@inproceedings{CTT100936185, author = {Norikatsu Takaura and Shoma Miyata and Moataz Eissa and Takaaki Noda and Yuji Urano and Zhao Jiaang and Hiroaki Takahashi and Shuntaro Machida and Tsuyoshi Horikawa and Nobuhiko Nishiyama}, title = {Low Propagation Loss in LPCVD Si3N4 Waveguides Without the Need for High-Temperature Annealing: Expanding Applications in Silicon Photonics}, booktitle = {}, year = 2025, }