@inproceedings{CTT100733809, author = {清水美咲 and 西岡國生 and 松谷晃宏 and 吉田和弘 and 金俊完}, title = {DRIEによる高アスペクト比三角柱-スリット形電極対(TPSE)の製作に関する研究}, booktitle = {山梨講演会講演論文集}, year = 2016, } @inproceedings{CTT100734300, author = {Misaki Shimizu and Kunio Nishioka and Akihiro Matsutani and Kazuhiro Yoshida and Joon-wan Kim}, title = {Study on Fabrication of High Aspect Ratio TPSE by using DRIE}, booktitle = {20th International Conference on Mechatronics Technology(ICMT2016)}, year = 2016, } @inproceedings{CTT100699955, author = {清水美咲 and 金俊完 and 横田眞一 and 枝村一弥}, title = {DRIEを用いた三角柱ースリット型電極対の製作によるECF効果に関する研究}, booktitle = {日本設計工学会 2015年度春季大会研究発表講演会講演論文集}, year = 2015, } @inproceedings{CTT100690744, author = {Misaki Shimizu and Joon-wan Kim and Shinichi Yokota and Kazuya Edamura}, title = {Proposal of DRIE-Fabricated Silicon Electrode Pairs for ECF Micropumps}, booktitle = {ICMDT2015 Proceedings}, year = 2015, }