@article{CTT100845762, author = {T. Aota and A. Hayasaka and I. Makabe and S. Yoshida and T. Gotow and Y. Miyamoto}, title = {Wet etching for isolation of N-polar GaN HEMT structure by electrodeless photo-assisted electrochemical reaction}, journal = {Japanese Journal of Applied Physics}, year = 2021, } @inproceedings{CTT100875027, author = {T. Gotow and T. Arai and T. Aota and Y. Miyamoto}, title = {Evaluation of TMAH treatment for isolation process of N-polar GaN HEMTs}, booktitle = {}, year = 2022, } @inproceedings{CTT100880230, author = {新井貴大 and 青田智也 and 眞壁勇夫 and 中田健 and 後藤高寛 and 宮本恭幸}, title = {N極性GaN HEMTのTMAHによる素子分離}, booktitle = {}, year = 2022, } @inproceedings{CTT100842580, author = {Tomoya Aota and Akihiro Hayasaka and isao makabe and Shigeki Yoshida and Takahiro Gotow and YASUYUKI MIYAMOTO}, title = {Wet Etching for Isolation of N-polar GaN HEMT Structure by Electrodeless Photo-Assisted Electrochemical Reaction}, booktitle = {}, year = 2020, } @inproceedings{CTT100842581, author = {青田 智也 and 早坂 明泰 and 眞壁 勇夫 and 吉田 成輝 and 後藤 高寛 and 宮本 恭幸}, title = {N極性GaN HEMT構造での無電極PECエッチング}, booktitle = {}, year = 2020, }