@book{CTT100770100, author = {Tso-Fu Mark Chang and Chun-Yi Chen and Yota Ishizuka and Minami Teranishi and Takuma Suzuki and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Design of Au-Based Micro-Components with High Structure Stability for Applications in MEMS Inertial Sensors}, publisher = {IFSA Publishing}, year = 2019, } @article{CTT100766253, author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Shin-ichi Iida and Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu}, title = {Temperature Characteristics of MEMS Inertial Sensor Fabricated by Gold Multi-Layer Metal Technology}, journal = {}, year = 2018, } @inproceedings{CTT100892413, author = {多田英司 and 大井梓 and 佐藤晃 and 鈴木拓真 and 沖 修一 and 小池 正俊}, title = {実車走行試験におけるAl 合金/鉄鋼対のガルバニック腐食挙動の電気化学インピーダンス法による腐食モニタリング}, booktitle = {}, year = 2023, } @inproceedings{CTT100791878, author = {Hitomi Watanabe and Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {High Structure Stability Ti/Au Multiple Layer Micro-Cantilever and the Temperature Dependence}, booktitle = {}, year = 2019, } @inproceedings{CTT100790675, author = {渡邊 瞳 and 鈴木 拓真 and Chen Chun-Yi and Chang Tso-Fu Mark and 山根 大輔 and 小西 敏文 and 町田 克之 and 伊藤 浩之 and 益 一哉 and 曽根 正人}, title = {Ti/Au微小カンチレバーの温度依存性への積層構造の影響}, booktitle = {}, year = 2019, } @inproceedings{CTT100769742, author = {Hitomi Watanabe and Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Effects of Ti/Au Layered Structure on Temperature Dependence of Micro-Cantilever Structure Stability}, booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)}, year = 2018, } @inproceedings{CTT100751723, author = {Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Temperature Structure Stability of Multi-Ti/Au-Layered Micro-Cantilever}, booktitle = {}, year = 2017, } @inproceedings{CTT100751442, author = {Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology}, booktitle = {}, year = 2017, } @inproceedings{CTT100735887, author = {鈴木 拓真 and Chang Tso-Fu Mark and Chen Chun-Yi and 小西 敏文 and 町田 克之 and 年吉 洋 and 山根 大輔 and 益 一哉 and 曽根 正人}, title = {積層メタル技術によるTi/Auマイクロカンチレバーの温度依存性のシミュレーションの検討}, booktitle = {応用物理学会 2017年春季講演会}, year = 2017, }