrodeposited Ni-Co Alloys toward Design of MEMS Components},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100845540,
  author = {曽根 正人 and Tso-Fu Mark Chang and 名越貴志 and 町田 克之 and 山根 大輔 and 伊藤浩之 and 益 一哉},
  title = {医用MEMSデバイス応用に向けた 微小貴金属めっき材料の機械的特性評価},
  booktitle = {日本金属学会 2021年春季講演大会},
  year = 2021,
}

@inproceedings{CTT100830036,
  author = {Kosuke Suzuki and Yu-An Chien and Ken Hashigata and Keisuke Asano and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Effects of Sample Geometry and Grain Size on Mechanical Property of Electrodeposited Gold Evaluated by Micro-Bending Test},
  booktitle = {PRiME 2020},
  year = 2020,
}

@inproceedings{CTT100842064,
  author = {Takashi Ichikawa and Ken Atsumi and Tatsuya Koga and Daisuke Yamane and Shin-ichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A 100-nG/√Hz-Level Single Au Proof-Mass 3-Axis MEMS Accelerometer with Pillar-Shaped electrodes},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100816077,
  author = {市川 崇志 and 渥美 賢 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {ピラー型電極による単一Au錘3軸MEMS加速度センサの感度均一化の検討},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100816075,
  author = {Tatsuya Koga and Takashi Ichikawa and Daisuke Yamane and Shinichi Iida and Noboru Ishihara and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu},
  title = {A Gold Proof-Mass Differential MEMS Accelerometer for Micro-G Level Sensing},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100815902,
  author = {曽根 正人 and Hao-Chun Tang and Tso-Fu Mark Chang and 山根 大輔 and 町田 克之 and 伊藤 浩之 and 益 一哉},
  title = {貴金属めっき材料の結晶組織制御とその医用MEMS デバイスへの応用},
  booktitle = {日本金属学会 第１６６回講演大会},
  year = 2020,
}

@inproceedings{CTT100816076,
  author = {渥美 賢 and 古賀 達也 and 市川 崇志 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {ピラー型電極を用いた単一錘3軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100819252,
  author = {Yu-an Chien and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Electrodeposited High Strength Au-TiO2 Nano Composite Film for MEMS Devices},
  booktitle = {第67回応用物理学会春季学術講演会},
  year = 2020,
}

@inproceedings{CTT100819248,
  author = {入谷 友樹 and 新田京太朗 and Yu-An Chien and Tso-Fu Mark Chang and 山根 大輔 and 伊藤 浩之 and 町田 克之 and 益 一哉 and 曽根 正人},
  title = {Au-Pd合金膜の電気メッキとその機械的特性},
  booktitle = {第67回応用物理学会春季学術講演会},
  year = 2020,
}

@inproceedings{CTT100806470,
  author = {Yu-An Chien and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Micro-Mechanical Properties of Electrodeposited Au-TiO2 Composite Film},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100810761,
  author = {山根大輔},
  title = {IoT応用に向けた環境振動ＭＥＭＳエナジーハーベスタ技術},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100806469,
  author = {Kyotaro Nitta and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Shinichi Iida and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Electrodepostion of Au-Cu Alloy  Micro-Cantilevers and the Young’s modulus by Resonance Frequency Method},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100807193,
  author = {Yukiya Tohyama and Hiroaki Honma and Noboru Ishihara and Hidehiko Sekiya and Hiroshi Toshiyoshi and Daisuke Yamane},
  title = {Energy Harvesting from Non-Stational Environmental Vibrations using a Voltage-Boost Rectifier Circuit},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100808563,
  author = {山根大輔},
  title = {振動から電気を生み出す環境発電について},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100806472,
  author = {Tomoki Iriya and Kyotaro Nitta and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Electroplating of Au-Pd Alloy Films and the Mechanical Properties},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100811731,
  author = {伊藤浩之 and 古賀達也 and 市川崇志 and 山根大輔 and 石原昇 and 三宅美博 and 町田克之 and 益一哉},
  title = {兆し計測のための高感度MEMS加速度センサ技術},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100810815,
  author = {Atsushi Fujii and Kento Hisa and Musashi Kakugawa and Daisuke Yamane and Takayuki Shibata and Moeto Nagai},
  title = {High-throughput Screening Device for Genes Related to Algal Phototaxis: Parallel Micro-Liquid Handling},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100810688,
  author = {Cheng-Yao Lo and Daisuke Yamane},
  title = {High-Sensitivity Capacitive Tactile Sensor with Vertically Stacked Hollow Structures},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100809253,
  author = {市川 崇志 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 石原 昇 and 伊藤 浩之 and Chang Tso-Fu Mark and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {積層メタル技術で作製したMEMS加速度センサの衝撃特性評価},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100809252,
  author = {古賀 達也 and 市川 崇志 and 田中 直登 and 緒方 大樹 and 大良 宏樹 and 山根 大輔 and 石原 昇 and 伊藤 浩之 and 曽根 正人 and 町田 克之 and 三宅 美博 and 益 一哉},
  title = {微弱筋音計測に向けた高分解能MEMS慣性センサモジュールの検討},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100809254,
  author = {市川 崇志 and 乙部 翔太 and 渥美 賢 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {3Dピラー型Au錘MEMS加速度センサ},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100809256,
  author = {Yu-Hao Jen and Chia-Tso Mo and Kean Aw and Daisuke Yamane and Cheng-Yao Lo},
  title = {Extensive Sensitivity Enhancement in Stacked Capacitive Tactile Sensors},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100802634,
  author = {Kosuke Suzuki and Ken Hashigata and Keisuke Asano and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Sample Geometry Effect on Mechanical Property of Electrodeposited Gold Evaluated by Micro-Bending Test},
  booktitle = {45th International Conference on Micro & Nano Engineering (MNE2019)},
  year = 2019,
}

@inproceedings{CTT100807194,
  author = {市川 崇志 and 乙部 翔太 and 渥美 賢 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 曽根 正人 and 益 一哉},
  title = {Au錘3軸MEMS加速度センサのためのSCD電極の検討 (2)},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100804032,
  author = {Tso-Fu Mark Chang and Yu-An Chien and Hao-Chun Tang and Chun-Yi Chen and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Strengthening of Gold-Based Micro-Structures by Alloying and Incorporation of Oxide Nanoparticles},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100803939,
  author = {Kyotaro Nitta and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Shinichi Iida and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Au-Cu alloy/Ti Layered micro-cantilevers toward MEMS Movable Components},
  booktitle = {The 1st Tokyo Tech-NCTU Joint Symposium on Advanced Materials},
  year = 2019,
}

@inproceedings{CTT100803938,
  author = {Hitomi Watanabe and Chun-Yi Chen and Tso-Fu Mark Chang and Shinichi Iida and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Temperature Dependence Structure Stability of Ti/Au Layered Micro-Cantilevers},
  booktitle = {The 1st Tokyo Tech-NCTU Joint Symposium on Advanced Materials},
  year = 2019,
}

@inproceedings{CTT100802676,
  author = {Hitomi Watanabe and Chun-Yi Chen and Tso-Fu Mark Chang and Shinichi Iida and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Effects of Fixed End Structure on Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever toward MEMS Applications},
  booktitle = {45th International Conference on Micro & Nano Engineering (MNE2019)},
  year = 2019,
}

@inproceedings{CTT100802635,
  author = {Yu-An Chien and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Electrodeposition of TiO2 Nanoparticle Reinforced High Strength Au Film for MEMS Applications},
  booktitle = {45th International Conference on Micro & Nano Engineering (MNE2019)},
  year = 2019,
}

@inproceedings{CTT100802632,
  author = {Kyotaro Nitta and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Shinichi Iida and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Fabrication and Evaluation of Au-Cu Alloy 3D Structures toward MEMS Movable Components},
  booktitle = {45th International Conference on Micro & Nano Engineering (MNE2019)},
  year = 2019,
}

@inproceedings{CTT100803806,
  author = {山根大輔},
  title = {超微弱振動から発電!:エネルギーハーベスタ用の低閾値電子回路技術},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100802558,
  author = {曽根正人 and タン ハオチュン and Tso-Fu Mark Chang and 陳君怡 and 山根大輔 and 町田克之 and 益一哉},
  title = {超高感度加速度センサ実現のための高強度金合金材料の創製とその機械的特性評価},
  booktitle = {電気鍍金研究会},
  year = 2019,
}

@inproceedings{CTT100800103,
  author = {市川 崇志 and 新島 宏文 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {3軸Au錘MEMS加速度センサにおける検出電極構造の検討},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100800105,
  author = {Yukiya Tohyama and Hiroaki Honma and Noboru Ishihara and Hiroshi Toshiyoshi and Daisuke Yamane},
  title = {Bandwidth Enhancement of Vibrational Energy Harvesters by a Voltage-Boost Rectifier Circuit},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100794652,
  author = {Masato Sone and Hao-Chun Tang and Masaharu Yoshiba and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu},
  title = {Mechanical properties of electrodeposited gold-copper alloy by micro-compression test},
  booktitle = {The 2nd International Conference on Material Strength and Applied Mechanics},
  year = 2019,
}

