@article{CTT100818135,
  author = {T. Yahiro and S. Suzuki and T. Irita and N. Hirayanagi and H. Shimizu and S. Kojima and K. Morita and S. Kawata and T. Okino and Kazuaki Suzuki},
  title = {Direct measurement of Coulomb effects in electron beam projection lithography},
  journal = {J. Vac. Sci. Technol. B},
  year = 2001,
}