@inproceedings{CTT100818517,
  author = {J. Ikeda and A. Yamada and S. Shimizu and N. Hirayanagi and Kazuaki Suzuki},
  title = {Application of electron projection lithography to contacts in 65nm node and beyond},
  booktitle = {Digest of papers of 16th MicoProcesses and Nanotechnology Conference},
  year = 2003,
}