@inproceedings{CTT100791879,
  author = {Kosuke Suzuki and Ken Hashigata and Keisuke Asano and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Mechanical properties of gold micro-cantilevers with different thickness evaluated by micro-bending test},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100791878,
  author = {Hitomi Watanabe and Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {High Structure Stability Ti/Au Multiple Layer Micro-Cantilever and the Temperature Dependence},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100795921,
  author = {Daisuke Yamane},
  title = {Energy Harvesters for Autonomous Wireless Sensors in True IoT Society},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100790673,
  author = {渥美 賢 and 乙部 翔太 and 古賀 達也 and 市川 崇志 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {積層メタル技術によるピラー型容量検出電極の検討},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100793103,
  author = {山根大輔},
  title = {次世代ＩｏＴ社会に向けたＭＥＭＳ振動発電素子},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100790679,
  author = {新田 京太朗 and Tang Haochun and Chen Chun-Yi and Chang Tso-Fu Mark and 山根 大輔 and 小西 敏文 and 町田 克之 and 伊藤 浩之 and 益 一哉 and 曽根 正人},
  title = {電気めっき法によるAu-Cu合金微小カンチレバーの作製},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100790678,
  author = {鈴木 康介 and Ken Hashigata and 浅野 啓介 and Chun-Yi Chen and 名越 貴志 and Tso-Fu Mark Chang and 山根 大輔 and 小西 敏文 and 町田 克之 and 伊藤 浩之 and 益 一哉 and 曽根 正人},
  title = {微小曲げ試験による金材料の機械的強度のサンプル形状効果},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100790677,
  author = {乙部 翔太 and 渥美 賢 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {Au錘3軸MEMS加速度センサのためのSCD電極の検討},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100790675,
  author = {渡邊 瞳 and 鈴木 拓真 and Chen Chun-Yi and Chang Tso-Fu Mark and 山根 大輔 and 小西 敏文 and 町田 克之 and 伊藤 浩之 and 益 一哉 and 曽根 正人},
  title = {Ti/Au微小カンチレバーの温度依存性への積層構造の影響},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100790674,
  author = {市川 崇志 and 新島 宏文 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {3軸Au錘MEMS加速度センサにおける平行平板型電極の検討},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100782446,
  author = {Daisuke Yamane and Shota Otobe and Ken Atsumi and Tatsuya Koga and Toshifumi Konishi and Teruaki Safu and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A 3-D PARALLEL-PLATE MEMS ACCELEROMETER WITH A GOLD PROOF MASS},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100782445,
  author = {Daisuke Yamane and Hiroaki Honma and Hiroshi Toshiyoshi},
  title = {A MEMS VIBRATORY ENERGY HARVESTER CHARGED BY AN OFF-CHIP ELECTRET},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100781337,
  author = {Yukiya TOHYAMA and Hiroaki HONMA and Noboru Ishihara and Hidehiko SEKIYA and Hiroshi Toshiyoshi and Daisuke Yamane},
  title = {A Voltage-Boost Rectifier Circuit for Energy Harvesting from Environmental Vibrations},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100810691,
  author = {Musashi Kakugawa and Kento Hisa and Daisuke Yamane and Takayuki Shibata and Moeto Nagai},
  title = {Parallel Manipulation of Small-volume Solutions for Analyzing Phototaxis and Gene Expression of Algae},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100810690,
  author = {Cheng-Yao Lo and Daisuke Yamane},
  title = {Vibration Characteristics of a High-Sensitivity Flexible Capacitive Tactile Sensor with Reduced Structural Rigidity},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100779594,
  author = {Daisuke Yamane and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu},
  title = {Sub-1mG MEMS Inertial Sensor for Biomedical Applications},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100777398,
  author = {Shota Otobe and Tatsuya Koga and Ken Atsumi and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Shin-ichi Iida and Hiroyuki. Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Sub-1mG Tri-Axis MEMS Accelerometer with Multiple Segmented Capacitance Detection Electrodes},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100776808,
  author = {Daisuke Yamane},
  title = {Sub-mG MEMS Inertial Sensor},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100786703,
  author = {Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Solid Solution Strengthening of Gold Based Materials  for MEMS Applications},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100775380,
  author = {乙部 翔太 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {シングルAu錘と分割電極容量検出(SCD)方式を用いた3軸全差動MEMS加速度センサ},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100772111,
  author = {Ken Hashigata and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone.},
  title = {Electrodeposition of Gold on Titanium and Bending Test of Au-Ti Bi-Layered Micro-Cantilever},
  booktitle = {IUMRS-ICA 2018},
  year = 2018,
}

@inproceedings{CTT100772110,
  author = {Keisuke Asano and Hao-Chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone.},
  title = {Mechanical Characterization of Constant Current Electroplated Au-Cu Alloy Micro-Cantilever},
  booktitle = {IUMRS-ICA 2018},
  year = 2018,
}

@inproceedings{CTT100775377,
  author = {古賀 達也 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {1軸MEMS加速度センサのAu錘厚膜化による高性能化の検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100775374,
  author = {市川 崇志 and 新島 宏文 and 古賀 達也 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {Au単一錘平行平板型3軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100772124,
  author = {Masato Sone and Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Hiroyuki Ito and Kazuya Masu},
  title = {EFFECTIVE YOUNG’S MODULUS EVALUATION OF TI/AU MICRO STRUCTURES FOR MEMS ACCELEROMETER},
  booktitle = {8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS"},
  year = 2018,
}

@inproceedings{CTT100769739,
  author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Young’s Modulus of Ti/Au Micro-Cantilever by Resonance Frequency Method toward Au-Based MEMS Device},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100771791,
  author = {中島 英亮 and Tso-Fu Mark Chang and Chun-Yi Chen and 山根 大輔 and 小西 敏文 and 町田 克之 and 年吉 洋 and 益 一哉 and 曽根 正人},
  title = {MEMS加速度センサに向けた金めっき微小カンチレバーのヤング率 に関する検討},
  booktitle = {第79回応用物理学会秋季学術講演会},
  year = 2018,
}

@inproceedings{CTT100769741,
  author = {Takahiro Yamamoto and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Mechanical Property and Thermal Stability of Electrodeposited Au-Cu Alloys  for Reliability of MEMS Devices},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769735,
  author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Kyotaro Nitta and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Reliability Characteristics of Ti/Au Micro-Cantilever by Long-Term Vibration Test},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769736,
  author = {Kyotaro Nitta and Koichiro Tachibana and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Cu-Alloying Effect on Structure Stability of Au Micro-Cantilever},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769737,
  author = {Keisuke Asano and Hao-chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Electrodeposited Au-Cu Alloy with High Yield Stress Evaluated by Micro-Bending Test},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769738,
  author = {Ken Hashigata and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Mechanical Strength Enhancement of Ti/Au Layered Structure Evaluated by Micro-Bending Test},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100772182,
  author = {Tso-Fu Mark Chang and Hao-chun Tang and Kyotaro Nitta and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Electrodeposition of High Strength Au-Cu Alloys for MEMS Device},
  booktitle = {2018 International Conference on Solid State Devices and Materials (SSDM2018)},
  year = 2018,
}

@inproceedings{CTT100769742,
  author = {Hitomi Watanabe and Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Effects of Ti/Au Layered Structure on Temperature Dependence of Micro-Cantilever Structure Stability},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769740,
  author = {Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshib and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {High Strength Electrodeposited Gold-Copper Alloys for MEMS Devices},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100771219,
  author = {Daisuke Yamane and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu},
  title = {High-Resolution MEMS Accelerometer by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100771220,
  author = {Kazuya Masu and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake},
  title = {CMOS-MEMS accelerometer with gold proof-mass and its application in diagnosis of Parkinsons Disease},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100769399,
  author = {Shota Otobe and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {Tri-Axis Fully-Differential MEMS Accelerometer with Segmented Capacitance Detection},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100768649,
  author = {Masato Sone and Hao-Chun Tang and Chun-yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu},
  title = {Characteristics of Electroplated Gold Material with Multilayer Metal Technology for CMOS-MEMS Accelerometer},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100768387,
  author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Kyoutarou Nitta and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Structure stability of Ti/Au micro-cantolever evaluated by long-term vibration test},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100768386,
  author = {Chun-Yi Chen and Hao-Chun Tang and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Ultra-high Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests for MEMS Devices},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100768308,
  author = {HIdeaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and HIroshi Toshiyoshi and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {A Study on Effective Young’s Modulus of Micro-Cantilevers Fabricated by Au Electroplating},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100768307,
  author = {Kyotaro Nitta and Koichiro Tachibana and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Reliability Evaluation of Au-Cu Microcantilever by Long-Term Vibration Test toward MEMS Components},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100760940,
  author = {Ken Hashigata and Haochun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {The effect of acid pre-treatment on electroplating of gold on titanium substrate},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100758671,
  author = {Kyoutarou Nitta and Koichiro Tachibana and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Structure Stability of Electrodeposited Au-Cu Alloy Micro-Cantilever Evaluated By Long-Term Vibration Test for Applications As Movable Components in MEMS Devices},
  booktitle = {233rd ECS Meeting},
  year = 2018,
}

@inproceedings{CTT100772038,
  author = {伊藤浩之 and 山根大輔 and 小西敏文 and 道正志郎 and 石原昇 and 町田克之 and 曽根正人 and 三宅美博 and 益一哉},
  title = {MEMS加速度センサと生体計測への応用},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100768346,
  author = {Daisuke Yamane},
  title = {High-Sensitivity MEMS Inertial Sensor for Medical Applications},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100758271,
  author = {Ken Hashigata and Hao-Chun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Electroplating of Gold on Titanium Substrate: Method to Deposit Defect-Free Film},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100758521,
  author = {Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Pulse Current Electrodeposition of Ultrahigh Strength of Nanocrystalline Au-Cu Alloys},
  booktitle = {22nd Topical Meeting of the International Society of Electrochemistry},
  year = 2018,
}

