@article{CTT100767947, author = {Yuki Hashimoto and Satoshi Matsuzawa and Takatoki Yamamoto}, title = {Subsurface investigation of the surface modification of polydimethylsiloxane by 172‐nm vacuum ultraviolet irradiation using ToF‐SIMS and VUV spectrometry}, journal = {Surface and Interface Analysis}, year = 2018, }