@inproceedings{CTT100818608,
  author = {T. Okino and Kazuaki Suzuki and K. Okamoto and S. Kawata and K. Uchikawa and S. Suzuki and S. Shimizu and T. Fujiwara and A. Yamada and K. Kamijo},
  title = {Investigation of proximy effect correction in electron projection lithography (EPL)},
  booktitle = {Proceeding of SPIE},
  year = 2000,
}