@inproceedings{CTT100760805,
  author = {新島 宏文 and 乙部 翔太 and 高安 基大 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 年吉 洋 and 町田 克之 and 益 一哉},
  title = {高感度MEMS加速度センサのBrownian Noise評価に関する検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100766637,
  author = {Ken Hashigata and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Enhanced Mechanical Strength of Ti-Au Bi-Layered Micro-Cantilever for MEMS Accelerometers},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760808,
  author = {古賀 達也 and 高安 基大 and 山根 大輔 and 伊藤 浩之 and 小西 敏文 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術で作製したMEMS慣性センサのモジュール化の検討(2)},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760803,
  author = {小西 敏文 and 山根 大輔 and 佐布 晃昭 and 陳 君怡 and Chang Tso-Fu Mark and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉 and 飯田 慎一},
  title = {積層メタル技術を用いたMEMS慣性センサの封止環境における温度依存性},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760802,
  author = {伊藤 浩之 and 山根 大輔 and 小西 敏文 and 道正 志郎 and 石原 昇 and 町田 克之 and 曽根 正人 and 三宅 美博 and 益 一哉},
  title = {集積化CMOS-MEMS技術による高感度慣性センサと応用システム},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760801,
  author = {新島 宏文 and 乙部 翔太 and 高安 基大 and 山根 大輔 and 伊藤 浩之 and 佐布 晃昭 and 小西 敏文 and 道正 志郎 and 飯田 慎一 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {単一Au錘3軸差動MEMS加速度センサの検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760797,
  author = {高安 基大 and 古賀 達也 and 辻 一平 and 伊藤 浩之 and 山根 大輔 and 道正 志郎 and 小西 敏文 and 飯田 慎一 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {傾斜を用いた1mG MEMS加速度センサの分解能評価の検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760620,
  author = {伊藤 浩之 and ?根 ?輔 and 小西敏文 and 道正 志郎 and ?原 昇 and 町? 克之 and 曽根 正? and 三宅 美博 and 益 ?哉},
  title = {集積化CMOS-MEMS技術による?感度慣性センサと応?システム},
  booktitle = {応用物理学会第65回春季講演会},
  year = 2018,
}

@inproceedings{CTT100758969,
  author = {TangHao-Chun and Chun-Yi Chen and Tso-Fu Mark Chang and ⼭根⼤輔 and 小西敏文 and 町⽥ 克之 and 益 ⼀哉 and 曽根 正⼈},
  title = {電解めっき法によるMEMS⽤⾦銅合⾦の作製及び機械的特性評価},
  booktitle = {応用物理学会第65回春季講演会},
  year = 2018,
}

@inproceedings{CTT100758968,
  author = {中島英亮 and Chun-Yi Chen and Tso-Fu Mark Chang and ⼭根⼤輔 and 小西敏文 and 町⽥ 克之 and 年吉洋 and 益 ⼀哉 and 曽根 正⼈},
  title = {電解めっき法によるTi/Au微⼩カンチレバーのヤング率評価},
  booktitle = {応用物理学会第65回春季講演会},
  year = 2018,
}

@inproceedings{CTT100758967,
  author = {新⽥ 京太朗 and 橘 航⼀朗 and TangHao-Chun and Chun-Yi Chen and Tso-Fu Mark Chang and ⼭根 ⼤輔 and 小西敏文 and 町⽥ 克之 and 益 ⼀哉 and 曽根 正⼈},
  title = {⻑期振動試験によるAu-Cu合⾦微⼩カンチレバーの構造安定性},
  booktitle = {応用物理学会第65回春季講演会},
  year = 2018,
}

@inproceedings{CTT100758966,
  author = {浅野 啓介 and TangHao-Chun and Chun-Yi Chen and 名越 貴志 and Tso-Fu Mark Chang and ⼭根⼤輔 and 小西敏文 and 町⽥ 克之 and 益 ⼀哉 and 曽根 正⼈},
  title = {電析制御による微⼩⾦カンチレバーの曲げ特性の改善},
  booktitle = {応用物理学会第65回春季講演会},
  year = 2018,
}

@inproceedings{CTT100751720,
  author = {Masato Sone and Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu},
  title = {Material Design of High Strength Electroplated Gold Alloy toward High-Sensitive MEMS Accelerometers},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751721,
  author = {Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Strategies of Mechanical Strengthening in Electroplated  Au Materials},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751723,
  author = {Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Temperature Structure Stability of Multi-Ti/Au-Layered Micro-Cantilever},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751726,
  author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Young’s Modulus Evaluation of Ti/Au Micro-Cantilevers by Au Electrodeposition},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751725,
  author = {Keisuke Asano and Haochun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Mechanical Strengthening of Gold Micro-Cantilever by Control of Electroplating Conditions},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751724,
  author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Long-Term Vibration Test and Structure Stability of Ti/Au Micro-Cantilever as MEMS Components},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100758124,
  author = {Moeto Nagai and Musashi Kakugawa and Daisuke Yamane and Kazuya Masu},
  title = {Vibration Testing of Microfluidic Devices for Cell Analysis: Toward a Chip in Everyday Life},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100758122,
  author = {Cheng-Yao Lo and Daisuke Yamane and Kazuya Masu},
  title = {Force Response and Vibration Characteristics of Flexible Capacitive Sensors},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100780789,
  author = {Toshifumi Konishi and Daisuke Yamane and Teruaki Safu and Chun Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu and Shinichi Iida},
  title = {Temperature Dependence on Package Sealing Ambient of MEMS Sensor Fabricated by Gold Electroplating},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755527,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Sub-1mG Inertial Sensors by Multi-layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100780791,
  author = {Hirofumi Niijima and Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Novel Tri-Axis MEMS Accelerometer with a Single Au Proof Mass and Fully Differential Sensing Electrodes},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751440,
  author = {Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Ultrahigh Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751439,
  author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Long-Term Vibration Testing of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751442,
  author = {Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751718,
  author = {Tso-Fu Mark Chang and Haochun Tang and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Micro-Mechanical Property Enhancement of Metals Electroplated in Electrolyte Containing Supercritical CO2},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755518,
  author = {折原 恒祐 and 高安 基大 and 道正 志郎 and 伊藤 浩之 and 山根 大輔 and 小西 敏文 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {発振型容量検出回路を用いたAu錘CMOS-MEMS加速度センサの検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755522,
  author = {山根 大輔 and 小西 敏文 and 佐布 晃昭 and 橘 航一朗 and 寺西 美波 and 陳 君怡 and Tso-Fu Mark Chang and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {積層メタルMEMS慣性センサの長期振動特性評価},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755521,
  author = {小西 敏文 and 山根 大輔 and 佐布 晃昭 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {積層メタル技術を用いたMEMS慣性センサの構造設計のための粘性定数モデルの検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755520,
  author = {辻 一平 and 高安 基大 and 伊藤 浩之 and 山根 大輔 and 道正 志郎 and 小西 敏文 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術を用いたMEMS加速度センサの傾斜計応用の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755519,
  author = {新島 宏文 and 高安 基大 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 年吉 洋 and 町田 克之 and 益 一哉},
  title = {静電容量型MEMSセンサにおけるブラウニアン・ノイズ評価手法の検討(2)},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755389,
  author = {古賀 達也 and 辻 一平 and 高安 基大 and 伊藤 浩之 and 山根 大輔 and 道正 志郎 and 小西 敏文 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術によるMEMS加速度センサの傾斜時感度特性の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755388,
  author = {乙部 翔太 and 高安 基大 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {3軸MEMS加速度センサにおける単一Au錘および電極分割方式の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755334,
  author = {高安 基大 and 道正 志郎 and 伊藤 浩之 and 山根 大輔 and 小西 敏文 and 町田 克之 and 石原 昇 and 益 一哉},
  title = {MEMS慣性センサ用弛張発振型容量検出回路},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100754658,
  author = {Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Utilization of supercritical carbon dioxide in the electrodeposition of Au films for MEMS application},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751717,
  author = {Ken Hashigata and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Defect-Free and Uniform Electroplating of Gold on Titanium Surface for Design of MEMS Components},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100752531,
  author = {辻 一平 and 高安 基大 and 伊藤 浩之 and 山根 大輔 and 道正 志郎 and 小西 敏文 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術を用いた高感度MEMS慣性センサの傾斜計応用の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100752532,
  author = {古賀 達也 and 辻 一平 and 高安 基大 and 伊藤 浩之 and 山根 大輔 and 道正 志郎 and 小西 敏文 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術によるMEMS慣性センサの傾斜時感度特性の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100752534,
  author = {山根 大輔 and 小西 敏文 and 佐布 晃昭 and 橘 航一朗 and 寺西 美波 and 陳 君怡 and Tso-Fu Mark Chang and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {金めっきで形成したMEMS加速度センサの長期振動特性に関する検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100753335,
  author = {Motohiro Takayasu and Shiro Dosho and Hiroyuki Ito and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu},
  title = {A capacitive sensor circuit based on relaxation oscillator for sub-1mG MEMS inertial sensors},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100753404,
  author = {Ippei Tsuji and Motohiro Takayasu and Hiroyuki Ito and Daisuke Yamane and Shiro Dosho and Toshifumi Konishi and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {Tilt Characteristics of a MEMS Accelerometer fabricated by Multi-layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100753438,
  author = {Shouta Otobe and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Tri-axis MEMS Accelerometer With a Gold Electroplated Single-proof-mass and Segmented Electrodes},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100745655,
  author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Mechanical Property Anisotropy of Pure Gold Evaluated by Micro-compression Test},
  booktitle = {MNE2017},
  year = 2017,
}

@inproceedings{CTT100745654,
  author = {Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Toshifumi Konishi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Structure Stability Enhancement of Gold Micro-Cantilever with a Constrained at Top and Bottom of the Fixed-End},
  booktitle = {MNE2017},
  year = 2017,
}

@inproceedings{CTT100745653,
  author = {Ken Hashigata and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Effects of Bi-Layered Au/Ti Structure on Mechanical Properties of Micro-Cantilever Evaluated by Micro-Bending Test Toward Applications in MEMS Devices},
  booktitle = {MNE2017},
  year = 2017,
}

