@article{CTT100911315,
  author = {Mina Sato and Mie Tohnishi and Akihiro Matsutani},
  title = {Microfabrication of Si by KOH Etchant Using Etching Masks Amorphized by Ion Beam Extracted From Electron Cyclotron Plasma},
  journal = {Sensors and Materials},
  year = 2024,
}

@article{CTT100887414,
  author = {Mie Tohnishi and Mina Sato and Akihiro Matsutani and Takashi Ubukata and Sachiko Matsushita},
  title = {Surface Treatment of Polyimide using Solid-source H2O Plasma for Fabrication of Ge Electrode},
  journal = {Sensors and Materials},
  year = 2023,
}

@article{CTT100885535,
  author = {Ryo Tsukui and Masaru Kino and Kodai Yamamoto and Mina Sato and Mie Tohnishi and Akihiro Matsutani and Mikio Kurita},
  title = {Laboratory demonstration of the birefrigent point-diffraction interferometer wavefront sensor},
  journal = {Optics Continuum},
  year = 2023,
}

@article{CTT100865308,
  author = {Mina Sato and Mie Tohnishi and Akihiro Matsutani},
  title = {Microfabrication of Si by KOH Etchant Using Etching Mask Amorphized by Ar Ion Beam},
  journal = {Sensors and Materials},
  year = 2022,
}

@article{CTT100843421,
  author = {Toshihiko Takeshima and Akihiro Matsutani and Mina Sato and KOICHI HASEBE and Toshihiro Isobe and Akira Nakajima and Sachiko Matsushita},
  title = {In-situ Temperature Measurement of Local Photothermal Conversion},
  journal = {Chemistry Letters},
  year = 2020,
}

@article{CTT100794148,
  author = {Akihiro Matsutani and Mina Sato and KOICHI HASEBE and Ayako Takada},
  title = {Microfabrication of Concave Micromirror for Microbial Cell Trapping Using Köhler Illumination by XeF2 Vapor Etching},
  journal = {Sensors and Materials},
  year = 2019,
}

@article{CTT100778577,
  author = {Tomotarou Ezaki and Akihiro Matsutani and Kunio Nishioka and Dai Shoji and Mina Sato and Takayuki Okamoto and Toshihiro Isobe and Akira Nakajima and Sachiko Matsushita},
  title = {Surface potential on gold nanodisc arrays fabricated on silicon under light irradiation},
  journal = {Surface Science},
  year = 2018,
}

@article{CTT100756639,
  author = {Tsuyoshi Takahashi and Akihiro Matsutani and Dai Shoji and Kunio Nishioka and Mina Sato and Takayuki Okamoto and Tomotarou Ezaki and Toshihiro Isobe and Akira Nakajima and Sachiko Matsushita},
  title = {Optical performance of Au hemispheric sub-microstructure on polystyrene quadrumer},
  journal = {Colloids. Surf. A.},
  year = 2017,
}

@article{CTT100704496,
  author = {Akihiro Matsutani and Kunio Nishioka and Mina Sato},
  title = {Energy dispersive X-ray spectroscopy analysis of Si sidewall surface etched by deep-reactive ion etching},
  journal = {Japanese Journal of Applied Physics},
  year = 2016,
}

@article{CTT100722482,
  author = {Sachiko Matsushita and Akihiro Matsutani and Yasushi Morii and Daito Kobayashi and Kunio Nishioka and Dai Shoji and Mina Sato and Tetsu Tatsuma and Takumi Sannomiya and Toshihiro Isobe and Akira Nakajima},
  title = {Calculation and Fabrication of Two-dimensional Complete Photonic Bandgap Structures composed of Rutile TiO2 Single Crystals in Air/Liquid},
  journal = {J. MATER. SCI.},
  year = 2015,
}

@article{CTT100701826,
  author = {T. Takahashi and A. Matsutani and D. Shoji and K. Nishioka and M. Sato and T. Isobe and A. Nakajima and S. Matsushita},
  title = {Microfabrication for a polystyrene quadrupole by template-assisted self-assembly},
  journal = {Colloid. Surf.A},
  year = 2015,
}

