@article{CTT100875654,
  author = {Kohei Shibata and Akihiro Uchiyama and Akira Onishi and Katsuyuki Machida and Parthojit Chakraborty and Shin-ichi Iida and Toshifumi Konishi and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Simplified Analytical Damping Constant Model for Design of MEMS Capacitive Accelerometer with Gold Perforated Proof-mass Structure},
  journal = {IEEE Sensors Journal},
  year = 2022,
}

@article{CTT100846484,
  author = {Hitomi Watanabe and Tso-Fu Mark Chang and Michael  Schneider and Ulrich  Schmid and Chun-Yi Chen and Shinichi Iida and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electro-deposition and the Temperature Dependency},
  journal = {Electrochem},
  year = 2021,
}

@article{CTT100820976,
  author = {Kyotaro Nitta and Hao-Chun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Shinichi Iida and Daisuke Yamane and Katsuyuki Machida and Hiroyuki  Ito and Kazuya Masu and Masato Sone},
  title = {Alloy Electroplating and Young’s Modulus Characterization of AuCu Alloy Microcantilevers},
  journal = {Journal of The Electrochemical Society},
  year = 2020,
}

@article{CTT100806473,
  author = {Kyotaro Nitta and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Shinichi Iida and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Fabrication of Au-Cu Alloy/Ti Layered Micro-Cantilevers and the Long-Term Structure Stability},
  journal = {IEEE Conference Paper},
  year = 2020,
}

@article{CTT100807019,
  author = {Katsuyuki Machida and Daisuke Yamane and Toshifumi Konishi and Shin-ichi Iida and Noboru Ishihara and Tso-Fu Mark Chang and Masato Sone and Hiroyuki Ito and Kazuya Masu},
  title = {MEMS Accelerometer Fabricated by Gold Multi-Layer Metal Technology},
  journal = {ECS Transactions},
  year = 2019,
}

@article{CTT100796028,
  author = {Kyotaro Nitta and Tso-Fu Mark Chang and Koichiro Tachibana and Hao-chun Tang and Chun-Yi Chen and Shinichi Iida and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Cu-Alloying Effect on Structure Stability of Electrodeposited Gold-Based Micro-Cantilever Evaluated by Long-Term Vibration Test},
  journal = {Microelectronic Engineering},
  year = 2019,
}

@article{CTT100795920,
  author = {Ken Atsumi and Shota Otobe and Tatsuya Koga and Takashi Ichikawa and Daisuke Yamane and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {Pillar-Shaped Electrodes for 3-axis Gold-Proof-Mass MEMS Capacitive Accelerometers},
  journal = {IEEE Conference Paper},
  year = 2019,
}

@article{CTT100766253,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Shin-ichi Iida and Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {Temperature Characteristics of MEMS Inertial Sensor Fabricated by Gold Multi-Layer Metal Technology},
  journal = {},
  year = 2018,
}

@inproceedings{CTT100903097,
  author = {御宿 希祐 and 大西哲 and TENNETIDEVI and CHAKRABORTYP and 町田克之 and 飯田慎一 and 小西敏文 and 曽根正人 and 三宅美博 and 伊藤浩之},
  title = {エッチホールを有するAu錘構造のMEMS加速度センサの減衰定数簡易解析モデルの検討},
  booktitle = {第83回応用物理学会秋季学術講演会},
  year = 2022,
}

@inproceedings{CTT100903102,
  author = {御宿 希祐 and 大西哲 and TENNETIDEVI and CHAKRABORTYP and 町田克之 and 飯田慎一 and 小西敏文 and 曽根正人 and 三宅美博 and 伊藤浩之},
  title = {Au錘MEMS容量型加速度センサにおける減衰定数簡易解析モデルの検討},
  booktitle = {},
  year = 2022,
}