@inproceedings{CTT100745651,
  author = {Keisuke Asano and Hao-Chun Tang and Chun-yi Chen and Takashi Nagoshi and Tso-fu Mark Chang and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Enahnced Bending Strength of Electrodeposited Pure Gold Canrilevers in Micro-Bending Test},
  booktitle = {MNE2017},
  year = 2017,
}

@inproceedings{CTT100751941,
  author = {高安 基大 and 道正 志郎 and 伊藤 浩之 and 山根 大輔 and 小西 敏文 and 町田 克之 and 石原 昇 and 益 一哉},
  title = {MEMS加速度センサ用高分解能容量検出回路},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100742158,
  author = {Chun-Yi Chen and Hao-Chun Tang and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Electrochemical Plating of Au-Cu Alloy Films for MEMS Sensor Applications},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100748741,
  author = {辻 一平 and 高安 基大 and 伊藤 浩之 and 山根 大輔 and 小西 敏文 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術を用いた高感度MEMS傾斜計の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100748739,
  author = {高安 基大 and 道正 志郎 and 伊藤 浩之 and 山根 大輔 and 小西 敏文 and 町田 克之 and 石原 昇 and 益 一哉},
  title = {MEMS加速度センサ用高分解能容量検出回路の評価},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100743817,
  author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {FEM Simulation on Structure Stability of Ti/Au Multi-Layered Cantilevers with Various Dimensions for Applications as Movable Structures in MEMS Devices},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100745680,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Koichiro Tachibana and Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {Long-Term Vibration Characteristics of MEMS Inertial Sensors by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100742055,
  author = {Hao-chun Tang and Chun-yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Micro-Mechanical Property Evaluation of Electroplated Au-Cu Alloys toward Applications in MEMS Accelerometers},
  booktitle = {SSI-21},
  year = 2017,
}

@inproceedings{CTT100744945,
  author = {曽根 正人 and Tso-Fu Mark Chang and Chun-yi Chen and 山根 大輔 and 小西 敏文 and 町田 克之 and 益 一哉},
  title = {非侵襲性高感度医用デバイスのための貴金属材料の作製とその材料評価},
  booktitle = {第63回 国立大学共同利用・共同研究拠点 知の拠点セミナー},
  year = 2017,
}

@inproceedings{CTT100742056,
  author = {Chun-Yi Chen and Hao-chun Tang and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Electroplated Au-based Materials with High Micro-mecchanical Properties as MEMS accelerometer Components},
  booktitle = {SSI-21},
  year = 2017,
}

@inproceedings{CTT100745676,
  author = {高安 基大 and 權田 惇晟 and 小西 敏文 and 山根 大輔 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {人体振動測定のためのMEMS慣性センサを用いたモジュールの検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100738774,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Masato Sone and Katsuyuki Machida and Yoshihiro Miyake and Kazuya Masu},
  title = {MEMS inertial sensors for biomedical applications},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100735592,
  author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices},
  booktitle = {IEEE-NEMS 2017},
  year = 2017,
}

@inproceedings{CTT100735375,
  author = {Chun-Yi Chen and Hao-Chun Tang and Masaharu Yoshiba and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Preparation and Characterization of Au-Cu Alloy Films for MEMS Accelerometer},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100735898,
  author = {佐布 晃昭 and 小西 敏文 and 山根 大輔 and 年吉 洋 and 曽根 正人 and 益 一哉 and 町田 克之},
  title = {積層メタル技術による3軸MEMS加速度センサのばね定数設計方法},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100737044,
  author = {權田 惇晟 and 高安 基大 and 山根 大輔 and 伊藤 浩之 and 小西 敏文 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {移動体制御による慣性センサ評価系の構築},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100735890,
  author = {中島 英亮 and Chang Tso-Fu Mark and 陳 君怡 and 小西 敏文 and 町田 克之 and 年吉 洋 and 山根 大輔 and 益 一哉 and 曽根 正人},
  title = {積層メタル技術によるTi/Auめっき構造体のヤング率評価（2）},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735889,
  author = {山根 大輔 and 小西 敏文 and 佐布 晃昭 and 中島 英亮 and 寺西 美波 and 陳 君怡 and Chang Tso-Fu Mark and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {積層メタル技術によるTi/Auめっき構造体のヤング率評価（１）},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735888,
  author = {橘 航一朗 and Chang Tso-Fu Mark and Chen Chun-Yi and 小西 敏文 and 町田 克之 and 年吉 洋 and 山根 大輔 and 益 一哉 and 曽根 正人},
  title = {積層メタル技術によるTi/Auマイクロカンチレバーの疲労特性の検討},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735887,
  author = {鈴木 拓真 and Chang Tso-Fu Mark and Chen Chun-Yi and 小西 敏文 and 町田 克之 and 年吉 洋 and 山根 大輔 and 益 一哉 and 曽根 正人},
  title = {積層メタル技術によるTi/Auマイクロカンチレバーの温度依存性のシミュレーションの検討},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735897,
  author = {小西敏文 and 山根 大輔 and 佐布 晃昭 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {積層メタル技術を用いたMEMS慣性センサにおける粘性定数の検討},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100737043,
  author = {高安 基大 and 權田 惇晟 and 山根 大輔 and 伊藤 浩之 and 小西 敏文 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術で作製したMEMS慣性センサのモジュール化の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100737688,
  author = {Daisuke Yamane and Kazuya Masu and Cheng-Yao Lo},
  title = {Development of a Highly-sensitive Flexible Tactile Sensor for Assistance Robots},
  booktitle = {平成28年度生体医歯工学共同研究拠点成果報告会},
  year = 2017,
}

@inproceedings{CTT100737042,
  author = {飯塚知希 and 山根 大輔 and 小西 敏文 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {振動型エネルギーハーベスティングデバイスのためのSPICE系統合設計の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100711207,
  author = {曽根正人 and Tso-Fu Mark Chang and Chun-yi Chen and 山根大輔 and 益一哉 and 町田克之},
  title = {微小電気機械システムのための超臨界流体を用いた金属皮膜形成技術 （招待講演）},
  booktitle = {第6回CSJ化学フェスタ},
  year = 2016,
}

@inproceedings{CTT100734205,
  author = {Daisuke Yamane and Kazuya Masu and Cheng-Yao Lo},
  title = {A Study on Flexible Tactile Sensor for Assistance Robots},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100734201,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hideaki Nakajima and Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Masato Sone and Hiroshi Toshiyoshi and Kazuya Masu},
  title = {Young’s modulus evaluation of electroplated Ti/Au structures for MEMS devices},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100733961,
  author = {佐布 晃昭 and 小西 敏文 and 山根大輔 and 年吉 洋 and 曽根 正人 and 益 一哉 and 町田 克之},
  title = {積層メタル技術によるMEMS加速度センサのばね定数設計方法},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100733960,
  author = {山根大輔 and 小西 敏文 and 佐布 晃昭 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {Sub-1mG検出へ向けた積層メタルMEMS慣性センサ},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100733959,
  author = {山根大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {差動型積層メタルMEMS加速度センサの検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100733958,
  author = {權田 惇晟 and 高安 基大 and 山根 大輔 and 小西 敏文 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術によるMEMS加速度センサを用いた慣性センサモジュールの検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100733957,
  author = {高安 基大 and 道正 志郎 and 伊藤 浩之 and 石原 昇 and 山根 大輔 and 小西 敏文 and 町田 克之 and 益 一哉},
  title = {RC発振器型高感度容量検出回路},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100723391,
  author = {浅野 啓介 and TangHao-Chun and Chang Tso-Fu Mark and Chen Chun-Yi and 山根大輔 and 町田克之 and 益一哉 and 曽根正人 and 名越貴志},
  title = {微小曲げ試験による金めっきで作製した微小カンチレバーの機械的特性評価},
  booktitle = {第３３回「センサ・マイクロマシンと応用システム」シンポジウム},
  year = 2016,
}

@inproceedings{CTT100723362,
  author = {柳田佐理 and Chang Tso-Fu Mark and Chen Chun-Yi and 山根大輔 and 町田克之 and 益一哉 and 曽根正人 and 名越貴志},
  title = {微小引張試験片を用いたMEMS用金めっき材料の機械的特性の評価},
  booktitle = {第３３回「センサ・マイクロマシンと応用システム」シンポジウム},
  year = 2016,
}

@inproceedings{CTT100723360,
  author = {葭葉将治 and Chang Tso-Fu Mark and Chen Chun-Yi and 山根大輔 and 町田克之 and 益一哉 and 曽根正人 and 名越貴志},
  title = {高感度MEMS加速度センサー用金電気めっきの変形挙動および強度の結晶方位依存性評価},
  booktitle = {第３３回「センサ・マイクロマシンと応用システム」シンポジウム},
  year = 2016,
}

@inproceedings{CTT100723356,
  author = {寺西美波 and Chang Tso-Fu Mark and Chen Chun-Yi and 山根大輔 and 益一哉 and 曽根正人 and 小西敏文 and 町田克之 and 年吉洋},
  title = {電解金めっき法により作製した金/チタン積層構造を有する微小カンチレバーの構造安定性の評価},
  booktitle = {第３３回「センサ・マイクロマシンと応用システム」シンポジウム},
  year = 2016,
}

@inproceedings{CTT100714942,
  author = {Chun-Yi Chen and Masaharu Yoshiba and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Fine Grained Au Films with Controllable Mechanical Strength by Pulse Plating},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100714886,
  author = {曽根 正人 and Chang Tso-Fu Mark and 陳 君怡 and 山根 大輔 and 益 一哉 and 町田 克之},
  title = {高感度MEMS加速度センサーのための金めっき材料の合成とその機械的特性評価 （招待講演）},
  booktitle = {日本学術振興会・第172委員会},
  year = 2016,
}

