@article{CTT100933595, author = {K. Takuma and T. Utsugi and R. Tsuchiya and N. Lee and T. Mine and I. Yanagi and R. Mizokuchi and J. Yoneda and T. Kodera and S. Saito and D. Hisamoto and H. Mizuno}, title = {Single-electron charge sensor self-aligned to a quantum dot array by double-gate patterning process}, journal = {Jpn. J. Appl. Phys}, year = 2025, }