@book{CTT100823615,
  author = {Bruce W. Smith and Kazuaki Suzuki},
  title = {Microlithography, Science and Technology, Third Edition},
  publisher = {CRC Press},
  year = 2020,
}

@book{CTT100818079,
  author = {Kazuaki Suzuki and Bruce W. Smith},
  title = {Microlithography, Science and Technology, Second Edition},
  publisher = {CRC Press},
  year = 2007,
}