@inproceedings{CTT100733962,
  author = {小西 敏文 and 山根大輔 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {マルチフィジクスシミュレーションを用いたCMOS-MEMS慣性センサのノイズ解析手法},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100721709,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida},
  title = {A Spring Design for Tri-axis MEMS Accelerometer by Multi-layer Metal Technology},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100719966,
  author = {高安 基大 and 道正 志郎 and 伊藤 浩之 and 石原 昇 and 山根 大輔 and 益 一哉},
  title = {RC発振器型容量検出回路の高感度化の検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100716618,
  author = {Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {High Mechanical Strength in Gold Films Electroplated with Supercritical Carbon Dioxide for MEMS Applications},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100710914,
  author = {Sari Yanagida and Tso-Fu Mark Chang and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Mechanical Behaviour of Electroplated Gold Evaluated by Micro-Tensile Test for Application in MEMS Accelerometer},
  booktitle = {MNE2016, 42nd Micro& Nano Engineering},
  year = 2016,
}

@inproceedings{CTT100702798,
  author = {Chun-Yi Chen and Masaharu Yoshiba and Haochun Tang and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {High Strength Au film Fabricated by Advanced Electrochemical Technique in Supercritical CO2 Emulsified Electrolyte for MEMS Accelerometers},
  booktitle = {Separation Techniques 2016},
  year = 2016,
}

@inproceedings{CTT100721707,
  author = {Toshifumi Konishi and Daisuke Yamane and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Hiroshi Toshiyoshi and Kazuya Masu},
  title = {A Novel Noise Analysis Method with Multi-physics Simulation for Capacitive CMOS-MEMS Inertial Sensor System},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100716615,
  author = {佐布 晃昭 and 小西 敏文 and 山根大輔 and 年吉 洋 and 曽根 正人 and 益 一哉 and 町田 克之},
  title = {積層メタル技術によるMEMS加速度センサのばね定数設計方法（I）},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100716614,
  author = {山根大輔 and 小西 敏文 and 佐布 晃昭 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {Sub-1mG検出へ向けた積層メタルMEMS慣性センサ},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100716613,
  author = {山根大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {積層メタル差動型MEMS加速度センサの基礎検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100716612,
  author = {小西 敏文 and 山根大輔 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {CMOS-MEMS慣性センサにおける機械的ノイズの解析手法},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100710913,
  author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Controllable Mechanical Properties of Au Films by Pulse Electroplating for MEMS Accelerometer},
  booktitle = {MNE2016, 42nd Micro& Nano Engineering},
  year = 2016,
}

@inproceedings{CTT100714940,
  author = {Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Enhanced mechanical property of metallic films with supercritical carbon dioxide for micro-electrical-mechanical system accelerometer},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100710916,
  author = {Keisuke Asano and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Micro-Bending Tests of Pure Gold Cantilevers for Applications as Movable Components in MEMS Devices},
  booktitle = {MNE2016, 42nd Micro& Nano Engineering},
  year = 2016,
}

@inproceedings{CTT100710915,
  author = {Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Enhancement of Mechanical Properties in Au Films Electroplated with Supercritical Carbon Dioxide},
  booktitle = {MNE2016, 42nd Micro& Nano Engineering},
  year = 2016,
}

@inproceedings{CTT100702490,
  author = {Masato Sone and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu},
  title = {Electrodeposited Gold for Next Generation MEMS Accelerometer Toward Medical Applications (Invited Lecture)},
  booktitle = {Integrative Biology-2016},
  year = 2016,
}

@inproceedings{CTT100710653,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Novel MEMS Inertial Sensor With Out-of-plane Differential Sensing Structure By Multi-layer Metal Technology},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100708852,
  author = {高安 基大 and 權田 惇晟 and 山根 大輔 and 小西 敏文 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {小型高感度MEMS慣性センサモジュールの試作評価},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100708851,
  author = {Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Masakazu Sonobe and Takumi Kobayashi and Yamato Fukuta and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Kazuya Masu and Katsuyuki Machida},
  title = {A study of railroad vehicle control by inertial sensors},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100708351,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A 1-mG MEMS Sensor},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100702072,
  author = {Chun-Yi Chen and Masaharu Yoshiba and Hao-Chun Tang and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Pulse Electroplating of Au Films with Ultra High Strength},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100700917,
  author = {Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Preparation and Characterization of Gold Films by Electroplating with Supercritical Carbon Dioxide},
  booktitle = {ISE - Topical Meeting},
  year = 2016,
}

@inproceedings{CTT100700918,
  author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Mechanical Characteristics of Structure Stability with Ti/Au Micro-Cantilevers Formed by Au Electroplating},
  booktitle = {ISE - Topical Meeting},
  year = 2016,
}

@inproceedings{CTT100700919,
  author = {Chun-Yi Chen and Masaharu Yoshiba and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Pulse Electroplating of Ultra-Fine Grained Au Films with High Strength for Micro-Electrical-Mechanical System Devices},
  booktitle = {ISE - Topical Meeting},
  year = 2016,
}

@inproceedings{CTT100700921,
  author = {Yota Ishizuka and Sari Yanagida and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Electroplated Gold Materials with Enhanced Mechanical Strength by Multi-Layered Structure},
  booktitle = {ISE - Topical Meeting},
  year = 2016,
}

@inproceedings{CTT100700920,
  author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Study of Gold Electroplating by Constant and Pulse Current Method with Non-Cyanide Gold Sulfite Electrolyte},
  booktitle = {ISE - Topical Meeting},
  year = 2016,
}

@inproceedings{CTT100700961,
  author = {石塚 陽大 and 柳田 佐理 and TSO-FU MARK CHANG and 陳 君怡 and 町田 克之 and 山根 大輔 and 益 一哉 and 曽根 正人 and 益 一哉 and 曽根 正人},
  title = {マイクロ圧縮試験による金/チタン積層構造の機械的特性評価},
  booktitle = {第63回応用物理学会春季学術講演会},
  year = 2016,
}

@inproceedings{CTT100700959,
  author = {葭葉 将治 and 陳 君怡 and TSO-FU MARK CHANG and 山根 大輔 and 町田 克之 and 益 一哉 and 曽根 正人},
  title = {マイクロ圧縮試験によるMEMS用金電気めっきの機械的特性の評価},
  booktitle = {第63回応用物理学会春季学術講演会},
  year = 2016,
}

@inproceedings{CTT100700965,
  author = {浅野 啓介 and Tang Hao-Chun and 陳 君怡 and TSO-FU MARK CHANG and 山根 大輔 and 町田 克之 and 益 一哉 and 曽根 正人},
  title = {マイクロ曲げ試験による電析金薄膜の機械的特性評価},
  booktitle = {第63回応用物理学会春季学術講演会},
  year = 2016,
}

@inproceedings{CTT100702922,
  author = {リュウ アンキ and 小西 敏文 and 山根 大輔 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {CMOS低雑音オペアンプ設計法の検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100702918,
  author = {小西敏文 and 山根大輔 and 佐布晃昭 and 年吉 洋 and 曽根正人 and 益 一哉 and 町田克之},
  title = {積層メタル構造を用いた MEMS 加速度センサのストッパーのロバスト性検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100702917,
  author = {山根大輔 and 小西敏文 and 伊藤浩之 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {Sub-1G 検出へ向けた CMOS-MEMS 加速度センサの検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100702919,
  author = {山根大輔 and 小西敏文 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {Sub-1G検出へ向けた積層メタル3軸加速度センサの基礎検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100700964,
  author = {寺西 美波 and TSO-FU MARK CHANG and 陳 君怡 and 小西 敏文 and 町田 克之 and 年吉 洋 and 山根 大輔 and 益 一哉 and 曽根 正人},
  title = {電解金めっきで作製したTi/Au微小カンチレバーの構造安定性},
  booktitle = {第63回応用物理学会春季学術講演会},
  year = 2016,
}

@inproceedings{CTT100700962,
  author = {Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Application of Supercritical Carbon Dioxide in Electroplating of Gold Materials Used in MEMS Devices},
  booktitle = {第63回応用物理学会春季学術講演会},
  year = 2016,
}

@inproceedings{CTT100702467,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A MEMS Inertia Sensor with Brownian Noise of Below 50 nG/Hz^1/2 by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100804415,
  author = {Daisuke Yamane and Konishi, T. and Safu, T. and Toshiyoshi, H. and Masato Sone and Kazuya Masu and Katsuyuki Machida},
  title = {A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology},
  booktitle = {2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016},
  year = 2016,
}

@inproceedings{CTT100695299,
  author = {Daisuke Yamane and Toshifumi Konishi and Motohiro Takayasu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Sub-1G CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100697691,
  author = {Masaharu Yoshiba and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Micro-Mechanical Properties of Electrodeposited Gold Thin Films},
  booktitle = {TACT 2015 International Thin Films Conference},
  year = 2015,
}

@inproceedings{CTT100695306,
  author = {小西敏文 and 山根大輔 and 高安基大 and 伊藤浩之 and 道正志郎 and 石原昇 and 益 一哉 and 年吉 洋 and 町田克之},
  title = {マルチフィジクスシミュレーションを用いたCMOS-MEMS 加速度センサのためのゲイン制御センサ回路の検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695305,
  author = {高安 基大 and 山根 大輔 and 小西 敏文 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {移動体制御における慣性センサ適用性の検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695304,
  author = {山根大輔 and 小西敏文 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {Sub-1G?20G集積化MEMS慣性センサ},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695308,
  author = {佐布 晃昭 and 小西敏文 and 松島隆明 and 山根大輔 and 年吉 洋 and 曽根正人 and 益 一哉 and 町田克之},
  title = {MEMS加速度センサのための金属構造体の密着力評価},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100691819,
  author = {Daisuke Yamane and Toshifumi Konishi and Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Hiroshi Toshiyoshi and Kazuya Masu and Masato Sone and Katsuyuki Machida},
  title = {A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology},
  booktitle = {AMC2015},
  year = 2015,
}

