@inproceedings{CTT100658389, author = {Shuhei Hosoda and K. Tuokedaerhan and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Improvenents in interface, states with W-carbide metal gate for La2O3/si MOS Capacitor}, booktitle = {}, year = 2013, }