@article{CTT100692928,
  author = {Akihiro Matsutani and Kunio Nishioka and Mina Sato and Dai Shoji and Daito Kobayashi and Toshihiro Isobe and Akira Nakajima and Tetsu Tatsuma and Sachiko Matsushita},
  title = {Angled etching of (001) rutile Nb-TiO2 substrate using SF6-based capacitively coupled plasma reactive ion etching},
  journal = {Japanese Journal of Applied Physics},
  year = 2014,
}

@inproceedings{CTT100911048,
  author = {佐藤美那 and 遠西美重 and 松谷晃宏},
  title = {イオンビーム照射によりアモルファス化したSi表面のXRR測定},
  booktitle = {},
  year = 2024,
}

@inproceedings{CTT100908143,
  author = {Kazuki Shishikura and Hiroyuki Nabae and Akihiro Matsutani and Mina Sato and Koichi Suzumori},
  title = {Tetherless IPMC Actuator Integrated with Thin Magnesium Battery Formed by Sputtering},
  booktitle = {Proceedings of the 2024 IEEE/SICE International Symposium on System Integration},
  year = 2024,
}

@inproceedings{CTT100891318,
  author = {佐藤 美那 and 遠西美重 and 松谷晃宏},
  title = {Ar+ビーム照射により作製したKOHエッチング用SiマスクのXPS解析},
  booktitle = {},
  year = 2023,
}

@inproceedings{CTT100867899,
  author = {遠西 美重 and 佐藤美那 and 松下祥子 and 松谷晃宏},
  title = {ポリイミドシート上へスパッタ成膜したCr/Ge電極の固体ソースH₂Oプラズマを用いた前処理による低抵抗化},
  booktitle = {},
  year = 2022,
}

@inproceedings{CTT100867900,
  author = {佐藤美那 and 遠西美重 and 松谷晃宏},
  title = {Ar＋ビーム照射によるSiアモルファスマスクを利用したKOHエッチングによる単一細胞分離プレートとマイクロ流路の作製},
  booktitle = {},
  year = 2022,
}

@inproceedings{CTT100862005,
  author = {遠西 美重 and 佐藤美那 and 松下祥子 and 松谷晃宏},
  title = {固体ソースH₂O プラズマを用いて表面処理したポリイミドテープ上のCr/Cu電極の折り曲げ耐久性},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100861980,
  author = {佐藤美那 and 遠西美重 and 松谷晃宏},
  title = {エッチングマスクとしてAr+イオンビームを照射した 微細マスクパターンを用いたKOH エッチングによるSi の微細加工},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100845178,
  author = {佐藤美那},
  title = {SiのKOHエッチング用マスクとしてのFIB照射の利用～エッチング時間によるマスク耐性及び三次元構造の作製～},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100845177,
  author = {佐藤美那 and 松谷晃宏 and 津久井遼 and 木野勝 and 山本広大 and 栗田光樹夫 and 長田 哲也},
  title = {ドライエッチングにより作製したメンブレン構造のNbO薄膜の顕微分光透過率測定とEDX分析},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100808348,
  author = {松谷晃宏 and 佐藤美那 and 遠西美重 and 藤本 美穂 and 平野 明子 and 西沢望 and 進士忠彦 and 初澤毅},
  title = {東京工業大学におけるクリーンルーム統合共用化による 組織的研究支援の推進},
  booktitle = {研究・イノベーション学会第34回年次学術大会講演要旨集},
  year = 2019,
}

