@article{CTT100818099,
  author = {O. R.  Wood II and W. J. Trybula and J. Greschner and S. Kalt and T. Bayer and S. Shimizu and H. Yamamoto and Kazuaki Suzuki and M. S.  Gordon and C. F. Robinson and R. S.  Dhaliwal and C. W.  Thiel and N. Caldwell and M. S.  Lawliss and C. Huang},
  title = {Ultrathin membrane masks for electron projection lithography},
  journal = {J. Vac. Sci. Technol. B},
  year = 2004,
}