@inproceedings{CTT100818510,
  author = {T. Fujiwara and N. Hirayanagi and J. Udagawa and J. Ikeda and S. Shimizu and H. Takekoshi and Kazuaki Suzuki},
  title = {Total performance of Nikon EB stepper R&D tool},
  booktitle = {Proceeding of SPIE},
  year = 2004,
}