@article{CTT100915391, author = {Keren Lin and Thijs van der Gaag and Wataru Kikuchi and Hiroshi Akatsuka and Motoshi Goto}, title = {OES diagnostics of atmospheric pressure argon plasma: Electron temperature and density assessment through visible bremsstrahlung inversion method and collisional-radiative model}, journal = {Applied Physics Letters}, year = 2024, } @article{CTT100911911, author = {Wataru Kikuchi and Yuya Yamashita and Atsushi Nezu and Hiroshi Akatsuka}, title = {Spectroscopic Measurement of Atmospheric-pressure Non-equilibrium Ar Plasma Using Continuum and Line Spectra}, journal = {Journal of Physics D: Applied Physics}, year = 2024, } @article{CTT100908519, author = {Yuya Yamashita and Kenta Doi and Tetsuji Kiyota and Kenta Ishi and Shuhei Watanabe and Wataru Kikuchi and Atsushi Nezu and Hiroshi Akatsuka}, title = {Spatial distribution diagnosis of electron temperature and density of argon inductively coupled plasma by tomographic optical emission spectroscopic measurement and collisional-radiative model}, journal = {J. Vac. Sci. Technol. A}, year = 2024, } @article{CTT100901528, author = {Yuya Yamashita and Kenta Doi and Tetsuji Kiyota and Keiichiro Asakawa and Sotaro Hosoya and Wataru Kikuchi and Atsushi Nezu and Hiroshi Akatsuka}, title = {Radial dependence diagnosis of inductively coupled Ar plasma based upon optical emission spectroscopic measurement with spectral reflectance compensation}, journal = {Review of Scientific Instruments}, year = 2023, } @inproceedings{CTT100925568, author = {山下 雄也 and 土居 謙太 and 清田哲司 and 叶宇晨 and 島谷和希 and 何文涛 and 羽生陽向 and 菊地航行 and 櫻井彩貴 and 根津篤 and 赤塚洋}, title = {トモグラフィック発光分光計測とアルゴン衝突輻射モデルにもとづくCF4/O2/Arプラズマの電子温度・電子密度・EEDFの位置分布診断}, booktitle = {第85回応用物理学会秋季学術講演会 講演要旨集}, year = 2024, } @inproceedings{CTT100925847, author = {Shinji Yoshimura and Keren Lin and Wataru Kikuchi and Jun Enomoto and Motoshi Goto and Hiroshi Akatsuka}, title = {Development and measurement of a gas temperature controllable atmospheric-pressure plasma jet system for plasma bio research}, booktitle = {Bulletin of the American Physical Society}, year = 2024, } @inproceedings{CTT100925117, author = {Wataru Kikuchi and Yuya Yamashita and Atsushi Nezu and Hiroshi Akatsuka}, title = {Spectroscopic Measurement of Atmospheric-pressure Non-equilibrium Ar Plasma Based on Continuum and Line Spectra with Weighted Analysis}, booktitle = {Proc. ICDDPS-5}, year = 2024, } @inproceedings{CTT100919093, author = {Yuya Yamashita and Kenta Doi and Tetsuji Kiyota and Shuhei Watanabe and Kazuki Shimatani and Wataru Kikuchi and Yuchen Ye and Atsushi Nezu and Hiroshi Akatsuka}, title = {Electron temperature diagnosis of CF4/O2 plasma based on fluorine atomic corona model by tomographic optical emission spectroscopic measurement}, booktitle = {Proceedings of ESCAMPIG2024}, year = 2024, } @inproceedings{CTT100919092, author = {Wataru Kikuchi and Yuya Yamashita and Atsushi Nezu and Hiroshi Akatsuka}, title = {Spectroscopic Measurement of Atmospheric-pressure Non-equilibrium Ar Plasma Based on Line Spectra with Undetected Level Densities}, booktitle = {Proceedings of 50th EPS Conference on Plasma Physics}, year = 2024, } @inproceedings{CTT100910225, author = {山下 雄也 and 土居 謙太 and 清田 哲司 and 渡邊 修平 and 島谷 和希 and 菊地 航行 and 根津 篤 and 赤塚 洋}, title = {トモグラフィック発光分光計測によるフッ素原子コロナモデルに基づくCF4/O2プラズマの電子温度診断}, booktitle = {第71回応用物理学会春季学術講演会 講演予稿集}, year = 2024, } @inproceedings{CTT100910224, author = {菊地 航行 and 