@inproceedings{CTT100818621,
  author = {K. Morita and T. Yahiro and S. Shimizu and H. Yamamoto and N. Hirayanagi and T. Fujiwara and S. Suzuki and H. Shimizu and S. Kawata and T. Okino and Kazuaki Suzuki},
  title = {Data of scattered electron characteristics in 100kV EB stepper},
  booktitle = {Proceeding of SPIE},
  year = 2000,
}