@inproceedings{CTT100818585,
  author = {Kazuaki Suzuki and T. Fujiwara and K. Hada and N. Hirayanagi and S. Kawata and K. Morita and K. Okamoto and T. Okino and S. Shimizu and T. Yahiro},
  title = {Nikon EB stepper: its system concept and countermeasure for critical issues},
  booktitle = {Proceeding of SPIE},
  year = 2000,
}