@inproceedings{CTT100794145,
  author = {長谷部浩一 and 佐藤美那 and 松谷晃宏 and 竹島利彦 and 磯部敏宏 and 中島章 and 松下祥子},
  title = {カソード加熱型RIE装置により窒素プラズマ処理したTi薄膜およびバルクTiO2の透過率測定},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100794814,
  author = {竹島 利彦 and 松谷 晃宏 and 佐藤 美那 and 長谷部 浩一 and 磯部 敏宏 and 中島 章 and 松下 祥子},
  title = {局所光熱変換部のin-situ温度測定の試み},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100794146,
  author = {松谷晃宏 and 佐藤美那 and 長谷部浩一 and 高田綾子},
  title = {Siマイクロ凹面鏡とケーラー照明光による酵母細胞の捕獲},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100778335,
  author = {Akihiro Matsutani and Mina Sato and KOICHI HASEBE and Ayako Takada},
  title = {Microfabrication of Si-based Concave Micromirror Array for Microbial Cell Trapping by XeF2 Vapor Etching},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100771843,
  author = {松谷晃宏 and 佐藤美那 and 長谷部浩一 and 高田綾子},
  title = {XeF2気相エッチングにより製作した 微生物細胞捕獲用Siマイクロ凹面鏡の集光実験},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100762784,
  author = {三田 真衣 and 松谷 晃宏 and 西岡 國生 and 佐藤 美那 and 磯部 敏宏 and 中島 章 and 松下 祥子},
  title = {金属コーティングシリカ球ピラミッドアレイの作製とその光学特性},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760776,
  author = {松谷晃宏 and 西岡國生 and 佐藤美那},
  title = {XeF2気相エッチングによるSi マイクロ凹面鏡構造の製作},
  booktitle = {第65回応用物理学会春季学術講演会 講演予稿集},
  year = 2018,
}

@inproceedings{CTT100735789,
  author = {江崎 智太郎 and 松谷 晃宏 and 西岡 國生 and 庄司 大 and 佐藤 美那 and 岡本 隆之 and 磯部 敏宏 and 中島 章 and 松下 祥子},
  title = {プラズモン共鳴により生じる金属ナノ構造体の表面電位差の測定},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100735788,
  author = {江崎 智太郎 and 松谷 晃宏 and 西岡 國生 and 庄司 大 and 佐藤 美那 and 岡本 隆之 and 磯部 敏宏 and 中島 章 and 松下 祥子},
  title = {Si/SiO2上金ナノ円盤の表面電位の光照射依存およびその構造依存性},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100703598,
  author = {西岡國生 and 佐藤美那 and 松谷晃宏},
  title = {Deep-RIEにより形成されたトレンチ側面の化学組成に関するプラズマ発光分光分析からの考察},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100735790,
  author = {Tomotarou Ezaki and Akihiro Matsutani and Kunio Nishioka and Dai Shoji and Mina Sato and Takayuki Okamoto and Toshihiro Isobe and Akira Nakajima and Sachiko Matsushita},
  title = {Kelvin probe force microscopic images on gold nanodisks with and without light irradiation},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100699542,
  author = {Akihiro Matsutani and Mina Sato and Kunio Nishioka and Dai Shoji},
  title = {EDX analysis of Si sidewall surface etched by deep-RIE process},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100683819,
  author = {佐藤 美那 and 西岡國生 and 庄司大 and 松谷晃宏},
  title = {Deep-RIEにより深掘りエッチングされたSiエッチング側面のEDX分析},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100686996,
  author = {高橋 毅 and 松谷 晃宏 and 庄司 大 and 西岡 國生 and 佐藤 美那 and 磯部 敏宏 and 中島 章 and 松下 祥子},
  title = {トップダウン・ボトムアップ統合アプローチによるポリスチレン四重極子の作製},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100682561,
  author = {岩崎 大和 and 西林 一彦 and 松谷 晃宏 and 佐藤 美那 and 久我 淳 and 宗片 比呂夫},
  title = {光導波路とエバネッセント結合したGdFe薄膜の磁気光学応答},
  booktitle = {予稿集},
  year = 2015,
}

@inproceedings{CTT100676684,
  author = {佐藤 美那 and 松谷 晃宏 and 曽根 正人},
  title = {多層膜構造を用いたEDX分析におけるCu中のX線発生領域の測定},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668639,
  author = {小林大斗 and 松谷晃宏 and 西岡國生 and 庄司 大 and 佐藤 美那 and 磯部敏宏 and 中島章 and 立間 徹 and 松下祥子},
  title = {傾斜ドライエッチングを用いた酸化チタンフォトニック結晶の作製と評価},
  booktitle = {},
  year = 2014,
}