山下 雄也 and 根津 篤 and 赤塚 洋}, title = {大気圧非平衡 Ar プラズマの連続・線スペクトルに基づいた重み付き解析}, booktitle = {第71回応用物理学会春季学術講演会 講演予稿集}, year = 2024, } @inproceedings{CTT100908455, author = {山下航平 and 菊地航行 and 石健太 and 榎本純 and 根津篤 and 赤塚洋}, title = {Ar/N2混合大気圧非平衡プラズマにおける振動温度・回転温度の発光分光計測}, booktitle = {第41回 プラズマプロセシング研究会 プロシーディングス}, year = 2024, } @inproceedings{CTT100908454, author = {渡邊修平 and 土居謙太 and 清田哲司 and 山下雄也 and 菊地航行 and 石健太 and 根津篤 and 赤塚洋}, title = {誘導結合酸素プラズマの発光分光計測}, booktitle = {第41回 プラズマプロセシング研究会 プロシーディングス}, year = 2024, } @inproceedings{CTT100908457, author = {山下雄也 and 土居謙太 and 清田哲司 and 菊地航行 and 石健太 and 渡邊修平 and 根津篤 and 赤塚洋}, title = {改良分光トモグラフィアルゴリズムによるアルゴン誘導結合プラズマの電子温度・電子密度の空間分布診断}, booktitle = {第41回 プラズマプロセシング研究会 プロシーディングス}, year = 2024, } @inproceedings{CTT100907445, author = {山下雄也 and 土居謙太 and 清田哲司 and 菊地航行 and 石健太 and 渡邊修平 and 根津篤 and 赤塚洋}, title = {トモグラフィック発光分光計測とアルゴン衝突輻射モデルによるプラズマ診断において視線配置が診断結果に及ぼす影響}, booktitle = {原子分子データ応用フォーラム要旨集}, year = 2023, } @inproceedings{CTT100907444, author = {菊地航行 and 榎本 純 and 山下 航平 and 山下 雄也 and 根津 篤 and 赤塚洋}, title = {大気圧非平衡Arプラズマの連続・線スペクトルの両者による発光分光計測}, booktitle = {2023年「原子分子データ応用フォーラムセミナー」要旨集}, year = 2023, } @inproceedings{CTT100903448, author = {山下 雄也 and 土居 謙太 and 清田 哲司 and 菊地 航行 and 石 健太 and 渡邊 修平 and 根津 篤 and 赤塚 洋}, title = {トモグラフィック発光分光計測によるプラズマ診断におけるチャンバ内壁反射光が電子温度・電子密度診断に及ぼす影響}, booktitle = {第84回応用物理学会秋季学術講演会 講演予稿集}, year = 2023, } @inproceedings{CTT100903416, author = {菊地 航行 and 榎本 純 and 山下 航平 and 山下 雄也 and 根津 篤 and 赤塚 洋}, title = {大気圧非平衡Arプラズマの制動輻射と衝突輻射モデルに基づいた解析}, booktitle = {第84回応用物理学会秋季学術講演会 講演予稿集}, year = 2023, } @inproceedings{CTT100896396, author = {Yuya Yamashita and Kenta Doi and Tetsuji Kiyota and Keiichiro Asakawa and Sotaro Hosoya and Wataru Kikuchi and Atsushi Nezu and Hiroshi Akatsuka}, title = {Diagnosis of spatial distribution of electron temperature and electron density of argon inductively coupled plasma by tomographic optical emission spectroscopic measurement}, booktitle = {Program-book-abstracts of ICPIG XXXV}, year = 2023, } @inproceedings{CTT100891420, author = {Wataru Kikuchi and Jun Enomoto and Kohei Yamashita and Yuya Yamashita and Atsushi Nezu and Hiroshi Akatsuka}, title = {Estimation of atmospheric-pressure non-equilibrium Ar plasma EEDF using optical emission spectroscopy and linear combination of generalized EEDF}, booktitle = {Proceedings of 25th International Symposium on Plasma Chemistry (ISPC25)}, year = 2023, } @inproceedings{CTT100891419, author = {Jun Enomoto and Wataru Kikuchi and Kouhei Yamashita and Atsushi Nezu and Hiroshi Akatsuka}, title = {Determination of the electron temperature and density of non-equilibrium atmospheric-pressure Ar plasma by OES using two-tempareture EEDF}, booktitle = {Proceedings of 25th International Symposium on Plasma Chemistry (ISPC25)}, year = 2023, } @inproceedings{CTT100887165, author = {山下 雄也 and 土居 謙太 and 清田 哲司 and 浅川 慶一郎 and 細谷 宗太郎 and 菊地 航行 and 根津 篤 and 赤塚 洋}, title = {トモグラフィック発光分光計測によるアルゴン誘導結合プラズマの電子温度・電子密度の空間分布診断}, booktitle = {2023年第70回応用物理学会春季学術講演会 講演予稿集}, year = 2023, } @inproceedings{CTT100907446, author = {Keren Lin and Thijs van der Gaag and Wataru Kikuchi and Hiroshi Akatsuka and Motoshi Goto}, title = {Progress in OES Diagnostics of Atmospheric Pressure Argon Plasma: Electron Temperature and Density Assessment through Visible Bremsstrahlung Inversion method and Collisional-Radiative Model}, booktitle = {Proc. 2023 nifs Atomic Process Workshop}, year = 2023, }