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矢野勝喜 研究業績一覧 (1件)
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論文
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Takeshi Takeuchi,
Takeshi Katayama,
Masahiro Okamura,
Katsuki Yano,
Akira Sakumi,
Toshiyuki Hattori,
Noriyosu Hayashizaki,
Robert A. Jameson.
A direct plasma injection system into an RFQ for clean and safe ion implantation,
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms,
Vol. 188,
pp. 233-237,
Apr. 2002.
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