@inproceedings{CTT100692510,
  author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Mechanical Properties of Electrodeposited Gold for Application in MEMS},
  booktitle = {SSDM2015, 2015 International Conference on Solid State Devises and Materials},
  year = 2015,
}

@inproceedings{CTT100692512,
  author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Study on Ti/Au Two-Layered Cantilevers with different Aspect Ratio for MEMS Devices},
  booktitle = {SSDM2015, 2015 International Conference on Solid State Devises and Materials},
  year = 2015,
}

@inproceedings{CTT100694933,
  author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Sample Size Effect on Mechanical Properties of Electrodeposited Gold Evaluated by Micro-Compression Test},
  booktitle = {MNE2015},
  year = 2015,
}

@inproceedings{CTT100694936,
  author = {Chun-Yi Chen and Masaharu Yoshiba and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {High Mechanical Strength Gold Micro-Components Fabricated by Pulse Electroplating},
  booktitle = {MNE2015},
  year = 2015,
}

@inproceedings{CTT100693804,
  author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Structure Stability of High Aspect Ratio Ti/Au Two-Layered Cantilevers for Applications in MEMS Accelerometers},
  booktitle = {MNE2015, The 41th International Conference on Micro and Nano Engineering},
  year = 2015,
}

@inproceedings{CTT100695311,
  author = {佐布晃昭 and 小西敏文 and 松島隆明 and 山根大輔 and 年吉 洋 and 曽根正人 and 益 一哉 and 町田克之},
  title = {MEMS加速度センサのための金属構造体の密着力評価},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695310,
  author = {小西敏文 and 山根大輔 and 高安基大 and 伊藤浩之 and 道正志郎 and 石原昇 and 益 一哉 and 年吉 洋 and 町田克之},
  title = {ゲイン制御型CMOS-MEMS加速度センサ回路の検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695309,
  author = {山根大輔 and 小西敏文 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {Sub-1G?20G集積化MEMS加速度センサの基本評価},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695300,
  author = {Toshifumi Konishi and Daisuke Yamane and Motohiro Takayasu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Kazuya Masu and Hiroshi Toshiyoshi and Katsuyuki Machida},
  title = {Novel Gain-Controlled Sensor Circuits Designed by Multi-physics Simulation for CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695301,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Low Mechanical Noise Tri-axis MEMS Ineretial Sensor Fabricated by Multi-layered Metal Technology},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695302,
  author = {Daisuke Yamane and Toshifumi Konishi and Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Hiroshi Toshiyoshi and Kazuya Masu and Masato Sone and Katsuyuki Machida},
  title = {A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695406,
  author = {Daisuke Yamane and Toshifumi Konishi and Motohiro Takayasu and Teruaki Safu and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida},
  title = {Robustness of Integrated Stoppers for MEMS Accelerometer Fabricated by Multi-layered Metal Technology},
  booktitle = {SSDM2015, 2015 International Conference on Solod State Devices and Materials},
  year = 2015,
}

@inproceedings{CTT100695295,
  author = {Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu},
  title = {Nano-G metrology system and its biomedical applications by CMOS-MEMS technology},
  booktitle = {Biological Systems: Open Access},
  year = 2015,
}

@inproceedings{CTT100692702,
  author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Compression deformation of micro-components fabricated by FIB from gold electrodeposited films},
  booktitle = {ISAMR2015},
  year = 2015,
}

@inproceedings{CTT100695303,
  author = {Daisuke Yamane and Kazuya Masu and Katsuyuki Machida},
  title = {A Sub-1G MEMS Inertial Sensor},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695297,
  author = {高安 基大 and 山根 大輔 and 小西 敏文 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {MEMS慣性センサを用いた移動体制御の検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100692272,
  author = {寺西美波 and Chang Tso-Fu Mark and 山根大輔 and 小西敏文 and 松島隆明 and 伊藤浩之 and 年吉 洋 and 町田克之 and 益 一哉 and 曽根正人},
  title = {電解金めっきで作製した微小カンチレバーの形状安定性評価},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100692273,
  author = {高安 基大 and 山根 大輔 and 小西 敏文 and 亀井 将太 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {慣性センサを用いた移動体制御の基礎検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695298,
  author = {寺西美波 and Tso-Fu Mark Chang and 小西敏文 and 松島隆明 and 町田克之 and 年吉 洋 and 山根大輔 and 伊藤浩之 and 益 一哉 and 曽根正人},
  title = {電解金めっきで作製したMEMSデバイスにおける動作構造安定性},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100682962,
  author = {Minami Teranishi and Tso-Fu Mark Chang and Toshifumi Konishi and Masaki Yano and Katsuyuki Machida and Daisuke Yamane and Hiroyuki Ito and Kazuya Masu and Tatsuo Sato and Masato Sone},
  title = {Stability of Movable Structure Formed by Au Electroplating for MEMS Devices},
  booktitle = {ICMAT2015 & IUMRS-ICA2015,},
  year = 2015,
}

@inproceedings{CTT100690965,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Sub-1G MEMS Sensor},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100686947,
  author = {Katsuyuki Machida and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Kazuya Masu},
  title = {CMOS -MEMS -New Frontier of Multilevel Interconnect Technology-},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100683809,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {Sub-1Gから20Gまで検知可能な集積化MEMS加速度センサの検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100684706,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {Sub-1G検出可能な3軸MEMS加速度センサの基礎検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100683810,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 益 一哉 and 年吉 洋 and 町田克之},
  title = {エネルギーハーべスティングデバイスの検討（5）},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695319,
  author = {Kazuhiro Takahashi and Makoto Mita and Muneki Nakada and Daisuke Yamane and Akio Higo and Hiroyuki Fujita and Hiroshi Toshiyoshi},
  title = {Development of Multi-user Multi-chip SOI CMOS-MEMS Process},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695320,
  author = {Daisuke Yamane and Harunobu Seita and Winston Sun and Shigeo Kawasaki and Hiroyuki Fujita and Hiroshi Toshiyoshi},
  title = {A 12-GHz DPDT RF MEMS Switch with Layer-wise Waveguide/Actuator Design Technique},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100684016,
  author = {Daisuke Yamane and Katsuyuki Machida and Kazuya Masu},
  title = {MEMS for sensing sub-1G},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100678032,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A 1mG-to-20G Integrated MEMS Inertial Sensor},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100678033,
  author = {Takaaki Matsushima and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A MEMS Energy Harvesting Device for Integrated CMOS-MEMS Technology},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100677570,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {集積化ＣＭＯＳ?ＭＥＭＳ技術によるＳｕｂ-１Ｇ加速度センサの基礎検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100677571,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 亀井将太 and 益 一哉 and 町田克之},
  title = {高感度静電容量型センサにおけるブラウニアン・ノイズ評価の検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100677572,
  author = {松島隆明 and 山根大輔 and 小西敏文 and 年吉洋 and 益 一哉 and 町田克之},
  title = {Ａｕ積層形成技術による３軸ＭＥＭＳ加速度センサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100677573,
  author = {小西敏文 and 松島隆明 and 山根大輔 and 益 一哉 and 年吉洋 and 町田克之},
  title = {回路シミュレータを用いたＭＥＭＳエネルギーハーベスティングデバイスの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676374,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Sub-1G Tri-axis MEMS Capacitive Sensor for Integrated CMOS-MEMS Accelerometers},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676376,
  author = {亀井将太 and 山根大輔 and 小西敏文 and 松島隆明 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {集積化CMOS?MEMS加速度センサへ向けたsub-1G静電容量型センサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676377,
  author = {松島隆明 and 小西敏文 and 山根大輔 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {積層メタル構造による３軸加速度センサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676378,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 益 一哉 and 年吉 洋 and 町田克之},
  title = {エネルギーハーべスティングデバイスの検討（４）},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676375,
  author = {Toshifumi Konishi and Takaaki Matsushima and Daisuke Yamane and Kazuya Masu and Hiroshi Toshiyoshi and Katsuyuki Machida},
  title = {A Novel Electromechanical Model of a MEMS Energy Harvesting Device for a Multi-physics Simulation Platform on a Circuit Simulator},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100674568,
  author = {松島隆明 and 小西敏文 and 山根大輔 and 亀井将太 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {積層メタルによる静電容量型3軸加速度センサの基礎検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100674569,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 益 一哉 and 年吉 洋 and 町田克之},
  title = {マルチフィジックスシミュレータを用いたCMOS-MEMS加速度センサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100674567,
  author = {山根大輔 and 亀井将太 and 小西敏文 and 松島隆明 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {集積化CMOS-MEMS加速度センサへ向けたsub-1Gセンサ},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100674565,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {A Sub-1G Capacitive Sensor for Integrated CMOS-MEMS Accelerometers},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100673062,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {A Tri-Axis MEMS Capacitive Sensor Using Multi-Layered High-density Metal for an Integrated CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100683804,
  author = {Hiroyuki Ito and Shoichi Masui and Youichi Momiyama and Atsushi Shirane and Motohiro Takayasu and Yoshihiro Yoneda and Taiki Ibe and Taisuke Hamada and Sho Ikeda and Daisuke Yamane and Noboru Ishihara and Kazuya Masu},
  title = {2.3 pJ/bit Frequency-Stable Impulse OOK Transmitter Powered Directly by an RF Energy Harvesting Circuit with -19.5 dBm Sensitivity},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100673063,
  author = {Katsuyuki Machida and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Kazuya Masu},
  title = {Integrated CMOS-MEMS Technology and its Application},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100673061,
  author = {山根大輔 and 松島隆明 and 小西敏文 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {集積化CMOS-MEMSへ向けた2軸加速度センサの基礎検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100669023,
  author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {A Dual-Axis MEMS Inertial Sensor Using Multi-Layered High-density Metal for an Arrayed CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668512,
  author = {加賀谷 賢 and 小西敏文 and 山根大輔 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {エネルギーハーベスティングデバイスの検討（２）},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668509,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {Sub-1G MEMS加速度センサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668513,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {MEMS加速度センサによるSub-1G検出の基礎検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668510,
  author = {松島隆明 and 小西敏文 and 山根大輔 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {アレイ型ＭＥＭＳ加速度センサ-２軸ＭＥＭＳ加速度センサの検討-},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668508,
  author = {伊藤浩之 and 小西敏文 and 松島隆明 and 山根大輔 and 石原 昇 and 町田克之 and 益 一哉},
  title = {RF受信機のためのアレイ型MEMS共振器ミキサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668511,
  author = {小西敏文 and 加賀谷 賢 and 山根大輔 and 松島隆明 and 伊藤浩之 and 石原 昇 and 益 一哉 and 町田克之 and 年吉 洋},
  title = {エネルギーハーベスティングデバイスの検討（３）},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100664830,
  author = {高安 基大 and 白根 篤史 and 李 尚曄 and 山根 大輔 and 伊藤 浩之 and ミイ シャオユウ and 井上 広章 and 中澤 文彦 and 石原 昇 and 益 一哉},
  title = {CMOS技術による8-ch 20-V出力MEMSドライバ回路},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100663426,
  author = {高安 基大 and 白根 篤史 and 李 尚曄 and 山根 大輔 and 伊藤 浩之 and ミイ シャオユウ and 井上 広章 and 中澤 文彦 and 上田 知史 and 石原 昇 and 益 一哉},
  title = {MEMS制御用高電圧CMOSスイッチングドライバ回路},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100663423,
  author = {伊藤浩之 and 小西敏文 and 山根大輔 and 石原 昇 and 町田克之 and 益 一哉},
  title = {ミキサファーストRF 受信機のためのMEMS 共振器ミキサの検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100663420,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Gou Motohashi and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Sub-1G MEMS Accelerometer},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100663429,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 丸山智史 and 加賀谷 賢 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {マルチフィジクスシミュレーションを用いた集積化CMOS-MEMS技術のためのセンサ回路の検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100663428,
  author = {加賀谷 賢 and 小西敏文 and 山根大輔 and 松島隆明 and 佃 真文 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {エネルギーハーベストデバイスの小型化の検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100663432,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 加賀谷 賢 and 佃 真文 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {アレイ型ＭＥＭＳ加速度センサの特性評価},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100661182,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 町田克之 and 益 一哉 and 年吉 洋},
  title = {CMOSとMEMS集積のためのシミュレーション解析-集積化CMOS-MEMSデバイス実現に向けて-},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100660521,
  author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Satoshi Maruyama and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Novel Sensor Circuits Design Using Multi-physics Simulation for CMOS-MEMS Technology},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100660291,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 丸山智史 and 加賀谷 賢 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {集積化CMOS-MEMS加速度センサ回路の検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100660520,
  author = {加賀谷 賢 and 小西敏文 and 山根大輔 and 松島隆明 and 佃 真文 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {エネルギーハーベストデバイスの検討(1)},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100660527,
  author = {Motohiro Takayasu and Atsushi Shirane and Sangyeop Lee and Daisuke Yamane and Hiroyuki Ito and Mi Xiaoyu and Hiroaki Inoue and Fumihiko Nakazawa and Satoshi Ueda and Noboru Ishihara and Kazuya Masu},
  title = {An 8-ch, 20-V output CMOS switching driver with 3.3-V power supply for integrated MEMS devices controlling},
  booktitle = {Extended Abstracts of 2013 International Conference on SOLID STATE DEVICES AND MATERIALS},
  year = 2013,
}

