@inproceedings{CTT100818501,
  author = {T. Miura and S. Kawata and K. Hada and Y. Kakizaki and M. Miyazaki and Kazuaki Suzuki and N. Hirayanagi and A. Yamada and J. Ikeda and T. Yahiro and J. Udagawa and H. Takekoshi and T. Umemoto and Y. Ohkubo and T. Shimoda and T. Tanida and Y. Watanabe and K. Ohmori and F. Mori and S. Takemoto and T. Yoshioka and K. Morita},
  title = {Nikon EPL tool: the latest development status and results},
  booktitle = {Proceeding of SPIE},
  year = 2005,
}