@article{CTT100818091,
  author = {Kazuaki Suzuki and N. Hirayanagi and T. Fujiwara and A. Yamada and J. Ikeda and T. Yahiro and S. Kojima and J. Udagawa and H. Yamamoto and N. Katakura and M. Suzuki and T. Aoyama and H. Takekoshi and T. Umemoto and H. Shimizu and S. Fukui and S. Suzuki and T. Okino and Y. Ohkubo and T. Shimoda and T. Tanida and Y. Watanabe and Y. Kohama and K. Ohmori and F. Mori and S. Takemoto and T. Yoshioka and H. Hirose and K. Morita and K. Hada and S. Kawata and Y. Kakizaki and T. Miura},
  title = {Full-field exposure performance of electron projection lithography tool},
  journal = {J. Vac. Sci. Technol. B},
  year = 2004,
}