@inproceedings{CTT100891359,
  author = {Y. Takamura and H. Nitta and R. Ishido and T. Kaneko and T. Miyazaki and N. Hosoda and K. Fujisaki and S. Nakagawa},
  title = {Simulation and fabrication of planar type spiral inductors with facing target sputtered CoFeB-SiO2 magnetic layers},
  booktitle = {},
  year = 2023,
}