@inproceedings{CTT100660290,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 加賀谷 賢 and 佃 真文 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {アレイ型ＭＥＭＳ加速度センサの基本特性評価},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100659144,
  author = {佃 真文 and 山根大輔 and 小西敏文 and 松島隆明 and 加賀谷 賢 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {アレイ型ＭＥＭＳ加速度センサの基礎検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100658940,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 加賀谷 賢 and 佃 真文 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {金メッキ集積化CMOS-MEMSによるアレイ型加速度センサの小型化},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100658941,
  author = {小西敏文 and 丸山智史 and 山根大輔 and 松島隆明 and 町田克之 and 益 一哉 and 年吉 洋},
  title = {回路シミュレータを用いた集積化CMOS-MEMSのための統合設計環境の構築},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100658938,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Gou Motohashi and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {AN ARRAYED MEMS ACCELEROMETER WITH A WIDE RANGE OF DETECTION},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100654652,
  author = {町田克之 and 小西敏文 and 山根大輔 and 年吉洋 and 益一哉},
  title = {集積化CMOS-MEMS技術の検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100654654,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 本橋 剛 and 加賀谷 賢 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型ＭＥＭＳ加速度センサの検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100654655,
  author = {小西敏文 and 山根大輔 and 本橋 剛 and 加賀谷 賢 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型ＭＥＭＳ加速度センサの設計},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100654653,
  author = {加賀谷 賢 and 小西敏文 and 山根大輔 and 本橋 剛 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型ＣＭＯＳ-ＭＥＭＳ加速度センサのためのデバイスの評価},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100645434,
  author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Gou Motohashi and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Evaluation of a Capacitive Sensor with a Gold Proof Mass Toward Integrated CMOS-MEMS Accelerometers},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645036,
  author = {山根大輔 and 本橋 剛 and 小西敏文 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型CMOS-MEMS加速度センサのためのデバイスの検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645035,
  author = {伊藤浩之 and 山根大輔 and 小西敏文 and 石原 昇 and 町田克之 and 益一哉},
  title = {RFミキサ回路のため高速MEMSスイッチの検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645034,
  author = {小西敏文 and 丸山智史 and 三田信 and 山根大輔 and 伊藤浩之 and 町田克之 and 石原 昇 and 益一哉 and 藤田博之 and 年吉 洋},
  title = {ハードウェア記述言語を用いた集積化CMOS-MEMS統合設計技術},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645032,
  author = {加賀谷 賢 and 小西敏文 and 山根大輔 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {統合設計技術のためのMEMS加速度センサのモデルの検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645029,
  author = {本橋 剛 and 小西敏文 and 松島隆明 and 山根大輔 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {0.35μｍCMOS-LSIによるMEMSセンサ用VCO回路の検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100644389,
  author = {松島 隆明 and 小西 敏文 and 本橋 剛 and 山根 大輔 and 伊藤 浩之 and 石原 昇 and 年吉 洋 and 町田 克之 and 益 一哉},
  title = {アレイ型CMOS-MEMS加速度センサの検討（3）},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100644390,
  author = {本橋 剛 and 小西 敏文 and 松島 隆明 and 山根 大輔 and 伊藤 浩之 and 石原 昇 and 年吉 洋 and 町田 克之 and 益一哉},
  title = {アレイ型CMOS-MEMS加速度センサの検討（4）},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100644392,
  author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Gou Motohashi and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {A Novel Sensor Structure and its Fabrication Process for Integrated CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100644391,
  author = {Toshifumi Konishi and Satoshi Maruyama and Makoto Mita and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Hiroyuki Fujita and Hiroshi Toshiyoshi},
  title = {A CMOS-MEMS Design Technique based on an Electrical Circuit Simulator with Hardware Description Language},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100644753,
  author = {Daisuke Yamane and Yi-Chien Wu and Ting-Hsiang  Wu and Hiroshi Toshiyoshi and Michael A.  Teitell and Pei-Yu  Chiou},
  title = {Real-Time Monitoring of Photothermal Porated Mammalian Cells by Electric Impedance Sensors},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100640424,
  author = {山根大輔 and 本橋 剛 and 小西敏文 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型CMOS-MEMS加速度センサの検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100653249,
  author = {山根大輔 and 本橋剛 and 小西敏文 and 松島隆明 and 伊藤浩之 and 石原昇 and 年吉洋 and 町田克之 and 益一哉},
  title = {アレイ型CMOS-MEMS加速度センサの検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645031,
  author = {本橋 剛 and 小西敏文 and 松島隆明 and 山根大輔 and 伊藤浩之 and 益一哉 and 町田克之},
  title = {0.35μｍCMOS-LSIによるMEMSセンサ用VCO回路の検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100695324,
  author = {山根大輔 and Winston Sun and 川崎繁男 and 藤田博之 and 年吉 洋},
  title = {SOIレイヤ分離設計によるモノリシックRF-MEMS移相器},
  booktitle = {},
  year = 2011,
}

@inproceedings{CTT100695312,
  author = {Daisuke Yamane and Hiroshi Toshiyoshi},
  title = {Monolithic integration of passive RF components by MEMS},
  booktitle = {},
  year = 2011,
}

@inproceedings{CTT100695325,
  author = {山根大輔 and 藤田博之 and 年吉洋},
  title = {機能レイヤ分離設計によるSOI RF-MEMS受動素子に関する研究},
  booktitle = {},
  year = 2011,
}

@inproceedings{CTT100695326,
  author = {山根大輔 and Winston Sun and 川崎繁男 and 藤田博之 and 年吉 洋},
  title = {Ku帯デュアルSPDT RF-MEMSスイッチの開発},
  booktitle = {},
  year = 2010,
}

