@article{CTT100586716, author = {Keita Inoue and Dhanorm Plumwongrot and Nobuhiko Nishiyama and Shinichi Sakamoto and Haruki Enomoto and Shigeo Tamura and Takeo Maruyama and Shigehisa Arai}, title = {Loss Reduction of Si Wire Waveguide Fabricated by Edge-Enhancement Writing for Electron Beam Lithography and Reactive Ion Etching Using Double Layered Resist Mask with C60}, journal = {Jpn. J. Appl. Phys.}, year = 2009, } @inproceedings{CTT100611653, author = {西山伸彦 and 荒井滋久 and 奥村忠嗣 and 伊藤 瞳 and 榎本晴基 and 近藤志文 and 前田泰奈 and 長部 亮 and 雨宮智宏}, title = {Si/III-Vハイブリッド光デバイスと関連技術}, booktitle = {日本学術振興会半導体界面制御技術第154委員会}, year = 2010, } @inproceedings{CTT100586759, author = {Yuki Atsumi and Nobuhiko Nishiyama and Haruki Enomoto and Keita Inoue and SHIGEHISA ARAI}, title = {Athermal Wavelength Property of Si-Slot Ring Resonator Embedded with Benzocyclobutene}, booktitle = {}, year = 2009, } @inproceedings{CTT100591357, author = {Haruki ENOMOTO and Keita INOUE and Tadashi OKUMURA and Hanh DUC NGUYEN and Nobuhiko NISHIYAMA and Yuki ATSUMI and Simon KONDO and Shigehisa ARAI}, title = {Properties of High index-Contrast Wired GaInAsP Waveguides with Benzocyclobutene on Si Substrate}, booktitle = {The 21th International Conference on Indium Phosphide and Related Materials (IPRM2009)}, year = 2009, } @inproceedings{CTT100586747, author = {渥美裕樹 and 西山伸彦 and 榎本晴基 and 井上敬太 and 荒井滋久}, title = {BCB埋め込みSiスロット導波路による波長フィルタの温度無依存化の検討}, booktitle = {第56回春季応用物理学会学術講演会予稿集}, year = 2009, } @inproceedings{CTT100591359, author = {榎本晴基 and 井上敬太 and 奥村忠嗣 and グェン・ドゥック・ハン and 西山伸彦 and 渥美裕樹 and 近藤志文 and 荒井滋久}, title = {Si上BCB貼付型強光閉じ込めGaInAsP細線導波路の特性}, booktitle = {第56回春季応用物理学会学術講演会予稿集}, year = 2009, } @inproceedings{CTT100565922, author = {Keita Inoue and Dhanorm Plumuwongrot and Nobuhiko Nishiyama and Shinichi Sakamoto and Haruki Enomoto and Shigeo Tamura and Takeo Maruyama and Shigehisa Arai}, title = {Loss Reduction of SiWireWaveguide on SOI Substrate Prepared by Parallel Plate RIE using Double Layered Resist Mask with C60}, booktitle = {IEEE NMDC2008}, year = 2008, } @inproceedings{CTT100565221, author = {Haruki Enomoto and Hai Duc Nguyen and Keita Inoue and Shinichi Sakamoto and Tadashi Okumura and Nobuhiko Nishiyama and Shimon Kondo and Shigehisa Arai}, title = {Comparison of Wafer Bonding Methods of Membrane GaInAsP WiredWaveguides on Si Substrate}, booktitle = {2008 International Nano-Optoelectronics Workshop}, year = 2008, } @inproceedings{CTT100564654, author = {Keita Inoue and Nobuhiko Nishiyama and Haruki Enomoto and Shigeo tamura and Takeo Maruyama and Shigehisa Arai}, title = {Evaluation of Si Wire Waveguide Fabricated by Parallel Plate RIE Process using Double Layered EB Resist Containing C60}, booktitle = {Digest of iNOW2008}, year = 2008, } @inproceedings{CTT100549006, author = {井上敬太 and プルームウォンロート・タノーム and 西山伸彦 and 阪本真一 and 榎本晴基 and 田村茂雄 and 丸山武男 and 荒井滋久}, title = {C60含有と非含有EBレジストZEPの重ね塗りによるSi導波路ドライエッチング形状の向上}, booktitle = {第55回応用物理学関係連合講演会}, year = 2008, }