@article{CTT100926674,
  author = {Kosuke Takenaka and Hibiki Komatsu and Taichi Sagano and Keisuke Ide and Susumu Toko and Takayoshi Katase and Toshio Kamiya and Yuichi Setsuhara},
  title = {Hydrogen-included Plasma-assisted Reactive Sputtering for Conductivity Control of Ultra-Wide Bandgap Amorphous Gallium Oxide},
  journal = {Jpn. J. Appl. Phys.},
  year = 2024,
}

@inproceedings{CTT100886110,
  author = {嵯峨野太一 and 井手啓介 and 片瀬貴義 and 平松秀典 and 細野秀雄 and 神谷利夫},
  title = {スパッタリング法によるアモルファス酸化ガリウム薄膜の作製とダイオー ド特性の評価},
  booktitle = {},
  year = 2022,
}