@inproceedings{CTT100818461,
  author = {C. Romeo and P. Cantu and D. Henry and H. Takekoshi and N. Hirayanagi and Kazuaki Suzuki and M. McCallum and H. Fujita and T. Takikawa and M. Hoga},
  title = {Device based evaluation of electron projection lithography},
  booktitle = {Proceeding of SPIE},
  year = 2005,
}