@inproceedings{CTT100818571,
  author = {Kazuaki Suzuki and T. Fujiwara and K. Hada and N. Hirayanagi and S. Kawata and K. Morita and K. Okamoto and T. Okino and S Shimizu and T. Yahiro and H. Yamamoto},
  title = {Nikon EB stepper: the latest development status},
  booktitle = {Proceeding of SPIE},
  year = 2001,
}