@inproceedings{CTT100873385,
  author = {内山晃宏 and 柴田滉平 and 大西哲 and 市川崇志 and 飯田慎一 and 李尚曄 and 石原昇 and 町田克之 and 益一哉 and 伊藤浩之},
  title = {ワイドレンジAu錘1軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873384,
  author = {大西哲 and 内山晃宏 and 柴田滉平 and 市川崇志 and 李尚曄 and 飯田慎一 and 石原昇 and 町田克之 and 益一哉 and 伊藤浩之},
  title = {3次元容量検出電極による単一Au錘3軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873379,
  author = {大西哲 and 内山晃宏 and 柴田滉平 and 市川崇志 and 李尚曄 and 飯田慎一 and 石原昇 and 町田克之 and 益一哉 and 伊藤浩之},
  title = {3D容量検出電極による単一Au錘3軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100842072,
  author = {市川 崇志 and 古賀 達也 and 飯田 慎一 and 石原 昇 and 町田 克之 and 益 一哉 and 伊藤 浩之},
  title = {単一 Au 錘 3 軸加速度センサのための分割容量検出 2 重電極に関する検討},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873362,
  author = {Akihiro Uchiyama and Takasi Ichikawa and Kohei Shibata and Shinichi Iida and Sangyeop Lee and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu and Hiroyuki Ito},
  title = {A MEMS accelerometer with a single axis two proof masses for a wide detection range},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873377,
  author = {内山晃宏 and 市川崇志 and 柴田滉平 and 飯田慎一 and 李尚曄 and 石原昇 and 町田克之 and 益一哉 and 伊藤浩之},
  title = {ワイドレンジ検出可能なAu錘1軸MEMS加速度センサ の検討},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873376,
  author = {Takasi Ichikawa and Akihiro Uchiyama and Kohei Shibata and Shinichi Iida and Sangyeop Lee and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu and Hiroyuki Ito},
  title = {A 3-D capacitive-detection electrode for a single gold proof-mass three-axis MEMS accelerometer},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100842067,
  author = {市川 崇志 and 内山晃宏 and 古賀 達也 and 町田 克之 and 石原昇 and 益 一哉 and 飯田 慎一 and 伊藤 浩之},
  title = {100 nG/√Hz レベルを目指した分割 2 重電極を有する単一Au錘 3 軸 MEMS 加速度センサの検討},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100842065,
  author = {柴田滉平 and 市川 崇志 and 古賀 達也 and 町田 克之 and 益 一哉 and 石原昇 and 飯田 慎一 and 伊藤 浩之},
  title = {高分解能単一Au 錘CMOS-MEMS 加速度センサの検討},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100842066,
  author = {内山晃宏 and 市川 崇志 and 古賀 達也 and 町田 克之 and 益 一哉 and 石原昇 and 飯田 慎一 and 伊藤 浩之},
  title = {Au錘一軸MEMS加速度センサの差動容量型電極構造の検討},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100842063,
  author = {Takashi Ichikawa and Kohei Shibata and Tatsuya Koga and Katsuyuki Machida and Shinichi Iida and Noboru Ishihara and Kazuya Masu and Hiroyuki Ito},
  title = {A High Resolution Single Gold Proof-Mass CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100842069,
  author = {内山晃宏 and 市川 崇志 and 古賀達也 and 飯田慎一 and 石原昇 and 町田克之 and 益一哉 and 伊藤浩之},
  title = {マイクロGレベルセンシングのための金錘1軸差動容量型MEMS加速度センサ},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100842068,
  author = {市川崇志 and 渥美賢 and 古賀達也 and 飯田慎一 and 石原昇 and 町田克之 and 益一哉 and 伊藤浩之},
  title = {100 nG/√Hzレベルを目指したピラー型電極を有する単一Au錘3軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100842064,
  author = {Takashi Ichikawa and Ken Atsumi and Tatsuya Koga and Daisuke Yamane and Shin-ichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A 100-nG/√Hz-Level Single Au Proof-Mass 3-Axis MEMS Accelerometer with Pillar-Shaped electrodes},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100816076,
  author = {渥美 賢 and 古賀 達也 and 市川 崇志 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {ピラー型電極を用いた単一錘3軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100816077,
  author = {市川 崇志 and 渥美 賢 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {ピラー型電極による単一Au錘3軸MEMS加速度センサの感度均一化の検討},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100816075,
  author = {Tatsuya Koga and Takashi Ichikawa and Daisuke Yamane and Shinichi Iida and Noboru Ishihara and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu},
  title = {A Gold Proof-Mass Differential MEMS Accelerometer for Micro-G Level Sensing},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100806469,
  author = {Kyotaro Nitta and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Shinichi Iida and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Electrodepostion of Au-Cu Alloy  Micro-Cantilevers and the Young’s modulus by Resonance Frequency Method},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100809253,
  author = {市川 崇志 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 石原 昇 and 伊藤 浩之 and Chang Tso-Fu Mark and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {積層メタル技術で作製したMEMS加速度センサの衝撃特性評価},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100809254,
  author = {市川 崇志 and 乙部 翔太 and 渥美 賢 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {3Dピラー型Au錘MEMS加速度センサ},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100803939,
  author = {Kyotaro Nitta and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Shinichi Iida and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Au-Cu alloy/Ti Layered micro-cantilevers toward MEMS Movable Components},
  booktitle = {The 1st Tokyo Tech-NCTU Joint Symposium on Advanced Materials},
  year = 2019,
}

