@inproceedings{CTT100818184,
  author = {T. Toki and P. Izikson and J. Kosugi and N. Sakasai and K. Saotome and Kazuaki Suzuki and D. Kandel and J. Robinson and Y. Koyanagi},
  title = {Simultaneous optimization of dose and focus controls in advanced ArF immersion scanners},
  booktitle = {Proceeding of SPIE},
  year = 2010,
}