@article{CTT100738837, author = {K. Ohsawa and S. Netsu and N. Kise and S. Noguchi and Y. Miyamoto}, title = {Dependence of electron mobility on gate voltage sweeping width and deposition temperature in MOSFETs with HfO2/Al2O3/InGaAs gate stacks}, journal = {Jpn. J. Appl. Phys.}, year = 2017, } @inproceedings{CTT100740854, author = {大澤 一斗 and 野口 真司 and 祢津 誠晃 and 木瀬 信和 and 宮本 恭幸}, title = {[16p-413-11] HfO2/Al2O3/InGaAsゲート構造をもつMOSFETの移動度のH2アニール後における成膜温度およびAl2O3膜厚依存性}, booktitle = {}, year = 2017, } @inproceedings{CTT100740944, author = {大澤一斗 and 野口真司 and 祢津誠晃 and 木瀬信和 and 宮本恭幸}, title = {HfO2/Al2O3/InGaAsゲート構造における移動度への成膜温度およびH2アニールの影響}, booktitle = {信学技報}, year = 2017, }