@article{CTT100818141,
  author = {S.D. Golladay and H.C. Pfeiffer and C.A. Bohnenkamp and R.S. Dhaliwal and W.A. Enichen and M.S. Gordon and R.A. Kendall and J.E. Lieberman and W. Stickel and J.D. Rockrohr and E.V. Tressler and A. Tanimoto and T. Yamaguchi and K. Okamoto and Kazuaki Suzuki and T. Miura and T. Okino and S. Kawata and K. Morita and S. Suzuki and H. Shimizu and S. Kojima and G. Varnell and W.T. Novak and M. Sogard},
  title = {PREVAIL - EPL alpha tool: Early results},
  journal = {J. Vac. Sci. Technol. B},
  year = 2001,
}