@article{CTT100818091,
  author = {Kazuaki Suzuki and N. Hirayanagi and T. Fujiwara and A. Yamada and J. Ikeda and T. Yahiro and S. Kojima and J. Udagawa and H. Yamamoto and N. Katakura and M. Suzuki and T. Aoyama and H. Takekoshi and T. Umemoto and H. Shimizu and S. Fukui and S. Suzuki and T. Okino and Y. Ohkubo and T. Shimoda and T. Tanida and Y. Watanabe and Y. Kohama and K. Ohmori and F. Mori and S. Takemoto and T. Yoshioka and H. Hirose and K. Morita and K. Hada and S. Kawata and Y. Kakizaki and T. Miura},
  title = {Full-field exposure performance of electron projection lithography tool},
  journal = {J. Vac. Sci. Technol. B},
  year = 2004,
}

@article{CTT100818110,
  author = {Kazuaki Suzuki and T. Fujiwara and S.  Kojima and N. Hirayanagi and T. Yahiro and J. Udagawa and S. Shimizu and H. Yamamoto and M. Suzuki and H. Takekoshi and S. Fukui and M. Hamashima and J. Ikeda and T. Okino and H. Shimizu and S. Takahashi and A. Yamada and T. Umemoto and S. Katagiri and Y. Ohkubo and T. Shimoda and K. Hirose and T. Tanida and Y. Watanabe and T. Kaminaga and Y. Kohama and F. Mori and S. Takemoto and T. Yoshioka and H. Hirose and K. Morita and K. Hada and S. Kawata and T. Sato and Y. Sato and M. Tokunaga and K. Okamoto and Y. Kakizaki and T. Miura},
  title = {First dynamic exposure results from an electron projection lithography tool},
  journal = {J. Vac. Sci. Technol. B},
  year = 2003,
}