@article{CTT100818110,
  author = {Kazuaki Suzuki and T. Fujiwara and S.  Kojima and N. Hirayanagi and T. Yahiro and J. Udagawa and S. Shimizu and H. Yamamoto and M. Suzuki and H. Takekoshi and S. Fukui and M. Hamashima and J. Ikeda and T. Okino and H. Shimizu and S. Takahashi and A. Yamada and T. Umemoto and S. Katagiri and Y. Ohkubo and T. Shimoda and K. Hirose and T. Tanida and Y. Watanabe and T. Kaminaga and Y. Kohama and F. Mori and S. Takemoto and T. Yoshioka and H. Hirose and K. Morita and K. Hada and S. Kawata and T. Sato and Y. Sato and M. Tokunaga and K. Okamoto and Y. Kakizaki and T. Miura},
  title = {First dynamic exposure results from an electron projection lithography tool},
  journal = {J. Vac. Sci. Technol. B},
  year = 2003,
}