@inproceedings{CTT100807194,
  author = {市川 崇志 and 乙部 翔太 and 渥美 賢 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 曽根 正人 and 益 一哉},
  title = {Au錘3軸MEMS加速度センサのためのSCD電極の検討 (2)},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100802676,
  author = {Hitomi Watanabe and Chun-Yi Chen and Tso-Fu Mark Chang and Shinichi Iida and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Effects of Fixed End Structure on Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever toward MEMS Applications},
  booktitle = {45th International Conference on Micro & Nano Engineering (MNE2019)},
  year = 2019,
}

@inproceedings{CTT100802632,
  author = {Kyotaro Nitta and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Shinichi Iida and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Fabrication and Evaluation of Au-Cu Alloy 3D Structures toward MEMS Movable Components},
  booktitle = {45th International Conference on Micro & Nano Engineering (MNE2019)},
  year = 2019,
}

@inproceedings{CTT100803938,
  author = {Hitomi Watanabe and Chun-Yi Chen and Tso-Fu Mark Chang and Shinichi Iida and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Temperature Dependence Structure Stability of Ti/Au Layered Micro-Cantilevers},
  booktitle = {The 1st Tokyo Tech-NCTU Joint Symposium on Advanced Materials},
  year = 2019,
}

@inproceedings{CTT100800103,
  author = {市川 崇志 and 新島 宏文 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {3軸Au錘MEMS加速度センサにおける検出電極構造の検討},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100790674,
  author = {市川 崇志 and 新島 宏文 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {3軸Au錘MEMS加速度センサにおける平行平板型電極の検討},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100790677,
  author = {乙部 翔太 and 渥美 賢 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {Au錘3軸MEMS加速度センサのためのSCD電極の検討},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100790673,
  author = {渥美 賢 and 乙部 翔太 and 古賀 達也 and 市川 崇志 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {積層メタル技術によるピラー型容量検出電極の検討},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100782446,
  author = {Daisuke Yamane and Shota Otobe and Ken Atsumi and Tatsuya Koga and Toshifumi Konishi and Teruaki Safu and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A 3-D PARALLEL-PLATE MEMS ACCELEROMETER WITH A GOLD PROOF MASS},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100777398,
  author = {Shota Otobe and Tatsuya Koga and Ken Atsumi and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Shin-ichi Iida and Hiroyuki. Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Sub-1mG Tri-Axis MEMS Accelerometer with Multiple Segmented Capacitance Detection Electrodes},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100775377,
  author = {古賀 達也 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {1軸MEMS加速度センサのAu錘厚膜化による高性能化の検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100775374,
  author = {市川 崇志 and 新島 宏文 and 古賀 達也 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {Au単一錘平行平板型3軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100775380,
  author = {乙部 翔太 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {シングルAu錘と分割電極容量検出(SCD)方式を用いた3軸全差動MEMS加速度センサ},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760801,
  author = {新島 宏文 and 乙部 翔太 and 高安 基大 and 山根 大輔 and 伊藤 浩之 and 佐布 晃昭 and 小西 敏文 and 道正 志郎 and 飯田 慎一 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {単一Au錘3軸差動MEMS加速度センサの検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760797,
  author = {高安 基大 and 古賀 達也 and 辻 一平 and 伊藤 浩之 and 山根 大輔 and 道正 志郎 and 小西 敏文 and 飯田 慎一 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {傾斜を用いた1mG MEMS加速度センサの分解能評価の検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760803,
  author = {小西 敏文 and 山根 大輔 and 佐布 晃昭 and 陳 君怡 and Chang Tso-Fu Mark and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉 and 飯田 慎一},
  title = {積層メタル技術を用いたMEMS慣性センサの封止環境における温度依存性},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100780789,
  author = {Toshifumi Konishi and Daisuke Yamane and Teruaki Safu and Chun Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu and Shinichi Iida},
  title = {Temperature Dependence on Package Sealing Ambient of MEMS Sensor Fabricated by Gold Electroplating},
  booktitle = {},
  year = 2017,
}