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研究業績一覧 (1件)
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論文
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Tadashi Ishida,
Van Nguyen Quet,
Shota Mochizuki,
Yusuke Kagawa,
Toshio Takayama,
Toru Omata.
MEMS whistle-type temperature-compensated displacement sensor using resonant frequency shift,
Sensors and Actuators A: Physical,
elsevier,
Vol. 222,
pp. 24-30,
Feb. 2015.
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