@article{CTT100743168,
  author = {M Sumisaka and K Yamazaki and Satoshi Fujii and G Tang and T Han and Y Suzuki and S Otomo and T Omori and Ken-Ya Hashimoto},
  title = {Sputter Deposition of ScAlN Thin Films Using a Sc-Al Alloy Target},
  journal = {Japanese Journal of Applied Physics},
  year = 2015,
}