@inproceedings{CTT100695316,
  author = {Daisuke Yamane and Winston Sun and Shigeo Kawasaki and Hiroyuki Fujita and Hiroshi Toshiyoshi},
  title = {A Ku-Band RF-MEMS Phase Shifter with SOI Double-Side Bulk-Micromachining Design},
  booktitle = {},
  year = 2010,
}

@inproceedings{CTT100695314,
  author = {Daisuke Yamane and Hiroyuki Fujita and Hiroshi Toshiyoshi and Shigeo Kawasaki},
  title = {Development of a Dual-SPDT RF-MEMS Switch for Ku-band},
  booktitle = {},
  year = 2010,
}

@inproceedings{CTT100695317,
  author = {Daisuke Yamane and Kiyotaka Yamashita and Harunobu Seita and Hiroyuki Fujita and Hiroshi Toshiyoshi and Shigeo Kawasaki},
  title = {A Dual-SPDT RF-MEMS Switch on a Small-Sized LTCC Phase Shifter for Ku-band operation},
  booktitle = {},
  year = 2009,
}

@inproceedings{CTT100695327,
  author = {Winston Sun and Daisuke Yamane and Yuheon Yi and Hiroshi. Toshiyoshi and Hiroyuki Fujita and Kiyotaka Yamashita},
  title = {A Loaded-Line Phase Shifter Using MEMS Switches},
  booktitle = {},
  year = 2009,
}

@inproceedings{CTT100695318,
  author = {Daisuke Yamane and Kiyotaka Yamashita and Harunobu Seita and Hiroshi Toshiyoshi and Shigeo Kawasaki},
  title = {A Prototype of Ku-Band Small-Sized LTCC Phase Shifter with RF-MEMS Switches},
  booktitle = {},
  year = 2009,
}

@inproceedings{CTT100695328,
  author = {張鋭 and 山根大輔 and 藤田博之 and 年吉 洋},
  title = {RF-MEMS技術による可変メタマテリアル導波路の設計と試作},
  booktitle = {},
  year = 2009,
}

@inproceedings{CTT100695329,
  author = {山根大輔 and Winston Sun and 清田 晴信 and 川崎 繁男 and 年吉 洋},
  title = {Ku帯移相器用DPDT型RF-MEMSスイッチの設計と評価},
  booktitle = {},
  year = 2009,
}

@inproceedings{CTT100695321,
  author = {Daisuke Yamane and Takeshi Yamamoto and Kenichiro Urayama and Kiyotaka Yamashita and Hiroshi Toshiyoshi and Shigeo Kawasaki},
  title = {A Phase Shifter by LTCC Substrate with an RF-MEMS Switch},
  booktitle = {},
  year = 2008,
}

@inproceedings{CTT100695322,
  author = {David Dubuc and Daisuke Yamane and Zhang Rui and Yuheon Yi and Katia Grenier and Hiroyuki Fujita and Hiroshi Toshiyoshi},
  title = {Modelling and Design Guidelines of Metamaterial-based Artificial Dielectric for the Miniaturization of Microwave Passive Circuit},
  booktitle = {},
  year = 2008,
}

@inproceedings{CTT100695330,
  author = {山根大輔},
  title = {RF-MEMSスイッチの導波路／アクチュエータ分離設計・試作},
  booktitle = {},
  year = 2008,
}

@inproceedings{CTT100695331,
  author = {山根大輔 and Winston Sun and 清田 晴信 and 川崎 繁男 and 藤田 博之 and 年吉 洋},
  title = {導波路/アクチュエータのレイヤ分離構造設計技術によるRF-MEMSスイッチ},
  booktitle = {},
  year = 2008,
}

@inproceedings{CTT100695333,
  author = {Daisuke Yamane and Kazuhiro Takahashi and Winston Sun and Harunobu Seita and Shigeo Kawasaki and Hiroyuki Fujita and Hiroshi Toshiyoshi},
  title = {Microwave Switches by MEMS Technology and their Application to Phase-Shifter},
  booktitle = {},
  year = 2007,
}

@inproceedings{CTT100695332,
  author = {山本 剛司 and 清田 春信 and 川崎 繁男 and 山下 清隆 and 石崎 俊雄 and 田村 昌也 and 山根大輔 and 年吉 洋 and 篠原 真毅 and 三谷 友彦},
  title = {LTCC基板を用いたアクティブ集積フェーズドアレイアンテナ用移相器の試作},
  booktitle = {},
  year = 2007,
}

@inproceedings{CTT100695334,
  author = {Daisuke Yamane and Kazuhiro Takahashi and Winston Sun and Harunobu Seita and Shigeo Kawasaki and Hiroyuki Fujita and Hiroshi Toshiyoshi},
  title = {RF-MEMS Switches for 5.8 GHz Phase Shifter Application},
  booktitle = {},
  year = 2007,
}

@inproceedings{CTT100695335,
  author = {山根大輔 and 高橋 一浩 and Winston Sun and 清田 晴信 and 川崎 繁男 and 藤田 博之 and 年吉 洋},
  title = {アクティブフェイズドアレイアンテナの移相器応用RF-MEMSスイッチ},
  booktitle = {},
  year = 2007,
}

@inproceedings{CTT100695336,
  author = {山根大輔 and Winston Sun and 年吉 洋},
  title = {RF-MEMSスイッチに関する研究動向報告},
  booktitle = {},
  year = 2007,
}

@inproceedings{CTT100695323,
  author = {Shinji Yamashita and Daisuke Yamane},
  title = {Stabilization of mode-locked fiber lasers using Bismuth-oxide-based highly nonlinear fiber},
  booktitle = {},
  year = 2006,
}

@misc{CTT100790680,
  author = {Cheng-Yao Lo and Daisuke Yamane},
  title = {Development of a Highly-sensitive Flexible Tactile Sensor for Assistance Robots},
  year = 2019,
}

@misc{CTT100790681,
  author = {角川 武蔵 and 比佐 健人 and 山根 大輔 and 柴田 隆行 and 永井 萌土},
  title = {藻類の走行性・遺伝子相関解析のための並列微小溶液操作技術の開発},
  year = 2019,
}

@misc{CTT100790683,
  author = {Cheng-Yao Lo and Kazuya Masu and Daisuke Yamane},
  title = {Development of a Highly-sensitive Flexible Tactile Sensor for Assistance Robots},
  year = 2018,
}

@misc{CTT100748094,
  author = {山根大輔},
  title = {国際会議報告：The 12th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2017)},
  year = 2017,
}

@misc{CTT100835046,
  author = {曽根正人 and Tso-Fu Mark Chang and 陳君怡 and 町田克之 and 山根大輔 and 伊藤浩之 and 益一哉},
  title = {貴金属またはその合金の微細結晶組織を有する金属材料},
  howpublished = {公開特許},
  year = 2020,
  month  = {},
  note   = {特願2018-239826(2018/12/21), 特開2020-100874(2020/07/02)}
}


@misc{CTT100806610,
  author = {山根大輔 and 益一哉},
  title = {発電装置、エネルギーハーベストデバイス},
  howpublished = {登録特許},
  year = 2023,
  month  = {},
  note   = {特願2018-217331(2018/11/20), 特開2019-097381(2019/06/20), 特許第7217507号(2023/01/26)}
}


@misc{CTT100826083,
  author = {山根大輔 and 石原昇 and 本間　浩章　 and 年吉　洋　},
  title = {振動発電装置},
  howpublished = {公開特許},
  year = 2020,
  month  = {},
  note   = {特願2018-130894(2018/07/10), 特開2020-010541(2020/01/16)}
}


@misc{CTT100820740,
  author = {益一哉 and 町田克之 and 山根大輔 and 伊藤浩之 and 佐布　晃昭　 and 小西　敏文　 and 飯田　慎一　},
  title = {微細素子},
  howpublished = {登録特許},
  year = 2022,
  month  = {},
  note   = {特願2018-102096(2018/05/29), 特開2019-207133(2019/12/05), 特許第7002732号(2022/01/05)}
}


@misc{CTT100787104,
  author = {益一哉 and 曽根正人 and Tso-Fu Mark Chang and 陳君怡 and 山根大輔 and 小西　敏文 and 佐布　晃昭　 and 町田　克之},
  title = {微細素子およびその製造方法},
  howpublished = {登録特許},
  year = 2021,
  month  = {},
  note   = {特願2017-055730(2017/03/22), 特開2018-158394(2018/10/11), 特許第6818299号(2021/01/05)}
}


@misc{CTT100787100,
  author = {益一哉 and 山根大輔 and 小西　敏文 and 佐布　晃昭 and 町田　克之},
  title = {微細素子の製造方法},
  howpublished = {登録特許},
  year = 2021,
  month  = {},
  note   = {特願2017-055732(2017/03/22), 特開2018-159573(2018/10/11), 特許第6840339号(2021/02/19)}
}


@misc{CTT100754484,
  author = {益一哉 and 伊藤浩之 and 山根大輔 and 小西　敏文　 and 佐布　晃昭　 and 町田　克之},
  title = {微細素子およびその製造方法},
  howpublished = {登録特許},
  year = 2019,
  month  = {},
  note   = {特願2015-256285(2015/12/28), 特開2017-120205(2017/07/06), 特許第6519021号(2019/05/10)}
}


@misc{CTT100744890,
  author = {益一哉 and 山根大輔 and 小西　敏文　 and 佐布　晃昭　 and 町田　克之　},
  title = {解析装置},
  howpublished = {登録特許},
  year = 2019,
  month  = {},
  note   = {特願2015-186382(2015/09/24), 特開2017-062544(2017/03/30), 特許第6555663号(2019/07/19)}
}